• Title/Summary/Keyword: 마이크로 패턴

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Enhancement of Blue LED's efficiency with nano-patterned sapphire substrate fabricated by using nano-imprint lithography (나노임프린트 리소그래피를 이용한 나노 패턴 사파이어 기판 제작과 이를 이용한 청색 LED의 효율 향상 연구)

  • Kim, Jin-Seung;Jo, Jung-Yeon;Lee, Heon
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.05a
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    • pp.164-164
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    • 2012
  • 청색 발광 다이오드의 광추출 효율 향상 및 전기적 특성 향상을 위하여 기판이 되는 사파이어에 마이크로급 패턴을 형성하는 공정이 일반적으로 사용되고 있다. 기존의 공정과는 달리, 저가의 간단한 공정을 통해 쉽게 유사한 성능 향상을 얻기 위하여, 나노임프린트 리소그래피 공정을 도입하여 사파이어 기판 상에 일정한 주기와 형태를 갖는 나노 패턴을 형성하였으며, 이를 이용하여 제작한 발광 다이오드의 성능이 전기적, 광학적 측면에서 크게 향상되었음을 확인할 수 있었다.

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Miniature Fluorescence Detection System for Protein Chip (초소형 미세형광측정 스캐닝 시스템)

  • Kim, Yong-Yun;Kim, Ho-Seong;Seong, Chun-Ya;Lee, Kook-Nyung;Kim, Yong-Kwon
    • Proceedings of the KIEE Conference
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    • 2002.11a
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    • pp.254-256
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    • 2002
  • 광섬유, 마이크로렌즈, 마이크로 프리즘, 마이크로 스캐너로 구성된 단백질 분석용 초소형 형광측정 시스템을 설계하였다. SNR을 높이기 위해 단백질 패턴에 여기광이 수직이 아닌 비스듬하게 입사하는 구조를 제안하였으며 그 가능성을 실험적으로 확인하였다.

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Development of Ignition System for MEMS Solid Propellant Thruster (MEMS 고체 추진제 추력기의 점화 시스템 개발)

  • Lee, Jong-Kwang;Park, Jong-Ik;Kwon, Se-Jin
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2007.04a
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    • pp.91-94
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    • 2007
  • The fabrication and firing test of the ignition system for a micro solid propellant thruster are described in the present paper. Pt igniter coil was patterned on the glass membrane that was fabricated by the wet etching process. The thickness of Pt layer was $2000{\AA}$ and the width of igniter pattern was $40{\mu}m$. The thickness and diameter of glass membrane were $15{\mu}m$ and 1 mm, respectively. Ignition test was performed. Successful ignition of HTPB/AP propellant was obtained with an ignition delay of 1.6 s at an input voltage of 12 V. The ignition energy was estimated to be 1.4 J.

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Fabrication of Nanopatterns for Biochip by Nanoimprint Lithography (나노임프린트를 이용한 바이오칩용 나노 패턴 제작)

  • Choi, Ho-Gil;Kim, Soon-Joong;Oh, Byung-Ken;Choi, Jeong-Woo
    • KSBB Journal
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    • v.22 no.6
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    • pp.433-437
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    • 2007
  • A constant desire has been to fabricate nanopatterns for biochip and the Ultraviolet-nano imprint lithography (UV-NIL) is promising technology especially compared with thermal type in view of cost effectiveness. By using this method, nano-scale to micro-scale structures also called nanopore structures can be fabricated on large scale gold plate at normal conditions such as room temperature or low pressure which is not possible in thermal type lithography. One of the most important methods in fabricating biochips, immobilizing, was processed successfully by using this technology. That means immobilizing proteins only on the nanopore structures based on gold, not on hardened resin by UV is now possible by utilizing this method. So this selective nano-patterning process of protein can be useful method fabricating nanoscale protein chip.

RFID Antenna Based on Ga-doped ZnO Transparent Conducting Oxide (Ga-doped ZnO 투명전도막의 RFID 안테나 응용)

  • Han, Jae-Sung;Lee, Seok-Jin;Jung, Tae-Hwan;Kim, Jeong-Yeon;Park, Jae-Hwan;Lim, Dong-Gun;Lim, Seong-Woo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.78-79
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    • 2009
  • 본 연구에서는 ZnO계 투명전극 소재를 이용하여 RFID 태그 안테나에 적용 가능성 여부를 확인하였다. Si 기판위에 RF 스퍼터링 공정에 의해 Ga-doped ZnO 투명 마이크로스트립 스파이혈 안테나를 $2{\mu}m$를 증착하여 구현하고 그 전기적 특성을 측정하였다. HFSS 전자계 시뮬레이터를 사용하여 13.56MHz HF 주파수 대역에서 태그 안테나로서의 가능성을 검증한 후 Ga-doped ZnO 타겟을 사용한 RF 스퍼터링 공정에 의하여 스파이럴 안테나 패턴을 구현하였다. 마이크로스트립 선폭 및 선 간격을 $50\sim200{\mu}m$때 영역에서 조절하면서 안테나 패턴을 설계하였다. S 파라메터, 자기공진주파수 및 Q값을 시뮬레이션으로부터 도출하였다. Al $2{\mu}m$ 증착한 시편에 비하여 약 -10dB 정도의 이득저하가 발생하였으나 리더-태그를 밀착시킨 조건에서 1.7V (13.56MHz) 전압검출이 가능하였다.

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An Experimental Study on the Replication Ratio of Micro Patterns considering the Thickness Change of Injection Molded Parts (사출성형품의 두께변화에 따른 마이크로 패턴의 전사율에 관한 실험적 연구)

  • Jeong, C.;Kim, J.D.;Kim, J.S.;Yoon, K.H.;Hwang, C.J.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2009.05a
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    • pp.176-179
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    • 2009
  • Injection molding is one of the most general manufacturing processes of polymers. The deformation of final molded parts occurs because of the change of temperature and pressure during injection molding process. The deformation of injection molded parts depends on many operational conditions, such as, melt temperature, injection speed, mold temperature, packing pressure, and the structure of mold. In the present paper, injection molding experiments were performed to find the process conditions to affect the average shrinkage in thickness direction and the replication ratio of fine patterns on the surface for the final injection-molded LGP samples. As a results, in the cases of PC(Polycarbonate), when the melt temperature was under $285^{\circ}C$, both average shrinkage and replication ratios were mainly influenced by packing pressure. However, the replication ratio was more influenced by melt temperature than packing pressure for the cases of higher melt temperature.

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Color Adjustment Study by Micro-Pattern Embedding in Optical Multilayer Thin Film (다층광학필름에서 마이크로패턴 삽입을 통한 색 조정 연구)

  • Kim, Min;Woo, Ju Yeon;Yoon, Junho;Hwangbo, Chang Kwon;Han, Chang-Soo
    • Journal of the Korean Society for Precision Engineering
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    • v.33 no.5
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    • pp.409-417
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    • 2016
  • It is well known that Morpho butterflies show distinctive, brilliant and iridescent colors and have micro-nano scale structures, instead of dyes and pigments, on their wings. This structural coloration is regarded as a novel technique to express color with a long lifetime, ease and precise tenability. Here, we studied optical multilayer thin films with thickness of several tens of nm ($TiO_2$ and $SiO_2$) and lens-shape micro-patterns. Fabrication and characterization of the multilayer stacking structure and the micro-pattern structure were performed and the films were analyzed via several optical measuring techniques. Finally, we discussed how the micro-pattern structure could enhance independence with color changes according to the viewing angle.

A Study on the Bandwidth Enhancement of a Microstrip Surface Wave Antenna With a Monopole Like Pattern (모노폴 방사패턴을 가지는 마이크로스트립 표면파 안테나의 대역폭개선에 관한 연구)

  • Jang, Jae-Sam;Jung, Young-Ho;Lee, Ho-Sang;Jo, Dong-Ki;Park, Seong-Bae;Kim, Cheol-Bok;Lee, Mun-Soo
    • Journal of the Institute of Electronics Engineers of Korea TC
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    • v.45 no.12
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    • pp.139-145
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    • 2008
  • In this paper, a microstrip surface wave antenna(SWA) with a frequency selective surface structure(FSS) is designed and measured. A microstrip SWA has many advantages such as low profile, low weight, easy fabrication, and compatibility with monolithic microwave integrated circuits(MMIC). In addition, it has demonstrated monopole like beam patterns. The microstrip SWA consists of two parts : a center-fed modified microstrip patch to excite surface wave, and a periodic patches to support the propagation of the surface waves. To obtain wide bandwidth, the ring type parasitic element is inserted and the circular patch is selected for the unit element in FSS structure. Experimental results show that the microstrip SWA has monopole like beam patterns at 5.9GHz. Impedance bandwidth and gain is 12% and 5.6dBi.

Friction Property for Angles of Micro-crosshatch Grooved Surface Pattern under Lubricated Sliding Contact (마이크로 Crosshatch 그루우브 표면패턴의 각도에 따른 미끄럼 마찰특성)

  • Chae, Young-Hun
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.1 s.190
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    • pp.79-84
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    • 2007
  • Some surface pattern of tribological application is an attractive technology of engineered surface. Therefore, friction reduction is considered to be necessary for improved efficiency of machine. This study investigated the effect of friction property for angles of micro-crosshatch groove surface pattern on bearing steel using pin-on-disk test. We obtain sample which can be fabricated by photolithography process. We discuss the friction property depend on an angle of crosshatch groove surface pattern. We can verify the lubrication mechanism as Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter under the lubrication condition. It was found that the friction coefficient was related to angle of crosshatch groove pattern on contact surface.

A Study on Compound Technique for Increasing the Bandwidth of Microstrip Antennas Using the Parallel Coupled Lines (평행 결합 선로를 이용한 복합 광대역 기법 적용 마이크로스트립 안테나에 관한 연구)

  • 김정일;한만군;윤영중
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2000.11a
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    • pp.328-332
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    • 2000
  • 본 논문에서는 기생 패치 구조와 적층 구조의 광대역 마이크로스트립 안테나에 평행 결합 선로 형태의 광대역 임피던스 정합 회로를 결합하여 쉽게 추가적인 임피던스 대역폭 개선을 얻을 수 있음을 제안하였다. 평행 결합 선로 형태의 광대역 임피던스 정합 회로 설계를 위하여 분포 회로 방식의 반복적인 방법을 제시하였고. 설계\ulcorner제작 결과 기생 패치 구조와 적층 구조에서 각각 56.23%와 16.45%의 추가적인 임피던스 대역폭 개선을 이룰 수 있었다. 그리고 방사 패턴과 측정된 이득을 보면 평행 결합 선로의 결합으로 인한 방사 패턴에서의 큰 변화는 보이지 않았고, 이득에서는 평행 결합 선로 부분의 커플링 손실로 인해 최대 이득이 약 1 dB 정도 감소하는 것을 확인할 수 있었다.

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