• Korean Journal of Optics and Photonics
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• v.25 no.1
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• pp.29-37
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• 2014

We have studied and demonstrated general, systematic error-correction methods for a dual rotating quarter-wave plate ellipsometer. To estimate and correct 5 systematic error sources (three offset angles and two unexpected retarder phase delays), we used 11 of the 25 Fourier components of the ellipsometry signal obtained in the absence of an optical sample. Using these 11 Fourier components, we can determine the errors from the 5 sources with nonlinear optimization methods. We found systematic errors ${\epsilon}_3$, ${\epsilon}_4$, ${\epsilon}_5$) are more sensitive to the inverted Mueller matrix than retarder phase delay errors (${\epsilon}_1$, ${\epsilon}_2$) because of their small condition numbers. To correct these systematic errors we have found that error of any variety must be less than 0.05 rad. Finally, we can use the magnitudes of these errors to correct the Mueller matrix of optical components. From our experimental ellipsometry signals, we can measure phase delay and the rotational angular position of its fast axis for a half-wave plate.