• Korean Journal of Materials Research
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• v.11 no.9
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• pp.792-796
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• 2001

For electron beam lithography and SEM(scanning electron microscopy) applications, miniaturized electrostatic lenses called a microcolumn have been fabricated. In this paper, we report the fabrication technique for 20~30$\mu\textrm{m}$ apertures of electron lenses based on silicon and Mo membrane using an active Q-switched Nd:YAG laser. Experimental conditions of laser micromachining for silicon and Mo membrane are improved. The geometrical structures, such as the diameter and the preciseness of the micron-size aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot.

• Korean Journal of Optics and Photonics
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• v.20 no.6
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• pp.328-333
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• 2009

We proposed a three-dimensional holographic display technique without twin image noise by converting a complex hologram to an off-axis hologram. To implement the proposed technique we record the complex hologram of a three dimensional object that is composed of two slides located with different depth locations. We added spatial carrier to the complex hologram and after that, extract the real part of the spatial-carrier-added hologram. This converts the complex hologram to an off-axis hologram. We also reconstruct the off-axis hologram using a spatial light modulator for three dimensional display.

• Korean Journal of Materials Research
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• v.8 no.10
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• pp.950-955
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• 1998

Ar 이온 식각법을 이용하여 (001) SrTiO3(STO) 단결정 기판 위에 200nm 높이의 계단형 모서리를 제작하였다. 계단식은 입사하는 Ar 이온 빔에 대한 Ar 이온 입사각과 마스크 회전각을 조절함으로써 38$^{\circ}$-70$^{\circ}$의 넓은 범위로 제어할 수 있었다. 초전도 YBa2Cu3O7-$\delta$박막은 계단이 있는 STO 기판 위에 펄스레이저 증착법을 이용하여 증착하였으며, 박막의 두께는 계단 높이에 대한 박막의 두께비가 0.5-1.2가 되도록 하였다. 계단형 모서리 조셉슨 접합의 임계전류밀도와 IcRn값은 77K에서 각각 104A/$\textrm{cm}^2$, 70-200$\mu$V이었다.

• Journal of the Korean Society of Safety
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• v.10 no.3
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• pp.30-41
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• 1995

This paper proposed a simple method for measuring surface roughness of ground surface. Utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens, a detecting unit with polygon mirror and CCD array sensor, and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultaniously monitor the state of the grind wheel. The experimental results, showed that the Increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min, the table speed is 0.2n1/min -0.9m/min, the dressing speed is 0.2mm/rev～0.4mm/rev, the stylus method and the in-process method can be obtained the same results. Thus, under limited working conditions, using the proposed system, the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

• 한국정보통신설비학회:학술대회논문집
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• 2005.08a
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• pp.229-237
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• 2005

통신용 지하 관로는 대부분 내경 100mm인 PVC 재질로 되어 있으며, 지하에 매설한 후 또는 관로를 사용하기 전에 관로 상태의 정상 유무를 확인할 목적으로 맨드릴(직경 90mm)을 이용한 선통 검사로 정상 관로와 불량 관로를 판단 하였다. 그러나 이러한 방법으로는 조사 대상 관로의 불량 원인을 밝힐 수 없을 뿐 아니라, 복수 개소의 불량 지점을 확인하는 것이 불가능하여 관로 보수나 사용을 위한 기본적인 관로 정보를 제공할 수 없었다. 이러한 문제를 해결하기 위해 디지털 관로 조사장비를 개발하였으며, 관로 내부를 따라 관로 카메라를 이동시키면서 관로 내부의 변형 상태를 실시간으로 확인하거나, 관로 벽에 조사된 레이저 빔 영상을 검출하여 관로 단면의 최소 직경을 측정할 수도 있다. 또한, 디지털 맨드릴은 1mm 간격으로 관로의 내경을 측정할 수 있는 게이지가 설치되어 있어, 실시간으로 관로 단면의 최소 직경을 측정할 수 있어 조사 관로의 전반적인 변형 정도를 모니터링 할 수 있다. 이러한 디지털 관로 조사장비를 이용하여 신설 관로의 시공품질을 측정하거나, 기존 관로의 상태를 객관적이고 정확하게 파악하여 관로 상태에 따른 케이블 포설 계획을 수립할 수 있으며, 불량 관로 보수를 위한 정확한 자료를 제공하여 유지관리의 효율성을 높일 수 있다.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1831-1833
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• 2003

Nowadays, CO2 lasers are used widely in many applications such as materials fabrication, communications, remote sensing and military purpose etc. Especially, CO2 lasers are in the spotlight at surface handling and heat processing. It is important to control the laser output power and beam quality in those fields. To increase beam qualify, We used the feedback system by various sensors. Although, CO2 lasers' output beam became feedback, its beam affected the irradiated material target already. Since, ideal real time control have still the problem to solve. Hence, we need the new proposal for more precise laser processing. So we expect the new effect how to change the irradiated material target as the kind of, processing time and output density caused by the CO2 laser beam. In this study, We have investigated the characteristics of the temperature and HAZ(Heat Affected Zone) by CO2 laser output with IR temperature sensor and RTD.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.31 no.4
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• pp.193-197
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• 2018

The ratio of the period of a diffractive element to the input beam size is a critical parameter in a diffractive beam shaper. We measured and calculated the Fraunhofer diffraction patterns of a periodic hologram with an input beam size similar to the period of the hologram. The measured intensities show very complicated patterns and are strongly dependent upon the center position of the laser beam relative to the hologram. Using a diffraction formula for a periodic hologram, we calculated the diffracted light intensities and fit them to the measured ones. The measured and calculated intensities are in good agreement even when the beam diameter of the incident laser is similar to the period of the hologram. We can therefore use this formula to estimate the output of a periodic beam shaper even under such an extreme condition.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.36-39
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• 2000

A small electrical potential difference which appears on any solid body when subjected to illumination by a modulated light beam generated by laser is called photocharge voltage(PCV)[1,2]. This voltage is proportional to the induced change in the surface electrical charge and is capacitatively measured on various materials such as conductors, semiconductors, ceramics, dielectrics and biological objects. The amplitude of the detected signal depends on the type of material under investigation, and on the surface properties of the sample. In photocharge voltage spectroscopy measurements[3], the sample is illuminated by both a steady state monochromatic bias light and the pulsed laser. The monochromatic light is used to created a variation in the steady state population of trap levels in the surface and space charge region of semiconductor samples which does result in a change in the measured voltage. Using this technique the spatial variation of PCV can be utilized to evaluate the surface conditions of the sample and the variation of the PCV due to the monochromatic bias light are utilized to characterize the surface states. A qualitative analysis of the proposed measurement is present along with experimental results performed on amorphous silicon samples. The deposition temperature was varied in order to obtain samples with different structural, optical and electronic properties and measurements are related to the defect density in amorphous thin film.

• Korean Journal of Optics and Photonics
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• v.4 no.3
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• pp.252-259
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• 1993

A holosymmetric four-mirror system with unit magnification is designed for use in the micro-lithography using a deep ultraviolet wavelength of $0.248 {\mu}m$(KrF excimer laser line). In the holosymmetric system all orders of coma and distortion are zero. By applying this principle to the 4-spherical mirror system, we have obtained only one exact solution for the unit magnification holosymmetric four-spherical mirror system with all zero third order aberrations. For correction of the residual higher order aberrations of the system, aspherization is introduced keeping the holosymmetric properties. We have obtained near diffraction-limited performance for the wavelength of 0.248 pm within N.A. of 0.33 and image field diameter of 7.6 mm.

• Journal of the Korea Institute of Military Science and Technology
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• v.22 no.2
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• pp.179-188
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• 2019

Laser beam is directional and small in divergence angle so that it is well qualified to deliver high intensity infrared energy into a coming MANPADS threat for aircraft survivability. The threat will be deceived and loose tracking of a target when it is exposed to the laser beam modulated relevant to the track mechanism of the threat. The laser beam goes through scattering inside the seeker of the threat and reach the detector in a stray light form, which is a critical phenomenon enabling jamming of the seeker. The mechanism of the laser beam based jamming against a pulse modulated infrared seeker is shown. Simulations are carried out to support the understanding of how the jam technique works.