• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.11a
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• pp.17-20
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• 2000

• Journal of the Microelectronics and Packaging Society
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• v.7 no.3
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• pp.1-6
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• 2000

A simple and compact type of thermoelectric generator was developed as the energy saving system using waste hot water and low temperature waste heat sources. Sixteen of Bi-Te thermoelectric modules were packaged in series for thermoelectric conversion system using hot water as heat source. The thermoelectric generator shows the power output of about 4.5 W with the temperature difference of about 75 K at 40 $\Omega$ and 0.35 A for the electrical resistance and current of the used thermoelectric module, respectively.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1455-1458
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• 2007

In this research, a polycrystalline silicon (poly-Si) film layer for micro thermoelectric generator (TEG) was fabricated. The fabrication process of the thermoelectric poly-Si film layer is explained. The P-type and N-type poly-Si films were fabricated on a tetra ethoxy silane (TEOS) layer with a supporting Si wafer. Seebeck coefficient and electrical conductivity were measured, including the transport properties such as the hall coefficient, hall mobility and carrier concentration. The design parameters for a rapid thermal process (RTP) were decided based on the experimental results. The measured power factors of the P-type and N-type were $21.2\;{\mu}Wm^{-1}K^{-2}$ and $26.7\;{\mu}Wm^{-1}K^{-2}$, respectively.