• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.37 no.4
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• pp.382-393
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• 2024

The Microplotter system with a fluid dispensing method, sprays fluid based on ultrasonic pumping through piezoelectric devices. This technique can possible for various materials with a wide range of viscosities to be printed in microscale. In this paper, we introduces dispenser printing technology as well as aim to understand and apply various processes using the equipment. In addition, we will explain how to optimize the equipment by adjusting parameters such as spray intensity, tip height during printing, and patterning speed. By utilizing Microplotter's advantage of being compatible with a wide range of fluids, including metal nanoparticles, carbon nanotubes, DNA, and proteins, it is expected to be used in various fields such as printed electronics, biotechnology, and chemical engineering.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.913-919
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• 2012

This paper presents results for dispensing and measuring micro-particles using a pneumatic dispensing system. Particle-suspended liquid droplets were dispensed and analyzed quantitatively at various particle concentrations and applied pressures. By using a developed experimental setup, the number of particles and the particle volume ratio in sequentially dispensed droplets were measured. Hydrophilic and hydrophobic surfaces were tested to find a suitable surface for counting the number of particle. It was confirmed that the dispensed particles concentrated into the center of the droplet on the smooth CD surface after evaporation of liquid. As the applied positive pressure increased, the number of particles per droplet increased consistently and the volume fraction of particles remained constant.

• Korean Journal of Materials Research
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• v.28 no.2
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• pp.95-100
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• 2018

In this study, $ZrO_2$ ceramic ink was formulated for additive manufacturing three dimensional structure using dispenser printing technique. Ceramic ink with various $ZrO_2$ loading (30, 40, 50vol%) was prepared to evaluate their rheological properties and printability. High $ZrO_2$ loading $ZrO_2$ ceramic ink showed higher elastic modulus and improved shape retention, when the ceramic ink was printed and sintered at $1450^{\circ}C$ for 1h. Microstructural analysis of printed $ZrO_2$ objective indicated that high $ZrO_2$ loading objective showed lower porosity and smaller pore size.

• Journal of the Korean Vacuum Society
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• v.13 no.1
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• pp.39-45
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• 2004

Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. A 5${\times}$5${\times}$0.09 in. quartz stamp is fabricated using the etch process in which a Cr film was employed as a hard mask for transferring nanostructures onto the quartz plate. FAS(Fluoroalkanesilane) is used as a material for anti-adhesion surface treatment on the stamp and a thin organic film to improve adhesion on a wafer is formed by spin-coating. The low viscosity resin droplets with a nanometer scale volume are dispensed on the whole area of the coated wafer. The UV-NIL experiments have been performed using the EVG620-NIL. 370 nm - 1 m features on the stamp have been transferred to the thin resin layer on the wafer using the multi-dispensing method and UV-NIL process. We have measured the imprinted patterns and residual layer using SEM and AFM to evaluate the potential of the process.