• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.184-184
• /
• 1999

반도체소자의 고집적, 미세화에 따라 MOSFET 소자에서의 고농도, 미세접합이 요구되고 있다. 이러한 고농도, 미세접합을 형성하기 위하여 기존의 저에너지 이온주입법을 대체 또는 병행할 목적으로 플라즈마 이온주입방법이 활발히 연구되고 있다. 본 연구에서는 플라즈마 이온주입방법을 이용하여 (100) 실리콘 기판에 보론을 주입후 열처리하여 형성된 p+층의 도펀트의 활성화와 이온주입으로 인한 실리콘 기판의 손상을 고찰하였다. 본 실험에서 (100)실리콘 기판에 도핑할 소스 가스로 BF3을 주입하고, D.C. pulse 플라즈마 도핑시스템을 사용하여 플라즈마 내의 보론이온을 웨이퍼 홀더에 -1~-5kV의 인가된 음전압에 의해 가속시키어 실리콘 웨이퍼에 주입하였다. 주입에너지 -1kV, -3kV, -5kV와 1$\times$1015, 3$\times$1515의 dose로 주입된 실리콘 기판을 급속가열방식(RTP)을 사용하여 $600^{\circ}C$~110$0^{\circ}C$의 온도구간에서 10초와 30초로 열처리하여 도펀트의 활성화와 미세접합을 형성한 후 SIMS, four-point probe, Hall 측정, 그리고 FT-IR을 이용하여 플라즈마 이온주입된 도펀트의 거동과 활성화율을 관찰하였고 FT-IR과 TEM의 분석을 통하여 이온주입으로 인한 실리콘 기판의 손상을 고찰하였다. SIMS, four-point probe, Hall 측정, 그리고 FT-IR의 분석으로 열처리 온도의 증가에 따라 도펀트의 활성화율이 증가하였고, 이온주입 에너지와 dose 그리고 열처리 시간의 증가에 따라서 주입된 도펀트의 활성화는 증가하였다. 그리고 주입에너지와 dose 그리고 열처리 시간의 증가에 따라서 주입된 도펀트의 활성화는 증가하였다. 그리고 주입에너지와 dose를 증가시키면 접합깊이가 증가함을 관찰하였다. 이온주입으로 인한 기판손상의 분석을 광학적 방법인 FT-IR과 미세구조를 분석할 수 있는 TEM을 이용하여 분석하였다. 이온주입으로 인한 dislocation이나 EOR(End Of Range)과 같은 extended defect가 없었고, 이온주입으로 인한 비정질층도 없는 p+층을 얻을수 있었다.

• Journal of Korean Society of Transportation
• /
• v.28 no.5
• /
• pp.55-64
• /
• 2010

In order to prepare an efficient solution for PM10 reduction in underground stations, the authors measured PM10 concentration levels every 30 minutes in the concourse, platform, and tunnel of Gaehwasan Station of Seoul's subway line 5. Through a correlation analysis of each changing pattern of PM10 concentration, the direction and velocity of diffusion in underground stations were estimated. The PM10 concentration levels were highest in the tunnel, followed by the platform and concourse. PM10 concentrations in the tunnel, platform, and concourse showed a pattern of increasing in the rush hours and decreasing in the non-rush hours. According to the statistical analysis of PM10 concentrations and changing patterns in each location, the higher PM10 concentration in the tunnel expanded to the platform, and some from the platform expanded to the concourse. Therefore, to efficiently reduce PM10 concentrations, it is essential to detect the centralized generation, diffusion factor, expanding route, expanding measure, and other variables and to remove or reduce the diffusion factor and level. Through operating the ventilation system in the right time frame while the PM10 concentration level increases, the power consumption and peak power consumption can be reduced.

• Economic and Environmental Geology
• /
• v.56 no.5
• /
• pp.557-564
• /
• 2023

Nuclear materials such as uranium are used as fuel for nuclear power generation, but there is a high possibility that they will be used for non-peaceful purposes, so international inspections and regulations are being conducted. Isotope analysis data of fine particulate obtained from nuclear facilities can provide important information on the origin and concentration method of nuclear material, so it is widely used in the field of nuclear safety and nuclear forensics. In this study we describe the analytical method that can directly identify nuclear particles and measure their isotopic ratios for fine samples using a large-geometry secondary ion mass spectrometer and introduce its preliminary results. Using the U-200 standard material, the location of fine particles was identified and the results consistent with the standard value were obtained through microbeam analysis.

• Proceedings of the Korea Water Resources Association Conference
• /
• 2023.05a
• /
• pp.216-216
• /
• 2023

가속적인 토양침식은 토지의 환경 및 생태계의 지속성에 부정적 영향을 미치므로, 그 양을 예측하여 토양침식을 방지하는 것은 중요하다. 이에 따라 식생, 지형, 토양의 입도분포 등과 같은 토양침식에 영향을 미치는 인자에 관한 연구가 꾸준히 이뤄지고 있다. 특히 자연 지형에서 보편적으로 나타나는 'cm' 규모의 미세지형이 토양침식에 미치는 영향을 분석한 기존 연구 결과를 살펴보면, 유역 출구 지점에서 관측된 총 유사유출량에만 근거하고 있을 뿐 아니라 토양침식에 미치는 미세지형의 영향에 관한 상반된 결과가 혼재하고 있다. 이는 유역의 토양침식과정에 대한 이해도와 토양침식량에 대한 예측 정확도를 저하시킬 우려가 있으므로 미세지형이 토양침식에 미치는 영향을 유역 전반에 걸쳐 살펴본 후, 명확하게 하는 것이 필요하다. 본 연구에서는 동역학파 모형에 기반한 침식 모형을 이용하여 미세지형에서의 강우-유출 및 토사 입자별 침식 및 유출 현상을 수치적으로 모의하였다. 모의 결과에 따르면, 동일한 강우-유출 조건에서도 미세지형의 거칠기에 따라 유역의 토양침식량 및 침식 특성이 달라질 수 있으며, 토양 입경이 미세지형의 거칠기에 따른 유사유출량의 증감 현상을 결정하는 데에 있어 중요한 요소로 작용함을 제시하였다. 미세지형이 거칠어짐에 따라 비교적 굵은 입자인 모래 함량이 높은 지반에서는 토양침식률이 감소하였으나 이와 대조적으로 미세토사 함량이 높은 지반에서는 토양침식률이 증가하였다. 이는 미세지형이 유역 전반에 걸쳐 입경에 따른 토사의 부상, 이류 및 퇴적 특성에 영향을 미쳐, 유역의 유사 분급 및 장갑화 현상에 깊게 관여하였기 때문이다. 본 연구를 통해 토양유실에 미치는 미세지형의 영향에 관한 상반된 연구 결과를 미세지형과 토양 입경분포의 상호작용으로 설명할 수 있다. 따라서, 본 연구는 유역 내 미세지형적 거칠기 입경분포에 대한 정확한 정보에 기반하여 토양의 유실량 및 침식량을 산정해야 함을 강조한다.

• Journal of the Korea Convergence Society
• /
• v.8 no.11
• /
• pp.413-421
• /
• 2017

This study explored relationships between health perception and behavior of Korean relevant to particulate matter(PM) as PM in the atmosphere getting worse. To investigate the relationship in the personal hygiene dimension, we analysed the structural relationships among multi-dimensional health locus of control, perceived susceptibility and severity, and health behavior intention. Except internal among three tendencies of multi-dimensional health locus of control, chance and powerful other had an effect on perceived susceptibility and severity, respectively. Perceived susceptibility and severity also had a positive effect on the intention. Thus, to facilitate PM-related disease prevention, timely and reliable information should be supplied with the solution for lessening damage from PM, and then training for internalizing locus of control should be encouraged through eliminating fear and uncertainty. Finally, we discussed suggestions for future study.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.27 no.4
• /
• pp.191-195
• /
• 2017

The microstructures of nonwoven fabric with and without nanofibers used as a filter for air purification type mask were investigated using scanning electron microscope. Moreover, we proposed a new mask design which is effective in the improvement of the fine dust blocking property. When comparing to nonwoven fabrics of which an average diameter was $25{\mu}m$, the nanofibers formed by the electrospinning process had a tight mesh structure arranged irregularly with a relatively large specific surface area, which could be associated with their much smaller diameter ranging from 25 to 120 nm. Such a prominent structural feature at nanofibers led to mechanical adsorption of fine particles, resulting in enhancement of filtering behavior maintaining high permeability. In addition to the excellent performance of the mask filter, wearing the mask properly is expected to maximize the blocking property of fine dust. To meet such a requirement, a new mask design that can be closely attached to the face in order to effectively block fine dust entering the gap between the face and the mask.

• Proceedings of the Korea Society of Environmental Biology Conference
• /
• 2001.12a
• /
• pp.139-139
• /
• 2001

• Journal of the KSME
• /
• v.50 no.11
• /
• pp.39-42
• /
• 2010

이 글에서는 미세유체시스템을 이용하여 암의 전이과정을 분석하고 관련된 치료제 및 기술을 개발하는 다양한 연구 성과에 대해 소개하고자 한다.

• The Sea:JOURNAL OF THE KOREAN SOCIETY OF OCEANOGRAPHY
• /
• v.19 no.1
• /
• pp.88-98
• /
• 2014

Despite of emerging and increasing concerns to microplastics, no standard methodology has not been proposed for determination of microplastics. This study aims to develop the analysis method for microplastics in seawater by overviewing methodologies proposed by previous studies and by assessing some processes in those methodologies which possibly cause uncertainties in microplastic determination. Furthermore, we present preliminary results of distribution characteristics of microplastics in seawater of Incheon/Kyeonggi coastal region which is based on our new methodology. Microplastics in surface microlayer (SML) and subsurface water (SSW) were collected using mesh screen and planktonic nets (trawl net with $330{\mu}m$ mesh size and hand net with $20{\mu}m$ mesh size), respectively. Microplastics with < $300{\mu}m$ was predominant, indicating hand net as the better collection tool for SSW. As for SML, FT-IR based microplastic concentration was well matched with naked-eye based concentration which has been used in most of previous studies. However, a poor relationship was observed for SSW, indicating that concentration data of previous SSW studies should be corrected. Incheon/Kyeonggi bay seawater contained the similar concentration range with those in coastal region of the Nakdong River. Our methodology can be used as a basic tool for further microplatic studies.

• Composites Research
• /
• v.32 no.5
• /
• pp.199-205
• /
• 2019

The composite material has the advantage that the fibers can be arranged in a desired direction and can be manufactured in one piece. However, micro voids can be formed due to micro air, moisture or improper curing temperature or pressure, which may cause the deterioration in mechanical strength. In this paper, the composite panels with different thicknesses were made by varying the curing pressure in an autoclave vacuum bag process and their microporosities were evaluated. Microporosity was measured by image analysis method, acid digestion method, and combustion method and their correlation with ultrasonic attenuation coefficient was analyzed. From the test results, it was found that the acid digestion method had the highest accuracy and the lower the curing pressure, the higher the microporosity and the ultrasonic attenuation coefficient. In addition, the microporosity and the ultrasonic attenuation coefficient were increased as the thickness of the composite panel was increased at the same curing pressure.