• Journal of the Korean Vacuum Society
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• v.18 no.1
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• pp.54-59
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• 2009

We have measured the spatiotemporal behavior for the density of excited Xe atoms in the $1s_5$ metastable states by laser absorption spectroscopy in accordance with various shapes of ITO electrode. The maximum density of excited Xe atoms in the Is5 state in a discharge cell for fish-boned, T-shaped and squared ITO electrodes has been measured to be $3.01{\times}10^{13}\;cm^{-3}$, $2.66{\times}10^{13}\;cm^{-3}$ and $2.06{\times}10^{13}\;cm^{-3}$, respectively. Throughout this experiment, we could understand the influence of the shapes of ITO electrode of micro discharge cell on the high efficiency of AC-PDPs.