• Title/Summary/Keyword: 레이저빔 수직투사

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Design and Analysis of a Laser Lift-Off System using an Excimer Laser (엑시머 레이저를 사용한 LLO 시스템 설계 및 분석)

  • Kim, Bo Young;Kim, Joon Ha;Byeon, Jin A;Lee, Jun Ho;Seo, Jong Hyun;Lee, Jong Moo
    • Korean Journal of Optics and Photonics
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    • v.24 no.5
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    • pp.224-230
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    • 2013
  • Laser Lift-Off (LLO) is a process that removes a GaN or AIN thin layer from a sapphire wafer to manufacture vertical-type LEDs. It consists of a light source, an attenuator, a mask, a projection lens and a beam homogenizer. In this paper, we design an attenuator and a projection lens. We use the 'ZEMAX' optical design software for analysis of depth of focus and for a projection lens design which makes $7{\times}7mm^2$ beam size by projecting a beam on a wafer. Using the 'LightTools' lighting design software, we analyze the size and uniformity of the beam projected by the projection lens on the wafer. The performance analysis found that the size of the square-shaped beam is $6.97{\times}6.96mm^2$, with 91.8 % uniformity and ${\pm}30{\mu}m$ focus depth. In addition, this study performs dielectric coating using the 'Essential Macleod' to increase the transmittance of an attenuator. As a result, for 23 layers of thin films, the transmittance total has 10-96% at angle of incidence $45-60^{\circ}$ in S-polarization.

Real-Time Seam Tracking System Using a Visual Device with Vertical Projection of Laser Beam (레이저빔 수직투사 구조의 시각장치를 이용한 실시간 용접선추적 시스템)

  • Kim, Jin-Dae;Lee, Jeh-Won;Shin, Chan-Bai
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.10
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    • pp.64-74
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    • 2007
  • Because of the size and environment in the shipbuilding process, the portable type robot is required for the automatic seam tracking. For this reason, the structure of laser sensor should be considered in the initial design step and the coordinate transformation between welding robot and laser sensor, which is joint finder, must be identified exactly and the real time tracking algorithm based on these consideration could be developed. In this research, laser displacement sensor in which its structure is laser beam's vertical projection, is developed to recognize the location of weld joint. In practical applications, however, images of weld joints are often degraded because of the surface specularity or spatter. To overcome the problem, the constrained joint finding algorithm is proposed. In the approach of coordinate conversion rule for the visual feedback control among welding torch, robot body and laser sensor is applied by the same reference point method. In the real time seam tracking algorithms we propose constrained sampling method which uses look ahead distance. The RLS(Recursive Least Square) filter is applied to obtain the smooth tracking path from the sensitive edge data. From the experimental results, we could see the possibility that the developed laser sensor with proposed processing algorithm and real time seam tracking method can be used as a welding under the shipbuilding condition.

Development of Retina Photographing and Multi Channel Image Acquisition System for Thickness Measurement of Retina (망막 두께 측정을 위한 망막 촬영 및 다채널 영상획득장치 개발)

  • 양근호
    • Journal of the Institute of Convergence Signal Processing
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    • v.5 no.1
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    • pp.13-17
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    • 2004
  • In order to measure the retina thickness, the retina photographing system and the multi-channel high speed image data acquisition system is developed. This system requires the optical processing techniques and the high speed image processing techniques. The HeNe laser beam is projected the retina in artificial eye and then we sensed the reflected laser signal using APD array. The laser projection system on retina using optical instruments is implemented. In order to project the plane laser beam on retina, laser photographing system used the polygon mirror for horizontal scanning and the galvano mirror for vertical scanning. We acquired retina images in each channel of APD array, transferred computer using PCI interface the image data after real-time A/D converting.

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