• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.31-36
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• 1997

We measured refractive indices and thicknesses of SiO$_2$ thin films that have been plated on LCD glass substrate for the purpose of preventing the out-diffusion of sodium ions. The best experimental condition to determine refractive index and thickness of SiO$_2$ thin film by using ellipsometry is searched for, where ⅰ) the film thickness is increased uniformly by 20 $\AA$ from 0 $\AA$ to the period thickness while the angle of incidence is fixed and ⅱ) the angle of incidence is increased uniformly by 1$^{\circ}$ from 45$^{\circ}$ to 70$^{\circ}$ while the film thickness is fixed. We estimated the errors in determining the refractive index and thickness by comparing the measurement error of $\Delta$ and Ψ with the calculated one. The ellipsometric constants of SiO$_2$ thin film on LCD glass substrate are measured at several angle of incidence around the Brewster angle, which is the best angle if the experimental error of ellipsometer is not sensitive to the incident angle. Also the best fit refractive index and thickness of SiO$_2$ thin film to these ellipsometric constants measured at several angle of incidenc eas well as the best fit ones to the SE data are obtained using regressional analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.158-158
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• 2010

최근 전자산업의 발전은 형상 면에서 경박 단소화로 급속하게 진행되고 있으며, 전자소자 내부에서의 배선재료로 사용되고 있는 알루미늄(Al) 박막의 두께 역시 얇아지고 있다. 극박막 범위에서 박막의 두께 증가에 따라 전기가 잘 흐르기 시작하는 박막의 최소두께로 정의 되는 유착두께를 실시간으로 측정하는 방법을 구현하고 임의의 금속박막과 기판의 조합에 있어서 각각의 재료에 대한 유착두께를 제공함으로써 향후 미세전자소자의 제작 시 배선 재료의 선택에 대한 기초자료를 축적할 수 있다. 또한 박막의 미세구조 변화 관점에서 연구함으로써 여러 가지 금속박막에 대한 유착두께를 줄일 수 있는 방법을 도출할 수 있다. 본 연구에서는 유리 기판 위에 사진 식각 공정으로 패턴을 형성하고 패턴이 형성된 유리 기판은 스퍼터에 연결된 4 point probe에 구리 도선으로 연결한 후 DC 마그네트론 스퍼터법으로 Al, Cr, ITO, Sn을 증착하면서 실시간으로 시간에 따른 면저항을 측정하며 이 때 스퍼터 내부 진공도는 $4.6{\times}10^{-5}$까지 낮춰준 후 각각의 금속에 맞는 진공도를 설정하였다. 20.0 sccm의 Ar가스를 넣고 100 W파워로 플라즈마를 형성시켜 금속을 증착하면서 4-point probe를 이용하여 실시간으로 면저항을 측정했다. 1초 단위로 면저항을 측정한 결과 평균적으로 Al은 71초, Cr은 151초, ITO는 61초, Sn은 20초에 저항이 급격히 감소함을 알 수 있었다. 또한 저항이 급격히 감소한 시점의 박막 두께를 알기 위해Surface profiler로 박막두께를 측정한 결과 1초당 Al은 $4\;{\AA}$, Cr은 $1.7\;{\AA}$, ITO는 $2.7\;{\AA}$, Sn은 $6.7\;{\AA}$ 이었다. 실험적으로 R은 면저항, T는 증착 시간이라 할 때 Y축을 $R{\times}T^3$으로 하고 X축을 T로 설정하고 그래프로 나타내면 Y축 값이 최소값을 갖는 시점이 유착두께임을 확인하였다. 본 연구는 실시간 면저항 측정을 통한 금속박막의 전기전도 특성과 미세구조에 대한 기초자료를 제공함으로써 신기술 발전에 공헌할 것이다.

• Clinics in Shoulder and Elbow
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• v.15 no.2
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• pp.73-78
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• 2012

Purpose: Understanding exactly detailed anatomy and morphology of scapula is very important for further surgical procedures. This study was intended to provide accurate anatomic and morphologic information of scapula by exactly measuring scapular thickness using computed tomography and reconstructing its geometric model. Materials and Methods: Eight average lengths and two angles of 102 scapular structures obtained from 51 cadavers were generally measured by computed tomography. Also, to measure the scapular thickness, sagittal planes of each scapula were divided almost equally and the thicknesses of each sagittal plane was measured by computed tomography. After measuring every thickness, average results were calculated and the gender difference was compared by Student t-test. Results: Average results of the thickness of glenoid fossa, lateral border, medial border, and the middle 1/3 portion of the scapular body were 22.4 mm, 13.83 mm, 4.44 mm and 2.06 mm, respectively. Also, male scapulars were found to be significantly thicker than female. Based on these measured thicknesses, we reconstructed the 3-dimensional geometric model of scapula. Conclusion: From these results, glenoid fossa and lateral border were the thickest part of scapula, while the middle 1/3 portion of the scapular was the thinnest.

• Korean Journal of Materials Research
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• v.7 no.7
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• pp.597-603
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• 1997

파장분산 분광분석기(Wavelength Dispersive Spectroscopy, WDS)는 다른 분석 방법에 비해 분해능이 좋고 측정 시간이 적게 걸리며, 또한 비용면에서 경제적이고 정량값이 실제값과 다르게 측정될 수 있다. 즉, 다성분계 박막에 있엇 X-선 발생 깊이가 작은 원소의 경우 X-선 발생 깊이가 큰 원소에 비해 조성값이 과장되어 측정된다. PZT박막의 경우에도 WDS로 측정한 조성은 박막의 두께에 따른 정확한 보정이 필요하다. 본 연구에서는 WDS를 이용하여 PZT박막의 조성을 측정할 때, 얇은 박막의 경우에도 조성을 정확하게 알아낼 수 있도록 박막의 두께에 따른 조성의 보정법을 제시하였다. 또한, 박막의 두께를 직접 측정하는 과정없이 WDS분석 결과로 얻는 각 원소들의 [ZAF]k 의 합으로부터 박막의 두께를 이론적으로 구하였으며, 이를 실험값과 비교하였다.

• Journal of the Korean Society of Propulsion Engineers
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• v.10 no.2
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• pp.70-77
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• 2006

A specially designed in;ector using electric conductivity was used to measure the liquid film thickness exactly, The measurement conducted through the precise calibration, accuracy is demonstrated in comparison with the previous theory and the results using other measurement method. The variation of internal flow and stability are examined through the variation of liquid film thickness by the time. The tendency of liquid film thickness for geometric parameters was examined by the precise measurement.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1388-1389
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• 2006

금속의 전기비저항 측정은 4단자 방법, van der Pauw 방법, Four Point Probe(FPP) 방법 등이 있으며, 이들의 정확한 측정방법을 고찰하고, 그 중 FPP 방법에 의한 비저항의 두께효과를 비교 분석하기 위하여 비자성 금속 SUS 316을 두께별로 가공한 후 실험하였다. 그 결과 4단자 및 van der Pauw 방법으로 측정된 도전율은 각각 2.273 %IACS으로 나타났으며, FPP방법으로 측정된 도전율은 probe spacing 5.0 mm, dc current 10 A에서 시료의 두께가 2 mm일 때 2.288 %IACS, 3 mm일 때 2.271 %IACS로서 상기 두 방법으로 측정한 결과와 0.5 %이내에서 일치하였으나, 시료가 5mm 및 11 mm 에서는 매우 큰 오차를 나타냈다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.8
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• pp.2157-2163
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• 2009

The oxygen permeability of a soft contact lens is an important parameter for determining corneal health when considering the physiological response of the eye. The aim of this study is to evaluate the oxygen permeability of soft contact lenses based on thickness, using the polarographic method. The thickness of lens was measured using contact and non-contact method. To assess accuracy and reliability, the Bland-Altman plot was used. The reliability was high for the oxygen permeability based on center thickness measured by contact method, whereas the accuracy was high for the oxygen permeability based on center thickness measured by non-contact method. These results indicate that the permeability characteristics were variable according to the measurement and criteria of thickness of soft contact lenses and the measurement of soft contact lenses by non-contact method was more reasonable. Thus, contact lens practitioners should consider some basic differences between methodologies when interpreting or quoting oxygen performance data.

• Progress in Superconductivity
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• v.14 no.1
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• pp.45-51
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• 2012

Microwave metrology for the thickness of metallic or superconductive films provides a new way to measure the film thickness in a non-invasive way by using microwave resonators, with the measurement accuracy affected by standard uncertainties in the resonator quality factor, temperature-dependent resonant frequency and the dimensions of the resonators. Here we study effects of the standard uncertainty in the thickness, $t_{cal}$, of a calibration $YBa_2Cu_3O_{7-{\delta}}$ (YBCO) film on the measured thicknesses, $t_{RF}$, by using a ~ 40 GHz microwave resonator. For the study, we used five YBCO films having the thicknesses of 70 - 360 nm, for which relative standard uncertainties in $t_{RF}$ due to that in $t_{cal}$ are obtained. The standard uncertainty in $t_{cal}$ was determined with the surface roughness of the film taken into account. It appeared that relative standard uncertainty in $t_{cal}$ significantly affects the $t_{RF}$ values, with the values of 1% (5%) in the former resulting in those of 1-2% (5-9%) for the latter at 10 K. Our results show that, for realizing relative standard uncertainties less than 5% in $t_{RF}$ for all the YBCO films, the surface roughness of the calibration films should be small enough to realize a relative standard uncertainty of less than 2.7% in $t_{cal}$.

• Journal of the Korea institute for structural maintenance and inspection
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• v.26 no.3
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• pp.39-47
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• 2022

In this paper, we proposed a thickness measurement method of concrete slab using GPR, and the verification of the suggested algorithm was carried out through real-scale experiment. The thickness measurement algorithm developed in this study is to set the relative dielectric constant based on the unique shape of parabola, and time series data can be converted to thickness information. GPR scanning were conducted in four types of slab structure for noise reduction, including finishing mortar, autoclaved lightweight concrete, and noise damping layer. The thickness obtained by GPR was compared with Boring data, and the average error was 1.95 mm. In order to investigate the effect of finishing materials on the slab, additional three types of finishing materials were placed, and the following average error was 1.70 mm. In addition, sampling interval from device, the effect of radius on the shape of parabola, and Boring error were comprehensively discussed. Based on the experimental verification, GPR scanning and the suggested algorithm have a great potential that they can be applied to the thickness measurement of finishing mortar from concrete slab with high accuracy.

• Proceedings of the Korea Institute of Fire Science and Engineering Conference
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• 2008.04a
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• pp.124-127
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• 2008

현장방염처리 물품의 방염성능평가시 실내 인테리어 공사가 끝난 후 시험 시료를 채취하여 연소시험을 실시하게 되어있다. 그러나 이러한 절차로 인해 검사 소요시간이 길어지고 여러 민원이 발생하여 이를 대처할 시험 방법이 필요하다. 따라서 연소시험 대신 도막두께 측정 시험 방법을 도입하여 방염성능평가에 따른 문제점들을 해결하고자 한다. 도막두께 측정 시험의 경우 도막두께 측정용 라벨을 방염도료를 칠해야 하는 합판이나 목재 위에 붙이고 도료 작업이 끝나고 나면 관할 소방서에 이 라벨을 떼어서 제출하여 기준 도막 두께와 비교 측정하였을 때 기준 도막두께보다 두꺼우면 방염성능을 인정해주고 만약 기준 도막두께보다 얇게 칠해지면 현장 검사 또는 시료 채취 후 연소시험을 병행하여 검사함으로서 안전하고, 책임 있는 방염성능 시공을 할 수 있도록 관리 감독할 수 있을 것이다.