• 한국전산유체공학회:학술대회논문집
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• 2006.10a
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• pp.163-166
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• 2006

This paper presents numerical results of fluid flows and mixing in a microfluidic device for AC electroosmotic flow (AC-EOF) with coplanar electrodes on top and bottom walls. Differently from previous EOF a channel which attached a couple of coplanar electrodes can be utilized to mix a target liquid with a reagent. In this study we propose a method of controlling fluid flows and mixing enhancement. To obtain the flow and mixing characteristics, numerical computations are performed by using a commercial code, CFX10. It was found that the flow near the coplanar electrodes is of 3-D complex flows and vortices between the other electrodes, and as a consequence the AC-electroosmotic flow on the electrodes plays an important role in mixing the liquid.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.4
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• pp.918-923
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• 2008

We proposed an embedded capacitor with the unique electrode structure, which electrodes are located on the same plane and dielectric gap was formed by electrodes. We named it 'Gap type EC', and it was analyzed by the FEM(Finite element Method) program tool. The resonant frequency of Cap type EC was obtained at more higher frequency region. Also, resonant frequency was changed with the magnitude and thickness of electrodes. The Gap type EC with the dielectric gap of $50{\mu}m$ showed capacitance density of $55pF/cm^2$. This value is the higher than that of conventional EC. So, we concluded that the Gap type EC can be a good candidate for high frequency decoupling.

• Journal of Sensor Science and Technology
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• v.6 no.4
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• pp.337-345
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• 1997

The micro heater with PSG/$Si_{3}N_{4}$ diaphragm and platinum heater pattern was designed for micro-gas sensor fabrication. The platinum heater and the platinum electrode for sensing layer were designed on the same plane and fabricated in the single photolithography process. The thermal analyses including temperature distribution over the diaphragm and power consumption of the heater were carried by finite element method. The thermal properties of the microsensor with both heater and sensing electrode on the same plane was compared with that of the typical microsensor which had the structure of sensing layer/insulator/heater on the diaphragm.

• Journal of computational fluids engineering
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• v.12 no.1
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• pp.16-21
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• 2007

This paper presents numerical results of fluid flows and mixing in a microfluidic device with AC electroosmotic flows (AC-EOF) around coplanar electrodes attached on the top and bottom walls. To obtain the flow and mixing characteristics, numerical computations are performed by using a commercial code, CFX10. Experiment was performed to confirm the generation of the drift velocity around the electrodes. It was found that near the coplanar electrodes 3-D complex flows are generated. The AC-electroosmotic flow on the electrodes plays an important role in mixing the liquid.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1637-1638
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• 2006

HVAC 시스템은 쾌적하고 깨끗한 운전환경을 만들어 줌으로써 운전자에게 향상된 안락성과 안전성을 제공한다. 이때 센서는 시시각각으로 변화하는 차실 내외의 환경변화에 대한 정보를 검출하여 HVAC 제어 유니트에 제공한다. 현재 HVAC 시스템에 사용되고 있는 후막 가스센서는 소자 크기와 소비전력이 크고, 제작공정이 까다로워 생산성이 낮은 단점이 있다. 이와 같은 문제점을 해결하기 위해서 최근에는 초소형화, 저소비전력, 대량생산에 의한 저가격화가 가능한 MEMS 가스센서의 연구개발이 활발히 진행되고 있다. 본 연구에서는 MEMS 구조체를 이용한 마이크로 가스센서를 설계 및 제작하였고, 감도특성을 고찰하였다. 가스 감지막은 금속산화물 페이스트를 스크린 프린팅 하는 종래의 방법 대신 MEMS 구조체에 적용 가능한 sol-gel 프로세스에 의해 형성하였다. 또 가스 감지전극과 micro-heater를 동일 평면상에 제작, 공정을 간소화하여 저가화를 시도하였다. MEMS 구조체 위에 제작된 Pt 박막 micro-heater의 인가전압에 따른 발열특성을 조사한 결과, 발열온도가 인가전압에 비례하는 이상적인 선형성을 나타내었으며, $300^{\circ}C$의 동작 온도에 도달하기 위해 65mW 이하의 저전력 동작이 가능하였다. 가스 센서의 감도특성 확인 실험은 CO 가스 10ppm, NO 가스 0.3ppm을 기준으로 수행되었으며, CO 및 NO에 대해 Rs(sensitivity, 가스반응저항/초기저항) 값은 각각 0.753 과 2.416로 우수한 성능을 나타내었다.