Mechano-Chemical Microfabrication Technology Based on Micro/Nano-Tribology : Development Process and Prospect (마이크로/나노 트라이볼로지 기반 기계-화학적 미세가공기술 : 발전과정 및 전망)
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- Proceedings of the Korean Society of Machine Tool Engineers Conference
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- 2002.10a
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- pp.274-279
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- 2002