• Title/Summary/Keyword: 마이크로 스탬프

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Fabrication Process of a Nano-precision Polydimethylsiloxane Replica using Vacuum Pressure-Difference Technique (진공 압력차이법에 의한 나노 정밀도를 가지는 폴리디메틸실록산 형상복제)

  • 박상후;임태우;양동열;공홍진;이광섭
    • Polymer(Korea)
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    • v.28 no.4
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    • pp.305-313
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    • 2004
  • A vacuum pressure-difference technique for making a nano-precision replica is investigated for various applications. Master patterns for replication were fabricated using a nano-replication printing (nRP) process. In the nRP process, any picture and pattern can be replicated from a bitmap figure file in the range of several micrometers with resolution of 200nm. A liquid-state monomer is solidified by two-photon absorption (TPA) induced by a femto-second laser according to a voxel matrix scanning. After polymerization, the remaining monomers were removed simply by using ethanol droplets. And then, a gold metal layer of about 30nm thickness was deposited on the fabricated master patterns prior to polydimethylsiloxane molding for preventing bonding between the master and the polydimethylsiloxane mold. A few gold particles attached on the polydimethylsiloxane stamp during detaching process were removed by a gold selecting etchant. After fabricating the polydimethylsiloxane mold, a nano-precision polydimethylsiloxane replica was reproduced. More precise replica was produced by the vacuum pressure-difference technique that is proposed in this paper. Through this study, direct patterning on a glass plate, replicating a polydimethylsiloxane mold, and reproducing polydimethylsiloxane replica are demonstrated with a vacuum pressure-difference technique for various micro/nano-applications.

Fabrication of Hot Embossing Plastic Stamps for Microstructures (마이크로 구조물 형성을 위한 핫 엠보싱용 플라스틱 스탬프 제작)

  • Cha Nam-Goo;Park Chang-Hwa;Lim Hyun-Woo;Park Jin-Goo;Jeong Jun-Ho;Lee Eung-Sug
    • Korean Journal of Materials Research
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    • v.15 no.9
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    • pp.589-593
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    • 2005
  • Nanoimprinting lithography (NIL) is known as a suitable technique for fabricating nano and micro structures of high definition. Hot embossing is one of NIL techniques and can imprint on thin films and bulk polymers. Key issues of hot embossing are time and expense needed to produce a stamp withstanding a high temperature and pressure. Fabrication of a metal stamp such as an electroplated nickel is cost intensive and time consuming. A ceramic stamp made by silicon is easy to break when the pressure is applied. In this paper, a plastic stamp using a high temperature epoxy was fabricated and tested. The plastic stamp was relatively inexpensive, rapid to produce and durable enough to withstanding multiple hot embossing cycles. The merits of low viscosity epoxy solutions were a fast degassing and a rapid filling the microstructures. The hot embossing process with plastic stamp was performed on PMMA substrates. The hot embossing was conducted at 12.6 bar, $120^{\circ}C$ and 10 minutes. An imprinted PMMA wafer was almost same value of the plastic stamp after 10 times embossing. Entire fabrication process from silicon master to plastic stamp was completed within 12 hours.

Query Processing of Spatio-temporal Trajectory for Moving Objects (이동 객체를 위한 시공간 궤적의 질의 처리)

  • Byoungwoo Oh
    • Journal of Platform Technology
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    • v.11 no.1
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    • pp.52-59
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    • 2023
  • The importance of spatio-temporal trajectories for contact tracing has increased due to the recent COVID-19 pandemic. Spatio-temporal trajectories store time and spatial data of moving objects. In this paper, I propose query processing for spatio-temporal trajectories of moving objects. The spatio-temporal trajectory model of moving objects has point type spatial data for storing locations and timestamp type temporal data for time. A trajectory query is a query to search for pairs of users who have been in close contact by boarding the same bus. To process the trajectory query, I use the Geolife dataset provided by Microsoft. The proposed trajectory query processing method divides trajectory data by date and checks whether users' trajectories were nearby for each date to generate information about contacts as the result.

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UV-nanoimprint Patterning Without Residual Layers Using UV-blocking Metal Layer (UV 차단 금속막을 이용한 잔류층이 없는 UV 나노 임프린트 패턴 형성)

  • Moon Kanghun;Shin Subum;Park In-Sung;Lee Heon;Cha Han Sun;Ahn Jinho
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.4 s.37
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    • pp.275-280
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    • 2005
  • We propose a new approach to greatly simplify the fabrication of conventional nanoimprint lithography (NIL) by combined nanoimprint and photolithography (CNP). We introduce a hybrid mask mold (HMM) made from UV transparent material with a UV-blocking Cr metal layer placed on top of the mold protrusions. We used a negative tone photo resist (PR) with higher selectivity to substrate the CNP process instead of the UV curable monomer and thermal plastic polymer that has been commonly used in NIL. Self-assembled monolayer (SAM) on HMM plays a reliable role for pattern transfer when the HMM is separated from the transfer layer. Hydrophilic $SiO_2$ thin film was deposited on all parts of the HMM, which improved the formation of SAM. This $SiO_2$ film made a sub-10nm formation without any pattern damage. In the CNP technique with HMM, the 'residual layer' of the PR was chemically removed by the conventional developing process. Thus, it was possible to simplify the process by eliminating the dry etching process, which was essential in the conventional NIL method.

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User-independent blockchain donation system

  • Sang-Dong Sul;Su-Jeong Lee
    • Journal of the Korea Society of Computer and Information
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    • v.28 no.11
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    • pp.113-123
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    • 2023
  • This paper introduces the Cherry system, a user-independent blockchain donation system. This is a procedure that is delivered to the beneficiary's bank account through a virtual account when a donor makes a donation, so there is no difference from the existing donation delivery method from the user's point of view However, within the blockchain, Cherry Points, a virtual currency based on the user ID, are issued and delivered to the beneficiary, while all transactions and the beneficiary's usage history are managed on the blockchain. By adopting this method, there was an improvement in blockchain performance, with transaction processing exceeding 1,000 TPS in typical transaction condition and service completion within 21.3 seconds. By applying the automatic influence control algorithm to this system, the influence according to stake, which is an individual donation, is greatly reduced to 0.3 after 2 months, thereby concentrating influence could be controlled automatically. In addition, it was designed to enable micro tracking by adding a tracking function by timestamp to the donation ledger for each individual ID, which greatly improved the transparency in the use of donations. From a service perspective, existing blockchain donation systems were handled as limited donation delivery methods. Since it is a direct service in a user-independent method, convenience has been greatly improved by delivering donations in various forms.

Fabrication of Chemical Sensors for the Detection of Acidic Gas using 1,3-bisdicyanovinylindane (1,3-bisdicyanovinylindane을 이용한 산성가스 감지용 화학 센서 제작)

  • Song, Hwan-Moon;Park, Young-Min;Son, Young-A;Lee, Chang-Soo
    • Korean Chemical Engineering Research
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    • v.46 no.1
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    • pp.184-188
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    • 2008
  • This study presented simple and efficient fabrication of chemical sensors for the detection of acidic gas using 1,3-bisdicyanovinylindane as an indicator because it can be promising materials having property of the rapid color change according to the variation of pH. The dissociation of proton and dye in acidic condition as changing of ion pairs give rise to dramatically change the absorbance intensity of 1,3-bisdicyanovinylindane, which can be easily applied to the development of chemical sensors. In addition, indicator dyes having negatively charge in aqueous phase can be easily fabricated using layer-by-layer (LBL) methods by way of electrostatic interaction. For the proof of concept, we demonstrated the abrupt presentation of skeleton symbol on the chemical sensor, which could be resulted from the reaction of 1,3-bisdicyanovinylindane as background color with acidic gas. Thus, the rapid appearance of symbol will induce user's caution under the emergency condition. The presented chemical gas sensor using 1,3-bisdicyanovinylindane have strong advantages. First, the fabrication process of gas sensor was very simple and low-cost. Secondly, sensors reacted by acidic gas could be reused for several times. Finally, the chemical gas sensor would be environmentally friend, which can be a basic tool for the realization of eco-organic sensor device.