• Title/Summary/Keyword: 레이저 반사법

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MBE Growth and Fabrication of Oxide-Confined VCSEL Array (산화막 구경 표면발광 레이저 어레이의 MBE 성장과 제작)

  • 김진숙;장기수;김종민;배성주;이용탁
    • Proceedings of the Optical Society of Korea Conference
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    • 2003.02a
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    • pp.144-145
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    • 2003
  • VCSEL은 우수한 소자 특성과 표면 발광 구조가 갖는 여러 가지 장점들로 인하여 병렬 광연결과 근거리 광섬유 통신에서 이상적인 광원으로 인정받고 있다. 특히 산화막 구경을 갖는 VCSEL은 이득영역 근처에서 횡 방향으로 광학적, 전기적 제한을 가함으로써 낮은 문턱전류와 높은 전력변환 효율을 갖기 때문에 현재까지 많은 연구가 진행되어 왔다. 본 논문에서는 in-situ 광 반사법을 이용한 VCSEL의 MBE 성장과 1■10 산화막 구경 VCSEL 어레이의 제작공정, 그리고 발진특성에 대하여 논하고자 한다. (중략)

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Measurement System for Phosphor Dispensing Shape of LED Chip Package Using Machine Vision (머신비전에 의한 LED Chip Package 형광물질 토출형상 측정)

  • Ha, Seok-Jae;Kim, Jong-Su;Cho, Myeong-Woo;Choi, Jong-Myung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.5
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    • pp.2113-2120
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    • 2013
  • In this study, an efficient machine vision based inspection system is developed for the in-line measurement of phosphor resin dispensing shapes on LED chip package. Since the phosphor resin (target material) has semitransparent characteristics, illuminated light beam is reflected from the bottom of the chip as well as from the surface. Since such phenomenon can deteriorate inspection reliability, a white LED and a 635nm laser slit beams are experimentally tested to decide suitable illumination optics. Also, specular and diffuse reflection methods are tested to decide suitable optical triangulation. As a result, it can be known that the combination of a white slit beam source and specular reflection method show the best inspection results. The Catmull-Rom spline interpolation is applied to the obtained data to form smoother surface. From the results, it can be conclude that the developed system can be sucessfully applied to the in-line inspection of LED chip packaging process.

Characteristics of the Laser Displacement Sensor Using Optical Triangulation Method (광삼각법을 이용한 레이저 변위 센서의 특성 연구)

  • Park, Jong-Sung;Jeong, Kyu-Won
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.7
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    • pp.40-50
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    • 1999
  • Recently, a laser displacement sensor is widely used for the manufacturing automation. The sensor is generally composed of a diode laser and a light receiving device. The diode laser emits a laser beam and the receiving device detects the light reflected from the measured object. The object position is obtained based upon triangulation method. As a light receiving device, a PSD is usually utilized since its structure is very simple and rugged and has a high accuracy. Although the theoretical relationship for this sensor had been developed, the characteristics of the sensor have not been much experimentally studied. In this paper, several experimental results will presented. The measurement accuracy is affected by the surface conditions such as the reflectance characteristics, the angle of the object's surface and the laser intensity. In addition, it is found that the PSD and the signal processing circuit have nonlinearities and showed that those nonlinearities can be reduced by controlling the emitting laser intensity.

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Effect of mechanical backside damage upon minority carrier recombination lifetime measurement by laser/microwave photoconductance technique (기계적 후면 손상이 레이저/극초단파 광전도 기법에 의한 소수 반송자 재결합 수명 측정에 미치는 영향)

  • 조상희;최치영;조기현
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.5 no.4
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    • pp.408-413
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    • 1995
  • We investigated the effect of mechanical backside damage upon minority carrier recombination lifetime measurement in Czochralski silicon substrate by laser excitation/microwave reflection photoconductance decay method. The intensity of mechanical damage was evaluated by X-ray double crystal rocking curve, X-ray section topography and wet oxidation/preferential etch methods. The data indicate that the higher the mechanical damage intensity, the lower the minority carrier lifetime, and the threshold full width at half maximum value which affect minority carrier lifetime measurement is about 13 secs.

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Finite Element Simulation of Laser-Generated Ultrasound and Interaction with Surface Breaking Cracks (유한요소법을 이용한 레이저 유도 초음파와 표면 균열과의 상호작용 모델링)

  • Jeong, Hyun-Jo;Park, Moon-Cheol
    • Journal of the Korean Society for Nondestructive Testing
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    • v.24 no.3
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    • pp.259-267
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    • 2004
  • A finite element method is used to simulate interaction of laser-based ultrasounds with surface breaking tracks in elastic media. The laser line source focused on the surface of semi-infinite medium is modeled as a shear dipole in 2-D plane strain finite elements. The shear dipole-finite clement model is found to give correct directivity patterns for generated longitudinal and shear waves. The interaction of surface waves with surface breaking cracks (2-D machined slot) is considered in two ways. Both the source and receiver are fixed with respect to the cracks in the first case, while the source is moving in another case. It is shown that the crack depth tested in the range of 0.3-5.0mm $({\lambda}_R/d=0.21{\sim}3.45)$ can be measured using the corner reflected waves produced by the fixed laser source. The moving laser source is found to cause a large amplitude change of reflected waves near crack, and the crack whose depth is one order lower than the wavelength ran be detected from this change.

생체모방 복합 눈 구조를 이용한 갈륨비소 반사방지막 제작

  • Lee, Su-Hyeon;Im, Jeong-U;Go, Yeong-Hwan;Jeong, Gwan-Su;Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.412-412
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    • 2012
  • 갈륨비소(GaAs)는 수직공진표면방출레이저, 발광다이오드, 태양전지 등과 같은 광전소자에 널리 사용되는 물질이다. 그러나 높은 굴절률을 갖는 갈륨비소는 표면에서 30% 이상의 반사율을 갖기 때문에 광손실로 인해 소자의 성능이 저하된다. 따라서 표면 Fresnel 반사율을 낮출 수 있는 효율적인 반사방지막이 필요하다. 최근, 열적 불일치, 물질 선택, 접착력 저하의 단점을 가지고 있는 기존 다중박막을 대체하는 생체모방 서브파장 나노구조가 활발히 연구되고 있다. 이러한 구조는 공기(air)부터 갈륨비소까지 선형적인 유효굴절률 분포를 갖는 유효 단일박막과도 같기 때문에 소자 표면에서의 광손실을 줄일 수 있다. 더욱이, 자연계의 나방의 각막과 나비의 눈의 구조 형태를 모방한 반도체 생체모방 복합 눈(compound eye)은, 즉 마이크로 렌즈모양과 서브파장 나노격자구조의 복합적 형태, 표면에서 우수한 반사방지 특성을 나타낸다. 본 연구에서는, 포토리소그래피와 유도결합플라즈마 식각법을 이용하여 GaAs 기판 표면에 마이크로 렌즈 모양의 패턴을 형성한 후, 스핀코팅을 이용하여 나노 크기를 갖는 실리카 구를 도포하여 건식 식각함으로써 복합 눈 구조를 갖는 갈륨비소 반사방지막을 제작하였다. 제작된 샘플의 표면 및 식각 형상은 전자현미경(scanning electron microscope)을 사용하여 관찰하였으며, UV-vis-NIR spectrophotometer를 사용하여 반사율을 측정하였다.

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Surface profiling by the phase shifting method in fiber-optical confocal scanning interference microscopes (광섬유 공초점 간섭 현미경과 위상 변위법을 결합한 표면 검색)

  • 김대찬;이승걸
    • Korean Journal of Optics and Photonics
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    • v.10 no.3
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    • pp.201-207
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    • 1999
  • The fiber-optical confocal scanning interference microscope with a simple configuration was constructed with a 4-port fiber-optic coupler, and the new method based on the phase shifting method was proposed for surface profiling by the system. In the method, the height of a specimen was determined from the phase of confocal beam. It was verified experimentally that the method was applicable to even the confocal interference microscope with a long-wavelength source and a low NA objective, and that the scanning time could be drastically reduced compared with the conventional method. Finally, it was found that our method is less sensitive to the variation of surface reflectivity than the conventional method.

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Two-Wavelength Lasers Based on Oversized Rib Polymer Waveguide Bragg Reflectors (대형 립 폴리머 광도파로 브래그 격자를 이용한 두 파장 레이저)

  • Sung, Chi-Hun;Kim, Jun-Whee;Shin, Jin-Soo;Oh, Min-Cheol
    • Korean Journal of Optics and Photonics
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    • v.25 no.1
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    • pp.38-43
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    • 2014
  • An external cavity laser supporting two wavelengths is demonstrated by incorporating polymer waveguide Bragg reflectors and a superluminescent light-emitting diode. An oversized rib waveguide structure and Bragg gratings are designed by using the effective-index and transmission-matrix methods. Bragg gratings with different periods are inscribed on a polymer waveguide through double-exposure laser interferometry. In order to tune the cavity loss affected by the reflectivity of Bragg gratings, a Bragg reflectors with varying length is incorporated. Two-wavelength-mode lasing is achieved for the device consisting of 2-mm long, 537-nm period gratings and 2.2-mm long, 540-nm period gratings; the lasing wavelengths are 1554 nm and 1564 nm, with an output power close to 0 dBm, a 20-dB bandwidth of 0.2 nm, and a side-mode suppression ratio of 45 dB.

Study on Experimental Modeling and Estimation of Roughness of Nanoscale Lapping Surface Based on Laser Scattering Patterns (레이저산란패턴 기반 나노 래핑 표면 거칠기의 실험적 모델링 및 추정에 관한 연구)

  • Hong, Yeon-Ki;Kim, Gyung-Bum
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.35 no.1
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    • pp.107-114
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    • 2011
  • In this study, a correlation between the roughness of nanoscale lapping surface and its laser scattering pattern has been identified experimentally. The characteristics of laser scattering on a reflected surface are investigated, and a laser scattering mechanism is newly designed by adopting the dark-field method. Laser scattering patterns resulting from nanoscale lapping shape are in the shape of crossed irregular lattice. In addition, optimum laser scattering images are obtained by the design of experiment, and the roughness of nanoscale lapping surface is estimated using regression analysis certain useful features of the laser scattering patterns. The results of fifty experiments on three types of nanoscale lapping surfaces show that the roughness of nanoscale lapping surfaces can be accurately estimated by the proposed mathematical modeling method.

Integrated Cavity Output Spectroscopy Using an External Cavity Diode Laser for the Density Absorption Measurement of Trace Gases (미량 기체의 밀도 측정을 위한 외부 공진기 반도체 레이저 광학공동 적분 투과 분광법)

  • Ryoo Hoon Chul;Yoo Yong Shin;Lee Jae Yong;Hahn Jae Won
    • Journal of the Korean Vacuum Society
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    • v.15 no.1
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    • pp.24-30
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    • 2006
  • Integrated cavity output spectroscopy(ICOS) is a simple, non-intrusive absorption measurement technique that can detect and quantify trace-level gas species. The spectral absorbance of a gas is quantified from the integrated optical output of the modulated high-finesse cavity containing the sample which is irradiated by a wavelength-swept laser source. We constructed an experimental setup by using a tunable single mode external cavity diode laser operating at the wavelength near 765 nm and a Fabry-Perot cavity with length modulation achieved by a piezoelectric transducer where one of the cavity mirrors sat on. In the experiment performed on minute oxygen gas at the wave-length near 764.5nm, we demonstrated the minimum detectable absorption of $8.45\times10^{-8}cm^{-1}$.