• Proceedings of the KSME Conference
• /
• 2007.05b
• /
• pp.2055-2060
• /
• 2007

Microfin arrays with fin heights of 100 ${\mu}$m and 200 ${\mu}$m and six different spacings from 30 ${\mu}m$to 360 ${\mu}m$ are fabricated using the DRIE process. Natural convective heat transfer around the microfin arrays on both vertical and horizontal surfaces is experimentally examined. It turns out that the orientation effect of microfin arrays is negligible compared with macrofin arrays. The obtained heat transfer coefficients are compared with the existing heat transfer correlation for the macrofin arrays. It is concluded that the existing macrocorrelation is no longer valid for the microfin arrays. Relevant empirical correlations for microfin arrays on the vertical and horizontal surfaces are presented based on the present experimental data.