• Title/Summary/Keyword: 대물렌즈

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Performance Prediction for Plenoptic Microscopy Under Numerical Aperture Unmatching Conditions (수치 구경 불일치 플렌옵틱 현미경 성능 예측 방안 연구)

  • Ha Neul Yeon;Chan Lee;Seok Gi Han;Jun Ho Lee
    • Korean Journal of Optics and Photonics
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    • v.35 no.1
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    • pp.9-17
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    • 2024
  • A plenoptic optical system for microscopy comprises an objective lens, tube lens, microlens array (MLA), and an image sensor. Numerical aperture (NA) matching between the tube lens and MLA is used for optimal performance. This paper extends performance predictions from NA matching to unmatching cases and introduces a computational technique for plenoptic configurations using optical analysis software. Validation by fabricating and experimenting with two sample systems at 10× and 20× magnifications resulted in predicted spatial resolutions of 12.5 ㎛ and 6.2 ㎛ and depth of field (DOF) values of 530 ㎛ and 88 ㎛, respectively. The simulation showed resolutions of 11.5 ㎛ and 5.8 ㎛, with DOF values of 510 ㎛ and 70 ㎛, while experiments confirmed predictions with resolutions of 11.1 ㎛ and 5.8 ㎛ and DOF values of 470 ㎛ and 70 ㎛. Both formula-based prediction and simulations yielded similar results to experiments that were suitable for system design. However, regarding DOF values, simulations were closer to experimental values in accuracy, recommending reliance on simulation-based predictions before fabrication.

Internal Defect Position Analysis of a Multi-Layer Chip Using Lock-in Infrared Microscopy (위상잠금 적외선 현미경 관찰법을 이용한 다층구조 칩의 내부결함 위치 분석)

  • Kim, Seon-Jin;Lee, Kye-Sung;Hur, Hwan;Lee, Haksun;Bae, Hyun-Cheol;Choi, Kwang-Seong;Kim, Ghiseok;Kim, Geon-Hee
    • Journal of the Korean Society for Nondestructive Testing
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    • v.35 no.3
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    • pp.200-205
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    • 2015
  • An ultra-precise infrared microscope consisting of a high-resolution infrared objective lens and infrared sensors is utilized successfully to obtain location information on the plane and depth of local heat sources causing defects in a semiconductor device. In this study, multi-layer semiconductor chips are analyzed for the positional information of heat sources by using a lock-in infrared microscope. Optimal conditions such as focal position, integration time, current and lock-in frequency for measuring the accurate depth of the heat sources are studied by lock-in thermography. The location indicated by the results of the depth estimate, according to the change in distance between the infrared objective lens and the specimen is analyzed under these optimal conditions.

Designing a kmultiview 3D display system based on a spatiotemporal multiplexing (시공 분할방식을 이용한 다시점 삼차원 디스플레이 시스템의 설계)

  • 손정영;김재순;전호인
    • Korean Journal of Optics and Photonics
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    • v.9 no.6
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    • pp.368-372
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    • 1998
  • A 16-views 3 dimensional imaging system is designed by spatially combinding two 8-views time multiplexed image channels. Each 8-views channel composed of 3 primary color CRTs and a dichroic beam splitter which combining the three CRTs as one channel. Each CRT displays 8-view images time sequentially. These images are projected to a holographic screen of a size 1$\times$0.8 $m^2$ through a projection optics. Characteristics of the three different configurations of projection optics are examined with the optics designing program "DEMOS" to select an optimized projection optics for the system. The configulation of the optimized projection optics is found like following; images from each channel combined by two-fold mirror are projected by a projection objective through a 16-strips LCD shutter. In this configuration, the shutter should be located at the entrance pupil of the objective, and the folded edge of the two-fold mirror should contact symmetrically to the center line of the shutter.e shutter.

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Study on the Scan Field of Modified Octupole and Quadrupole Deflector in a Microcolumn (마이크로칼럼에서 변형된 4중극 디플렉터와 8중극 디플렉터의 스캔 영역 비교)

  • Kim, Young Chul;Kim, Ho-Seob;Ahn, Seong Joon;Oh, Tae-Sik;Kim, Dae-Wook
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.11
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    • pp.1-7
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    • 2018
  • In a microcolumn, a miniaturized electrostatic deflector is often adopted to scan an electron beam. Usually, a double octupole deflector is used because it can avoid excessive spherical aberrations by controlling the electron beam path close to the optical axis of the objective lens and has a wide scan field. Studies on microcolumns have been performed to improve the low throughput of an electron column through multiple column applications. On the other hand, as the number of microcolumns increases, the number of wires connected to the components of the microcolumn increases. This will result in practical problems during the process of connecting the wires to electronic controllers outside of the vacuum chamber. To reduce this problem, modified quadrupole and octupole deflectors were examined through simulation analysis by selecting an ultraminiaturized microcolumn with the Einzel lens eliminated. The modified deflectors were designed changing the size of each electrode of the conventional Si octupole deflector. The variations of the scan field and electric field strength were studied by changing the size of active electrodes to which the deflection voltage was to be applied. The scan field increased linearly with increasing deflection voltage. The scan field of the quadrupole deflector and the electric field strength at the center were calculated to be approximately 1.3 ~ 2.0 times larger than those of the octupole deflector depending on the electrode size.

Hardware Design for the Control Signal Generation of Electron Optic by Focal Length (Focal length에 의한 전자 렌즈의 제어 신호 생성을 위한 하드웨어 설계)

  • Lim, Sun-Jong;Lee, Chan-Hong
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.5
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    • pp.96-100
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    • 2007
  • Condenser lens and objective lens are used to demagnify the image of the crossover to the final spot size. In lens, electrons are focused by magnetic fields. This fields is fringing field. It is important in electron focusing. Electron focusing occurs the radial component field and axial component field. Radial component produces rotational force and axial component produces radial force. Radial force causes the electron's trajectory to curve toward the optic axis and corss it. Focal length decreases as the current of lens increases. In this paper, we use the focal length for desiging the hardware of lens current control and present the results.

Multi-focal Microscopic System Using a Fiber Bundle (광섬유 다발을 이용한 다초점 현미경)

  • Gu, Young-Mo;Ham, Hyo-Shick;Choi, Sung-Eul
    • Korean Journal of Optics and Photonics
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    • v.20 no.6
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    • pp.354-360
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    • 2009
  • We have constructed and analyzed the performance of a simple fiber bundle multi-focal microscope. The microscope had a fiber bundle substituted for micro-lens array that is the core part of MMM(multi-focal multi-photon microscope). The MMM is a type of confocal microscope. To analyze the performance and characteristics of the fiber bundle multi-focal microscope, three types of samples were used: a standard grating, USAF 1951(7, 3), and 1951(7, 6). Using two polarizers and a polarizing beam splitter, we eliminated noise and got clear images. We obtained the FWHM of fiber spot images with the standard grating using two different magnifier lenses which were 63X and 20X, and found an image of the sample as a distribution of fiber spot images. For this case we used the low magnification lens, which gives denser distribution, so that we could get clearer images. In order to test the resolution of the fiber bundle multi-focal microscopic system, we used the USAF 1951 sample which has a smaller line interval than that of the standard grating. The FWHM of the line width of the image coincides well with the real line width of the USAF 1951 sample. We confirmed the performance of a fiber bundle multi-focal microscopic system which is relatively simple but has submicron resolution and is able to get 1600 images at the same time.

Inscribed Transceiver Optical System Design for Laser Radar with Zoom-type Expander (줌렌즈 광속확대기를 적용한 레이저 레이더용 송수광 내접형 광학계 설계)

  • Koh, Hae Seog;Ok, Chang Min;Hong, Jin Sug;Lee, Chang Jae;Park, Chan Geun;Kim, Hyun Kyu
    • Korean Journal of Optics and Photonics
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    • v.24 no.1
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    • pp.23-28
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    • 2013
  • In this paper, an optical system was designed for 3D imaging laser radar with optical scanner. In order to make it easy to scan, the system was designed to inscribe the transmitting objective lens in the receiving lens. In transmitting optics, the beam expander was designed to have a zoom mechanism so that the transmitted beam size would be 4.8 m or 6.8 m at 1 km distance, when the laser source's numerical aperture value is between 0.13 and 0.22. The beam diameter at the target 1 km away was confirmed by design program. The receiving optics for the returning beam from the target was designed for the $16{\times}16$ array detector with $100{\mu}m$ pixel width. The spot diameter in every pixel was designed and verified to be less than $55{\mu}m$. The receiving optics' obscuration ratio by transmitting optics was 11%.

The design of microscopic system using zoom structure with a fixed magnification and the independency on the variation of object distance (줌 구조를 이용하여 물체거리가 변해도 상면과 배율이 고정되는 현미경 광학계의 설계)

  • 류재명;조재흥;임천석;정진호;전영세;이강배
    • Korean Journal of Optics and Photonics
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    • v.14 no.6
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    • pp.613-622
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    • 2003
  • The multi-configurative microscopic system for inspecting the wire-bonding of reed frame is designed. Rays refracted by objective lens group which is composed of common lens group of x2 and x6 are splitted by beam-splitter, and Rays through the central region and the boundary region of the object imaged at x2 and x6 through imaging lens groups, respectively. The depth of wire structure on the reed frame has about $\pm$3 mm, in order to observe by uniform magnification without the dependency on the variation of objective distance generated by the depth of wire structure on the reed frame, imaging lens groups should be moved on nonlinear locus like mechanically compensated zoom lenses. The nonlinear equations for zoom locus are derived by using the Gaussian bracket. Refraction powers and positions of each groups are numerically determined by solving the equations, and initial design data for each groups is obtained by using Seidel third order aberration theory. The optimization technique is finally utilized to obtain this microscopic system.