• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2002년도 제7회 단조 심포지엄
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• pp.45-53
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• 2002

• 한국전자통신학회논문지
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• 제19권3호
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• pp.507-514
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• 2024

반도체 제조 라인에서는 생산 제품의 원가절감을 위해 지속적인 노력을 기울이고 있고, 화학적 기계적 연마(CMP) 공정에서도 이에 대한 요구가 점점 가속화되고 있으며, 이러한 원가 절감 항목 중 대표적인 것이 5-Zone 링이다. CMP 공정에서 약 150시간을 사용하면 링의 두께가 1mm 미만으로 감소되어 새제품으로 교체해야 한다. 반도체 제조 라인에서는 생산 제품의 원가절감을 위해 지속적인 노력을 기울이고 있고, 화학적 기계적 연마(CMP) 공정에서도 이에 대한 요구가 점점 가속화되고 있으며, 이러한 원가 절감 항목 중 대표적인 것이 5-Zone 링이다. CMP 공정에서 약 150시간을 사용하면 링의 두께가 1mm 미만으로 감소되어 새제품으로 교체해야 한다. 따라서 본 연구에서는 리테이너 링의 마모된 부분을 반복 재생하여 반도체 제조 원가를 낮추며, 산업용 폐기물 처리에 따른 환경 오염을 최소화하기 위해 10g±0.8% 이하의 토출량 오차와 ±1.8% 이하의 압력 균일도를 갖는 본딩 디스펜서 및 프레스 머신을 개발하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.527-528
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• 2010

• 한국해양공학회지
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• 제30권2호
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• pp.100-108
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• 2016

A high-pressure ball valve was developed, and both the structural strength and sealing performance were assessed based on a nonlinear finite element analysis. Different parts were modeled with solid elements and assembled, taking into account both contact and sliding effects. Three different loading scenarios were analyzed, including a high-pressure closure test and fire and shell test conditions. The structural safety of each part was checked under each loading condition, and the sealing performance was also investigated to validate the performance of the valve.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.482-483
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• 2009

In chemical mechanical planarization (CMP) process, the uniformity of stress acting on wafer surface is a key factor for uniform material removal of thin film especially in the oxide CMP. In this paper, we analyze the stress on the contact region between wafer and pad with finite-element analysis (FEA). The setting pressure acting on wafer back side was $500g/cm^2$ and the retainer pressure was changed from 300 to $700g/cm^2$. The polishing test is also done with the same conditions. The material removal rate profiles well-matched with stress distribution.

• 소성∙가공
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• 제24권4호
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• pp.264-271
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• 2015

In the current study, a method was proposed to quantitatively predict the wear and fatigue life of a shearing die in order to determine an effective replacement period for the die. The shearing die model of a retainer manufacturing process was used for the proposed method of quantitative life prediction. The retainer is produced through shearing steps, such as piercing and notching. The shearing die of the retainer is carefully controlled because the dimensional accuracy of the retainer is critical. The fatigue life for the shearing die was predicted using ANSYS considering S-N curves of STD11 and Gerber’s equation. The wear life for the shearing die was predicted using DEFORM-3D considering the Archard’s wear model. Experimental shearing of the retainer was conducted to verify the effectiveness of the proposed method for predicting die life. The fatigue failure of the shearing die was macroscopically measured. The wear depth was measured using a 3D coordinate measuring machine. The results showed that the wear and fatigue life in the FE analysis agree well with the experimental results.

• Tribology and Lubricants
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• 제21권6호
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• pp.278-282
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• 2005

Deep groove ball bearing is installed in a control element of an integral nuclear reactor, where water is used as coolant and lubricant. This bearing is made of STS440C stainless steel for the raceways and the balls to use in radioactive environment and water. It is known that the retainer design affects ball bearing operability and endurance life, however there is no verified retainer design and material for water lubricated ball bearing. Four kinds of retainers are manufactured for the endurance test of water lubricated deep groove ball bearing. Three of them are commercially developed types and the other is designed for this research. It is verified that ball bearings with steel pressed and general plastic retainer can not survive to required life in the water, however bearings with machined type and cylinder type retainer can survive. This proves that one of the major design parameters for water lubricated ball bearing is retainer type and material. In this paper, experimental research of endurance test for water-lubricated ball bearing are reported.

• 한국공작기계학회논문집
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• 제17권1호
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• pp.7-15
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• 2008

Currently existing high-accuracy and high-speed die sets used in reciprocal press create scratches at the surface of guide posts, steel balls, and bushes due to vertical movement of balls with point-contacts between inner surface of bushes and guide posts. Consequently, accuracy of the die set and the life span of the metal mold are reduced. However, those scratches could reduce the pre-load of the steel ball. This research designed and developed a groove-type die set which improves life span of the die set by eliminating point-contacts of steel balls with guide posts. The guide post consisted of a steel-ball retainer, a steel-ball retainer stopper, a guide bush, a guide pin, a snap ring, and a spring. The steel-ball retainer has 72 holes with 8 columns of 9 holes in each column. The inner surface of the guide bush was grinded(surface roughness: $Ra\;\\;0.2{\mu}m$, accuracy: $0\;{\sim}\;-0.002mm$) after NC turning and heat treatment. Also, a line of small intermediate pocket was processed inside of the guide bush for lubrication and elimination of foreign materials. Guide grooves of steel balls were processed using a wire EDM(Electrical Discharge Machining) after heat treatment. With such a design of the guide post stated above, loads against steel balls could be dispersed greatly by the line contacts through the guide groove between the guide post and the guide bush, and the life span of the guide post could be expanded semi-permanently.

• Composites Research
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• 제15권1호
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• pp.41-52
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• 2002

이 논문에서는 탄소/탄소 브레이크 제동중 시스템의 거동을 열탄성 해석을 수행하여 살펴보았고. 파손에 안정적인 디스크의 형상을 찾기 위하여 다양한 형상에 대한 3차원 응력해석을 수행하였다. 탄소/탄소 복합재료의 기계적 물성치가 적층면방향과 두께방향으로 측정되었다. 측정긴 기계적 물성치는 열탄성 해석과 3차원 응력해석을 위한 입력으로 사용 되었다. 로터 클립과 클립 리테이너 사이의 간격은 회전판의 하중전달 미케니즘에 있어서 중요만 인자이다. 간격변화는 기계적 변형과 열 변형으로 분리하여 고려하였다. 클립과 리테이터는 서로 접촉이 발생하지 않았으므로 해석 모델에서 리테이너와 리벳은 제외되었다. 로터 디스크는 반복대칭조건을 사용하여 모델링되었고, 로터 디스크와 로터 클립, 로터 클립과 키 드럼사이의 2중 접촉문제가 고려되었다. 3차인 응력해석의 결과로부터 브레이크 디스크의 키 홀 부분에 응력집중현상이 발생하는 것을 확인하였다. 응력분포는 키 홀 부분에서 접촉면의 회전각과 곡률반경의 변화에 따라 연구 되었다.

• Tribology and Lubricants
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• 제35권1호
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• pp.59-64
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• 2019

When slipping occurs between two materials, the coefficients of friction must be considered because these values determine the overall efficiency of the machine or slip characteristics. Therefore, it is important to find the coefficient of friction between two materials. This paper focuses on obtaining the coefficient of friction between an aiming bolt and a retainer located in the headlamps of a vehicle. This bolt supports the headlamp, and if the bolt is loosened by external vibration, the angle of the light will change and block the vision of pedestrians or other drivers. In order to study these situations, the coefficient of friction between aiming bolts and retainers needs to be measured. In addition, the coefficient of friction of materials used in the headlamp should be obtained. To determine these two factors, a new device is designed for two cases: surface-surface contact and surface-line contact. To increase reliability of the results, the device is designed using an air-bearing stage which uses compressed air as lubricant to eliminate the friction of the stage itself. Experiments were carried out by applying various vertical forces, and the results show that the coefficient of friction can be measured consistently. The procedure for designing the device and the results are discussed.