• 제목/요약/키워드: 마이크로/나노 병합구조

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2단계 모세관 리소그라피 기술을 이용한 마이크로/나노 병합구조 공정 기술 및 수학적 모델을 통한 표면 특성 분석 (Fabrication of polymer hierarchical structures by two-step temperature-directed capillary)

  • 서갑양;정훈의;이성훈;김재관
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.272-274
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    • 2005
  • A simple method for fabricating micro/nanoscale hierarchical structures is presented using a two-step temperature-directed capillary molding technique. This lithographic method involves a sequential application of molding process in which a uniform polymer-coated surface is molded with a patterned mold by means of capillary force above the glass transition temperature of the polymer. Using this approach, multiscale hierarchical structures for biomimetic functional surfaces can be fabricated with precise control over geometrical parameters and the wettability of a solid surface can be designed in a controllable manner.

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마이크로/나노 계층구조 형성법 및 응용 (Fabrication of micro/nanoscale hierarchical structures and its application)

  • 정훈의;곽노균;이승석;서갑양
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회A
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    • pp.426-428
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    • 2007
  • A simple method is presented for fabricating micro/nanoscale combined hierarchical structures using a two-step UV-assisted capillary molding technique. This lithographic method consists of two steps: (i) fabrication of partially cured polymer microstructures using a PDMS mold and (ii) subsequent nanofabrication using a high-resolution polyurethane acrylate (PUA) mold on top of the pre-formed microstructures. Using this technique, various micro/nano hierarchical structures were fabricated with minimum resolution down to 70 nm over a large area with very good reproducibility.

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