• Title/Summary/Keyword: 대기가열율

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High crystallization of ultra-thin indium tin oxide films prepared by reactive sputtering with post-annealing (반응성 스퍼터링으로 제조한 ITO 초박막의 후 열처리에 따른 고 결정화)

  • Lee, Ho-Yun;Kim, Seo-Han;Song, Pung-Geun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.128-128
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    • 2018
  • 최근 디스플레이 기술은 보다 가볍고, 얇고, 선명한 스마트 형태로 발전되고 있다. 특히 스마트산업의 성장으로 터치스크린패널(Touch Screen Panel, TSP)을 사용하는 기술이 다양해짐에 따라 더 높은 감도와 해상도를 달성하기 위한 핵심기술이 필요한 실정이다. TSP는 저항막 방식, 정전용량 방식, 적외선 방식, 초음파 방식 등 다양한 방식이 있다. 그 중 정전용량방식 터치 패널 (Capacitive type touch panel, CTTP)은 다른 유형에 비해 빠른 반응속도 및 멀티 터치 기능 등의 이점을 가지고 있기 때문에 연구의 초점이 되고 있다. 이를 실현하기 위해서 CTTP은 가시광영역의 높은 투과율과 낮은 비저항을 필요로 하기 때문에 박막의 초 슬림화 및 고 결정화도가 선행되어야만 한다. CTTP에 사용되는 투명전극 소재 중에서 40%의 비중을 차지하고 있는 ITO박막은 내구성과 시인성이 좋으나 생산 비용이 비싸다는 단점이 있다. 한편, 반응성 스퍼터링은 기존에 단일 소결체를 사용한 DC마그네트론 스퍼터링법보다 높은 증착률과 낮은 생산 비용으로 초박막을 만들 수 있다는 장점을 가진다. 본 실험에서는 In/Sn (2wt%) 금속 합금 타깃을 사용한 반응성 스퍼터링법을 이용하여 기판 온도 (RT 및 $140^{\circ}C$)에서 두께 30 nm의 In-Sn-O (ITO)박막을 증착하고, 대기 중 $140^{\circ}C$ 온도에서 시간에 따라 열처리한 후 박막의 물성을 관찰하였다. 증착 중 기판 가열을 하지 않은 ITO 박막의 경우, 열처리 시간이 증가함에 따라 비저항은 감소하였고, 홀 이동도는 현저하게 증가하였으며 캐리어 밀도에서는 별다른 차이가 없었다. 이를 통해 비저항의 감소는 캐리어 농도보다는 결정화를 통한 이동도의 증가와 관련 있다는 것을 확인할 수 있었다. 열처리 시간에 따른 박막의 핵 생성 및 결정 성장은 투과 전자 현미경(TEM)으로 명확하게 확인하였으며, 완전 결정화 된 박막의 grain size는 300~500 nm로 확인되었다. 기판온도 $140^{\circ}C$에서 증착한 박막의 경우, 후 열처리를 하지 않은 상태에서도 이미 결정화 된 것을 확인할 수 있었으며, 후 열처리 시에도 grain size에는 큰 변화가 없었다. 이는 증착 중에 박막의 결정화가 이미 완결된 것으로 판단된다. 또한, RT에서 증착한 박막의 경우에는 후 열처리 초기에는 산소공공등과 같은 결함들의 농도가 감소하여 투과율이 증가하였으나 완전한 결정화가 일어난 후에는 투과율이 약간 감소한 것을 확인할 수 있었다. 이는 결정화 시 박막의 표면 조도가 증가하였고 이로 인해 빛의 산란이 증가하여 투과율이 감소한 것으로 판단된다. 이러한 결과로 반응성 스퍼터링 공정으로 제조한 ITO 초박막은 후열처리에 의한 완전한 결정화를 이룰 수 있으며, 이를 통해 얻은 낮은 비저항과 높은 투과율은 고품질 TSP에 적용될 가능성을 가진다고 판단된다.

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Growth characteristics of single-crystalline 6H-SiC homoepitaxial layers grown by a thermal CVD (화학기상증착법으로 성장시킨 단결정 6H-SiC 동종박막의 성장 특성)

  • 장성주;설운학
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.10 no.1
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    • pp.5-12
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    • 2000
  • As a semiconductor material for electronic devices operated under extreme environmental conditions, silicon carbides (SiCs) have been intensively studied because of their excellent electrical, thermal and other physical properties. The growth characteristics of single- crystalline 6H-SiC homoepitaxial layers grown by a thermal chemical vapor deposition (CVD) were investigated. Especially, the successful growth condition of 6H-SiC homoepitaxial layers using a SiC-uncoated graphite susceptor that utilized Mo-plates was obtained. The CVD growth was performed in an RF-induction heated atmospheric pressure chamber and carried out using off-oriented ($3.5^{\circ}$tilt) substrates from the (0001) basal plane in the <110> direction with the Si-face side of the wafer. In order to investigate the crystallinity of grown epilayers, Nomarski optical microscopy, transmittance spectra, Raman spectroscopy, XRD, Photoluninescence (PL) and transmission electron microscopy (TEM) were utilized. The best quality of 6H-SiC homoepitaxial layers was observed in conditions of growth temperature $1500^{\circ}C$ and C/Si flow ratio 2.0 of $C_3H_8$ 0.2 sccm & $SiH_4$ 0.3 sccm.

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The Changes of UV-B Radiation at the Surface due to Stratospheric Aerosols (성층권 에어로졸에 의한 지표면 UV-B 복사량 변동)

  • Jai-Ho Oh;Joon-Hee Jung;Jeong-Woo Kim
    • International Union of Geodesy and Geophysics Korean Journal of Geophysical Research
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    • v.21 no.1
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    • pp.31-46
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    • 1993
  • A radiative transfer model with two-stream/delta-Eddington approximation has been developed to calculate the vertical distributions of atmospheric heating rates and radiative fluxes. The performance of the model has been evaluated by comparison with the results of ICRCCM (Intercomparison of radiative codes in climate models). It has been demonstrated that the presented model has a capability to calculate the solar radiation not only accurately but also economically. The characteristics of ultraviolet-B radiation (UV-B; 280-320nm) are examined by comparison of relation between the flux at the top of atmosphere and that at the surface. The relation of UV-B is quadratic due to the strong ozone absorption in this band. Also, the dependence of the UV-B radiation on the stratospheric ozone depletion and stratospheric aerosol haze due to volcanic eruption on the stratospheric ozone depletion and stratospheric aerosol haze due to volcanic eruption has been tested with various solar zenith angles. The surface UV-B increases as the solar zenith angle increases. The existence of stratospheric aerosols causes an increase in the planetary albedo due to the aerosols' backscattering. The planetary albedo with aerosol's effect has been increases as the solar zenith angle is not sensitive. It may be caused by the fact that the aerosols' scattering effect becomes saturated with the relatively long path length in a large solar zenith angle. Finally, the regional impact of stratospheric aerosols due to volcanic eruption on the intensity of UV-B radiation at the surface has been estimated. A direct effect is that the flux is diminished at the low latitudes, while it is enhanced in the high latitudes by the aerosols' photon trap or twilight effect. In the high latitudes, both aerosols' scattering and ozone absorption have strong and opposite impacts to the surface UV-B radiation is located at the mid-latitudes during spring season in both hemispheres.

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Effect of Wine Yeast, Temperature and Moisture Contents on Characteristics of Jeung-Pyun Batter (Wine Yeast와 온도 및 수분함량이 증편 반죽의 특성에 미치는 영향)

  • 유진현;한규홍
    • Culinary science and hospitality research
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    • v.8 no.3
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    • pp.309-321
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    • 2002
  • In this study, the characteristics of Jeung-pyun hatter were investigated by wine yeast. The processing conditions were optimized by physicochemical characterization including pH, volume, reduced sugar. The effect of yeast concentration, moisture content on the fermentation time and temperature were investigated in view of improving productivity. It was found that the volume was increased at maximum state when the fermentation was carried out at 35 $^{\circ}C$ with 0.1% yeast concentration 60% of moisture. The quality of Jeung-Pyun was most preferable in the condition of 0.1% wine yeast(Pasteur Red) for 8 hrs at 35$^{\circ}C$.

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Analysis of Ammonium Carbamate Used as a NOx Reducing Agent for the SCR System of Marine Diesel Engines (선박용 디젤엔진 SCR 시스템에 NOx 환원제로 사용되는 암모늄 카바메이트의 물질 성분 분석 연구)

  • Kim, Hongsuk;Ryu, Younghyun
    • Journal of the Korean Society of Marine Environment & Safety
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    • v.26 no.6
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    • pp.751-758
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    • 2020
  • SCR technology, which uses urea-water as a NOx reducing agent, has been widely used to reduce NOx in marine diesel engines. However, as an alternative NOx reducing agent, solid-phase ammonium carbamate has several advantages, such as low-temperature NOx reduction performance and NH3 storage capacity. This study presents a method for evaluating the purity of ammonium carbamate using EA, FTIR, and XRD to investigate the change in the material characteristics of ammonium carbamate when it is exposed to various temperature and pressure conditions. In this study, it was found that the purity of ammonium carbamate can be effectively evaluated via EA analysis. The FTIR analysis results confirmed that the properties of ammonium carbamate did not change even after repeated heating and cooling under thermal decomposition temperature conditions, which may be applied to the SCR system of marine diesel engines. Additionally, it was found that when ammonium carbamate was exposed to the atmosphere for a long time, it transformed into ammonium carbonate.

Influence of Starvation on the Variations of Hepatocyte Nucleus in Larvae of Red Spotted Gruper, Epinephelus akaara (기아시 붉바리 자어의 간세포핵 변화)

  • 이창규;박인석;허성범
    • Journal of Aquaculture
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    • v.11 no.1
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    • pp.11-17
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    • 1998
  • Variations of hepatocyte in the larval liver of grouper, Epinephelus akaara wre examined to understand the effect of starvation during the first feeding period, 3 to 5 days after hatching. Total length of the fed larvae increased from the 5th day after hatching, although no significant difference between the fed and starved larvae was found untill the 4th day after hatching. Survival rate of the starved larvae decreased from the 4th day after hatching, and almost all of the larvae died by the 5th day after hatching. Nuclear size of hepatocyte in the starved larvae starterd to decrease from the 4th day after hatching. The sizes by 4th and 5th days after hatching in the starved larvae were 1.4 to 1.9 times smaller than those in the fed ones. Hepatocytes in the starved larvae showed irregular morphology in which the nuclei were irregularly shrunk and highly compacted from the 4th day, while hepatocyte nuclei in the fed ones maintained their uniform features during the whole experimental period. These results implied that the initial larval food should be supplied at least within the 4th day after hatching. Also, it suggested that the size of hepatocyte nucleus might be and indicator of starvation for wild and cultured grouper larvae.

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