• 제목/요약/키워드: 모세관 리소그라피

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2단계 모세관 리소그라피 기술을 이용한 마이크로/나노 병합구조 공정 기술 및 수학적 모델을 통한 표면 특성 분석 (Fabrication of polymer hierarchical structures by two-step temperature-directed capillary)

  • 서갑양;정훈의;이성훈;김재관
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.272-274
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    • 2005
  • A simple method for fabricating micro/nanoscale hierarchical structures is presented using a two-step temperature-directed capillary molding technique. This lithographic method involves a sequential application of molding process in which a uniform polymer-coated surface is molded with a patterned mold by means of capillary force above the glass transition temperature of the polymer. Using this approach, multiscale hierarchical structures for biomimetic functional surfaces can be fabricated with precise control over geometrical parameters and the wettability of a solid surface can be designed in a controllable manner.

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모세관 리소그라피를 이용한 고종횡비 나노구조 형성법 (Capillary-driven Rigiflex Lithography for Fabricating High Aspect-Ratio Polymer Nanostructures)

  • 정훈의;이성훈;김필남;서갑양
    • 한국가시화정보학회지
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    • 제5권1호
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    • pp.3-8
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    • 2007
  • We present simple methods for fabricating high aspect-ratio polymer nanostructures on a solid substrate by rigiflex lithography with tailored capillarity and adhesive force. In the first method, a thin, thermoplastic polymer film was prepared by spin coating on a substrate and the temperature was raised above the polymer's glass transition temperature ($T_g$) while in conformal contact with a poly(urethane acrylate) (PUA) mold having nano-cavities. Consequently, capillarity forces the polymer film to rise into the void space of the mold, resulting in nanostructures with an aspect ratio of ${\sim}4$. In the second method, very high aspect-ratio (>20) nanohairs were fabricated by elongating the pre-formed nanostructures upon removal of the mold with the aid of tailored capillarity and adhesive force at the mold/polymer interface. Finally, these two methods were further used to fabricate micro/nano hierarchical structures by sequential application of the molding process for mimicking nature's functional surfaces such as a lotus leaf and gecko foot hairs.