• Title/Summary/Keyword: 레이저 분광학

Search Result 107, Processing Time 0.04 seconds

Comparison of the Characteristics of Polycrystalline Silicon Thin Films Between Rapid Thermal Annealing and laser Annealing Methods (급속열처리와 엑시머 레이저에 의해 형성된 다결정 실리콘 박막에서 열처리 방법에 따른 박막의 특성변화)

  • Lee, Chang-U;Go, Min-Gyeong;U, Sang-Rok;Go, Seok-Jung;Lee, Jeong-Yong;Choe, Gwang-Ryeol;Choe, Yeong-Seok
    • Korean Journal of Materials Research
    • /
    • v.7 no.10
    • /
    • pp.908-913
    • /
    • 1997
  • 플라즈마 화학 증착 방법에 의해 corning 7059 유리기판위에 비정질 실리콘 박막을 만들고 고온열처리, 다단계급속열처리, 일차원 선형빔(line shape beam)의 가우스 분포를 가지는 엑시머 레이저 열처리를 이용하여 고상 및 액상의 재결정화를 통해 다결정 실리콘 박막을 제작하였다. 편광된 라만 분광학(Raman spectroscopy)을 통하여 여러 가지 열처리 방법과 기판온도에 따른 다결정 실리콘 박막의 잔류응력을 조사하였다. 레이저 열처리에 의하여 결정화된 실리콘 기판의 경우, 높은 결정화된 체적량과 잔류응력을 갖으며 equaxial결정성을 갖는다. 그러나 이러한 고상 재결정화된 다결정 실리콘 박막은 라만스펙트럼에서 480$cm^{-1}$ /주위에 넓게 퍼져있어 비정질상(amorphous phase)이 함께 존재함을 알 수 있다. 고온열처리와 다단계급속열처리의 경우 잔류응력의 크기는 각각 4.07x$10^{9.}$과 4.56x$10^{9 dyne}$ $\textrm{cm}^2$이다. 또한 엑시머레이저 열처리의 경우 기판온도가 상온에서 40$0^{\circ}C$로 증가할수록 열적인 완화에 의해 잔류응력이 1.35x$10^{10}$에서 8.58x$10^{9}$dyne/$\textrm{cm}^2$으로 감소하는 것을 알 수 있다.다.

  • PDF

Sub-${\AA}$ surface roughness measurement using phase-measuring interferometer (위상측정 간섭계를 이용한 sub-${\AA}$급 표면거칠기 측정)

  • 조민식;정태호;오문수;이수상;이재철
    • Proceedings of the Optical Society of Korea Conference
    • /
    • 2000.02a
    • /
    • pp.176-177
    • /
    • 2000
  • 고분해능 분광학, 레이저 주파수 안정화, 단원자 레이저, 레이저 자이로 등의 다양한 분야에서 널리 응용되는 저손실, 고반사율 반사경 제작은 고품질의 반사경 기판 사용을 전제로 하고 있다. 1$\AA$이하의 표면거칠기(surface roughness)를 요구하는 반사경 기판의 초연마(super-polishing) 기술과 저손실 반사경 박막코팅 기술은 최근 수 년 사이에 상당한 발전이 이루어졌으며, 이와 함께 초연마 반사경 기판의 표면거칠기 측정기술이 중요한 분야로 주목받고 있다. 표면거칠기 측정기법은 현재까지 여러 가지 방법이 연구, 발전되어 왔는데, 접촉식 측정방법으로 stylus 방법과 비접촉식 측정방법으로 광학 간섭계 방법, 스캔닝 전자현미경(SEM, Scanning Electron Microscopes) 등이 있다. 이들 중 광학 간섭계 방법은 표면형상을 직접 측정 가능하다는 점에서 유망한 비접촉 표면측정 기법으로 알려져 있다. (중략)

  • PDF

Frequency modulation spectroscopy of a super-cavity using a single mode He-Ne laser (단일모드 헬륨네온레이저를 사용한 초공진기의 주파수 변조 분광연구)

  • 서호성;윤태현;조재흥;정명세;류갑열;김영덕;최옥식
    • Korean Journal of Optics and Photonics
    • /
    • v.3 no.1
    • /
    • pp.27-36
    • /
    • 1992
  • Frequency modulation spectroscopy of the super-cavity, of which finesse is app. 40,000 has been demonstrated by using a sigle mode He-Ne laser. In-phase and quardrature components of frequency modulation signals (FM signal) were obtained by using the 1.5 MHz-driven-electrooptic phase modulator. The vector locus of the FM signa in the phase space, which is consisted of in-phase and quardrature components of the FM signal, was observed and analyzed for the dependence of FM signal upon the phase of the reference signal of a phase-sensitive-detector. According to rotating the phase of the reference signal, the vector locus was observed to rotate with the same phase angle as the reference signal. The in-phase component of the FM signals will be used to stabilize the frequency of the He-Ne laser to the resonant frequency of the super-cavity.

  • PDF

Radioanalytical and Spectroscopic Characterizations of Hydroxo- and Oxalato-Am(III) Complexes (방사분석과 분광학을 이용한 Am(III) 가수분해와 옥살레이트 착물 화학종 연구)

  • Kim, Hee-Kyung;Cho, Hye-Ryun;Jung, Euo Chang;Cha, Wansik
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
    • /
    • v.16 no.4
    • /
    • pp.397-410
    • /
    • 2018
  • When considering the long-term safety assessment of spent-nuclear fuel management, americium is one of the most radio-toxic actinides. Although spectroscopic methods are widely used for the study of actinide chemistry, application of those methods to americium chemistry has been limited. Herein, we purified $^{241}Am$ to obtain a highly pure stock solution required for spectroscopic studies. Quantitative and qualitative analyses of purified $^{241}Am$ were carried out using liquid scintillation counting, and gamma and alpha radiation spectrometry. Highly sensitive absorption spectrometry coupled with a liquid waveguide capillary cell and time-resolved laser fluorescence spectroscopy were employed for the study of Am(III) hydrolysis and oxalate (Ox) complexation. $Am^{3+}$ ions under acidic conditions exhibit maximum absorbance at 503 nm, with a molar absorption coefficient of $424{\pm}8cm^{-1}{\cdot}M^{-1}$. $Am(OH)_3(s)$ colloidal particles formed under near neutral pH conditions were identified by monitoring the absorbance at around 506-507 nm. The formation of ${Am(Ox)_3}^{3-}$ was detected by red-shifts of the absorption and luminescence spectra of 4 and 5 nm, respectively. In addition, considerable enhancements of the luminescence intensities were observed. The luminescence lifetime of ${Am(Ox)_3}^{3-}$ increased from 23 to 56 ns, which indicates that approximately six water molecules are replaced by carboxylate ligands in the inner-sphere of the Am(III). These results suggest that ${Am(Ox)_3}^{3-}$ is formed through the bidentate coordination of the oxalate ligands.

Development of Laser-Based Resonant Ultrasound Spectroscopy(Laser-RUS) System for the Detection of Micro Crack in Materials (재료의 미세결함 검출을 위한 레이저 공명 초음파 분광(Laser-RUS)시스템 개발)

  • Kang, Young-June;Kim, Jin-Soo;Park, Seung-Kyu;Baik, Sung-Hoon;Choi, Nag-Jung
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.27 no.1
    • /
    • pp.41-48
    • /
    • 2010
  • Non-contacting, laser-based resonant ultrasound spectroscopy (L-RUS) was applied to characterize the microstructure of a material. L-RUS is widely used by virtue of its many features. Firstly, L-RUS can be used to measure mechanical damping which related to the microstructural variations (grain boundary, grain size, precipitation, defects, dislocations etc). Secondly, L-RUS technology can be applied to various areas, such as the noncontact and nondestructive quality test for precision components as well as noncontact and nondestructive materials characterization. In addition, L-RUS technology can measure the whole field resonant frequency at once. In this paper, we evaluated material characteristics such as resonant frequency, nonlinear propagation characteristic through the development of Laser-Based Resonant Ultrasound spectroscopy (Laser-RUS) System for the detection of Micro Crack in Materials.

The Characterization and Coatings on 304 Stainless Steel by Laser Induced Fluorescence Spectroscopy using the High Resolution Charge Coupled Device (레이저 유도형광분광기에서 고정밀 전하장치를 이용한 304 스테인레스 스틸의 코팅과 특성)

  • Kim, Ki-Jun;Lee, Jou-Youb;Sung, Wan-Mo
    • Journal of the Korean Applied Science and Technology
    • /
    • v.33 no.2
    • /
    • pp.385-390
    • /
    • 2016
  • In our study, ceramics coatings by additives of nano alumina and magnesia have cured on 304 stainless steel at $170^{\circ}C$ 2h. We designed and experimented the coated specimens that were characterized by laser induced fluorescence spectroscopy using the charge coupled device and scanning electronic microscopy(SEM). The result was revealed the ceramic coatings added fillers has more excellent on adhesive property and scratch resistance, and less weight loss in acid solution than ceramic coatings non-added fillers. Therefore, this study has designed and manufactured the electromagnetic spectrometry with CCD and then analyzed the coatings on 304 stainless steel using the High Resolution Charge Coupled Device in improving the corrosion resistance of 304 stainless steel. Nowadays, coatings of stainless steel have increased by industrial demand in hygienes, aviation, instrumentations and robotics as the industry special application develops.

Precision exploration of space resources using laser-induced breakdown spectroscopy (레이저 유도 플라즈마 분광분석법을 활용한 정밀 우주 자원 탐사)

  • Choi, Soo-Jin;Yoh, Jai-Ick
    • Journal of the Korean Society for Aeronautical & Space Sciences
    • /
    • v.39 no.5
    • /
    • pp.451-457
    • /
    • 2011
  • A short laser pulse irradiates a sample to create the highly energetic plasma that emits light of a specific wavelength peak according to the material. By identifying different peaks for the analyzed samples, its chemical composition can be rapidly determined. The LIBS (Laser-Induced Breakdown Spectroscopy) has great advantages as an elemental analyzer on board a space rover, namely real-time rapid analysis and stand-off detection. The LIBS signal intensity is remarkably increased by using double-pulse LIBS system for component analysis of lunar environments where the surrounding pressure is low. Also the angle of target is adjusted for replicating arbitrary shapes of the specimen.

Tunable Diode Laser Absorption Spectroscopy for Environmental Monitoring (파장가변 다이오드 레이저 흡수 분광학을 사용한 대기환경분석)

  • Ju Sang-U;Kim Seong-Geun
    • Proceedings of the Korea Air Pollution Research Association Conference
    • /
    • 2003.11a
    • /
    • pp.247-248
    • /
    • 2003
  • Tunable diode laser absorption spectroscopy (TDLAS) has been widely used in environmental monitoring of gaseous species in the past decade. TDLAS is a direct measurement technique for pollutants such as NOx without any interference from other species. Because of its superior spectral purity (~0.001 ­$cm^{-1}$), absorption linewidths with resolvable rotational structure can be studied in the mid infrared region where strong fundamental vibrational transitions of molecules appear. (omitted)

  • PDF

Spectroscopic Applications of Ultrashort Pulse Lasers (극초단 펄스레이저의 분광학 응용)

  • 김동호
    • Korean Journal of Optics and Photonics
    • /
    • v.1 no.1
    • /
    • pp.87-97
    • /
    • 1990
  • With the recent advent of various ultrashort pulse lasers, time-resolved laser spectroscopic techniques have been widely recognized as versatile tools to study ultrafast phenomena in many research areas. These techniques are currently being employed not only to study atomic and molecular physics but to characterize the excited state or the carrier dynamics on surfaces of semiconductors, metals and thin layer materials. Also the sweetching speed measurement of ultrafast electro-optic devices using ultrashort laser pulses becomes important in high-speed electronics. Here, some principles of spectroscopic techniques with ps or fs lasers and their applications are summarized briefly.

  • PDF