• Proceedings of the Materials Research Society of Korea Conference
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• 1999.11a
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• pp.191-191
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• 1999

• Proceedings of the Materials Research Society of Korea Conference
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• 2001.05a
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• pp.124-124
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• 2001

• Proceedings of the Materials Research Society of Korea Conference
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• 2001.05a
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• pp.125-125
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• 2001

• Journal of the Korean Society for Precision Engineering
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• v.22 no.2
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• pp.16-22
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• 2005

• Proceedings of the Korean Vacuum Society Conference
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• 2005.08a
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• pp.145-145
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• 2005

• Proceedings of the Materials Research Society of Korea Conference
• /
• 1998.11a
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• pp.102-102
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• 1998

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.280-280
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• 2015

플라즈마 진단법 중 내부에 삽입하여 측정하는 단일 랭뮤어 탐침법은 플라즈마 특성을 정확하게 측정할 수 있다. 탐침에 (-)극을 걸어서 들어오는 전류를 통해서 이온포화 전류밀도를 측정할 수 있다. 본 연구에서는 유도결합플라즈마에 흐르는 가스와 압력에 따라서 변화를 확인하였다. $H_2$, Ar, $CF_4$ gas로 10 mTorr, 70 mTorr, $CF_4$ 주입위치의 조건으로 플라즈마 밀도를 구하였다.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2000.11a
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• pp.53.1-56
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• 2000

Langmuir-Blodgett(LB) technique is the best candidate for the future molecular electronic devices. But, these molecular thin film devices require the bulk properties that are influenced by the molecular orientations. So, this is of current interest in molecular electronic device fabrications of new materials. In this study, quantitative evaluation of molecular orientation in LB films of PAAS was performed by comparing the absorption intensities of the FT-IR transmission and reflection-absorption spectra and the polarized UV/visible absorption spectra. It was found that the polar angle($\theta$) of the dipole moment is about 68$^{\circ}$and the tilting angle of the alkyl chain is about $11.5^{\circ}$ .

• Journal of the Korean Applied Science and Technology
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• v.17 no.4
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• pp.226-232
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• 2000

Polyimide is a well-known organic dielectric material, which has not only high chemical and thermal stability but also good electrical insulating and mechanical properties. In this research, we have synthesized a polyamic acid(PAA), which is a precursor of the polyimide. To obtain the optimum conditions of polyamic acid alkylamine salt(PAAS) Langmuir-Blodgett(LB) film deposition, the ${\pi}-A$ isotherms were examined by varying subphase temperature, barrier moving speed and spreading amount of solution. Film formation was verified by measuring transfer ratio, absorption of UV/vis spectra and scanning electron microscope(SEM) images.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.333-333
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• 2015

본 연구에서는 디스플레이 패널 식각에 있어서 전극인 구리 박막 표면에 $SF_6/O_2$ 플라즈마 사용 시 발생되는 Corrosion 현상을 분석하기 위해 $SF_6/O_2$ 가스의 조성비를 변화하며 실험을 진행하였다. 유도결합 $SF_6/O_2$ 플라즈마를 이중 랭뮤어 탐침과 광 분광법을 이용한 플라즈마 진단을 통해 $SF_6/O_2$의 조성비의 변화에 따른 플라즈마 상태를 분석하고, $SF_6/O_2$ 플라즈마 조성비를 변화시켜 구리 박막의 표면을 처리한 후 발생되는 Corrosion과 Corrosion이 구리에 미치는 영향을 조사하기 위해 XPS, SEM, 4 point probe 등을 이용하였다.