• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1179-1180
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• 2005

3D micro scaled shapes are fabricated with the method of direct writing and superposing grooving in ambient air using femto-second laser pulses and copper, aiming at establishing an industrially useful femto-second laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. For the several advantages, there is no thermally influenced region around the area irradiated by the laser beam and surfaces irradiated laser beam are smooth and substances ablated to form are no attached on the surface of works and so on, the femto-second laser technology is anticipated for advanced micro/nano precision technology.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.06a
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• pp.82-88
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1844-1847
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• 2003

Electrochemical micro-machining(EMM) is used to achieve a desired workpiece surface by dissolving the metal workpiece with an electrochemical reaction. This machining method can be applied to metal that is difficult to machining using other methods. The workpiece dissolves when it is positioned close to the tool electrode in electrolyte and current is applied. This aim of this work is to develop electrochemical micro-machining(EMM) technique for micro groove shape by establishing appropriate electrochemical parameters of machining

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.623-624
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• 2005

Micro injection molding is a branch of micro system technology and has been under development for the mass manufacture of micro parts. Enhanced technological products like micro optical devices are entering the market. This paper presents fundamental research on the injection molding technique in micro fabrication. In order to successful manufacturing of micro plastic parts, it is necessary to research for development of micro-injection machine, machining of micro mold, decision of optimum injection conditions and the research for polymer material. Therefore in this study, in order to machining of micro mold, a mold core with microscopic V-shaped groove was tooled by ultra-precise tooling machine. The transcription experiments with a polymer, PMMA resin on the surface of core with Ni plating were carried out and surface profile of injected parts was measured with AFM.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.37-44
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• 2005

In this paper, wire electrochemical machining (Wire ECM) with ultra short pulses is presented. Platinum wire with $10{\mu}m$ diameter was used as a tool and 304 stainless steel was locally dissolved by electrochemical machining in 0.1M $H_{2}SO_4$ electrolyte. Wire ECM can be easily applied to the fabrication of arbitrarily shaped micro-grooves without tool wear. The change of machining gap according to applied pulse voltage, pulse on-time and pulse period was investigated and the optimal pulse condition for stable machining was obtained. Using this method, various micro-grooves with less than $20{\mu}m$ width were fabricated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.918-921
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• 2000

Micro-machining, one of the non-traditional machining techniques, can achieve a wanted shape of the surface using metal dissolution with electrochemical reaction and can be applied to the metal such as high tension, heat resistance and hardened steel. The workpiece dissolves when it is positioned close to the tool electrode in electrolyte and the current is applied. Traditional machining has been used in the industries such as cutting, deburring, drilling and shaping. The aim of this work is to develop Micro-machining techniques for micro shape by establishing appropriate machining parameters of micro-machining

• Journal of the Korean Society for Precision Engineering
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• v.19 no.4
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• pp.101-108
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• 2002

A specially-built EMM (Electrochemical Micro Machining) / PECM (Pulse Electrochemical Machining) cell, a electrode tool filled with non-conducting material, a electrolyte flow control system and a small & stable gap control unit are developed to achieve accurate dimensions of recesses. Two electrolytes, aqueous sodium nitrate and aqueous sodium chloridc arc applied in this study. The farmer electrolyte has better machine-ability than the latter one because of its appropriate changing to the transpassive state without pits on the surface of workpiece. It is easier to control the machining depth precisely by micrometer with pulse current than direct current. This paper also presents an identification method for the machining depth by in-process analysis of machining current and inter electrode gap size. The inter electrode gap characteristics, inc1uding pulse current, effective volumetric electrochemical equivalent and electrolyte conductivity variations, are analyzed based on the model and experiments.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.12
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• pp.5412-5419
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• 2011

The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.977-980
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• 1997

Ultraprecision machining process and MEMS technology have been taken more and more important position in machining of micro parts such as PDP and IT components, as the application field of micro parts increases. A micro machining center is very effective equipment for the fabrication of micro parts, because of its benefits such as lower power consumption, high precision and lower machining cost. Therefore, we study the possibility of application to the micro machining of barrier ribs used in PDP and also analyse the machining characteristics. The fabricated barrier rib has 30~$200\mu\textrm{m}$ pitch and was made by the flat endmill with the diameter of 0.2mm, 40, 000rpm condition.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.334-339
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• 2004

Ultraprecision machining and MEMS technology have been taken more and more important position in machining of microparts. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products. Also, the method of micro-grooving using micro endmilling is used widely owing to many merit, but has problems of precision and quality of products due to tool wear and tool fracture. This investigation deals with state monitoring using acoustic emission(AE) signal in the micro-grooving. Characteristic evaluation of AE raw signal, AE hit and frequency analysis for state monitoring is also presented in the paper.