• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.345-345
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• 2007

본 연구는 x선 영상검출기 적용을 위한 $HgI_2$ 필름의 누설전류 특성 향상을 위한 연구로서, $HgI_2$기반의 다양한 물질을 이용하여 다층구조 방식으로 제작된 필름의 누설전류 특성평가 및 제작된 다층구조의 상부전극물질의 변화에 따른 누설전류 특성을 평가하였다. $HgI_2$기반 다층구조의 제작 물질은 Parylene, $PbI_2$, a-Se을 사용하여 시편(parylene/ITO, ITO/$HgI_2/PbI_2$/ITO, ITO/$HgI_2$/a-Se/ITO)을 제작하였으며, 필름 제작공정은 Screen print, PVD공정으로 다층구조 필름을 제작하였다. 또 한, 다층구조로 제작된 필름에 상부 전극물질은 Au, In, ITO를 사용하여 누설전류의 특성을 평가하였다. 측정 장치로 DC Power Supply(556H. EG&G : 50~200V), X 선 발생장치(Toshiba KXO-50N), 차폐체 (Al 및 Cu), Oscilloscope (LeCroy, LC334AM, USA), Electrometer (Keithley, 6517), Ion chamber 2060 (Radical Co.)을 이용하여, 제작된 $HgI_2$기반 다층구조 sample의 누설전류 특성을 실험하였다. 이 결과로 다층구조에 제작된 물질 및 상부전극에 따른 누설전류의 특성을 평가하였다.

• Polymer(Korea)
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• v.29 no.3
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• pp.300-303
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• 2005

Polyurethane multi-layer and foam multi-layer were prepared with PU1000 and PU2000 made by poly(propylene glycol) (PPG) having the molecular weight of 1000 and 2000 g/mol, respectively. The damping and transmission loss of these materials were compared with PU1000 used as a reference. The damping peak of polyurethane multi-layer was shifted to the lower temperature compared with PU1000, while the damping peak of polyurethane foam multi-layer was shifted to the higher temperature and broaden. In terms of noise reduction, the transmission loss of polyurethane multi-layer was effective at the specific frequency range such as less than 100 Hz and around 600 Hz compared with PU1000. The transmission loss of polyurethane foam multi-layer was most effective in the whole experimental frequency range.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.05a
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• pp.241-246
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• 2002

극자외선 노광공정(EUVL: Extreme Ultraviolet Lithography)은 반도체 공정에서 0.1$\mu\textrm{m}$ 이하의 해상도를 실현하기 위해 연구되고 있는 유력한 차세대 노장공정(NGL: Next Generation Lithography)이다. [1] 본 연구에서는 극자외선 노광공정에서 사용되는 반사형 다층박막 미러를 제조하기 위해서 직접 제작한 전산모사 도구를 이용하여 130~135$\AA$의 파장 영역에서 고반사도를 가지는 효율적인 다층박막의 구조인자를 예측하였으며, 그러한 구조인자를 실현하기 위해서 상온(~300K)에서 마그네트론 스퍼터링을 이용하여 다층박막을 증착하였다. 증착조건 중에서, 공정압력에 따른 다층박막 계면 성장의 질적 의존성이 나타났으며, 결과적으로는 낮은 공정압력에서 더좋은 계면특성을 가지는 다층박막이 형성되었다. 다층박막의 구성물질로 Ru, Mo, Si을 사용하였으며, 다층박막의 구조분석은 high/low angle XRD, 단면 TEM images 등을 이용하여 분석되었다.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.4
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• pp.119-122
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• 2018

Various ZnO/Ag/ZnO multilayers were fabricated and their optical properties were investigated. Top and bottom ZnO layers were formed by sol-gel method and mid-metal layers were deposited by spin coating. To find suitable deposition condition of Ag, we measure thickness and sheet resistance of Ag monolayer. After the optimization of Ag monolayer, we fabricate ZnO/Ag/ZnO multilayers. Transmittance of ZnO/Ag/ZnO multilayers increased to 63%. In near IR region, transmittance of ZnO/Ag/ZnO multilayers decreased to 35% when the concentration of Ag solution was 2.5wt%.

• Journal of Internet of Things and Convergence
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• v.9 no.3
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• pp.61-67
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• 2023

In order to optimize the pulse electroforming copper process, a double hidden layer BP (Back Propagation) neural network is constructed. Through sample training, the mapping relationship between electroforming copper process conditions and target properties is accurately established, and the prediction of microhardness and tensile strength of the electroforming layer in the pulse electroforming copper process is realized. The predicted results are verified by electrodeposition copper test in copper pyrophosphate solution system with pulse power supply. The results show that the microhardness and tensile strength of copper layer predicted by "3-4-3-2" structure double hidden layer neural network are very close to the experimental values, and the relative error is less than 2.32%. In the parameter range, the microhardness of copper layer is between 100.3~205.6MPa and the tensile strength is between 112~485MPa.When the microhardness and tensile strength are optimal,the corresponding process conditions are as follows: current density is 2A-dm-2, pulse frequency is 2KHz and pulse duty cycle is 10%.

• Journal of the Korean Magnetics Society
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• v.9 no.3
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• pp.159-165
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• 1999

Structural, magnetic and magnetoresistance behavior of NiFe/Ag multilayers prepared by a magnetron sputter under an Ar and $Ar/H_2$ atmosphere was studied. It was difficult to make a uniform multilayer by using an Ar atmosphere. However, the uniform multilayers could be fabricated by using an $Ar/H_2$ atmosphere. This was thought to be due to decrease in the energy of the sputtered atom and Ar content of the film. Typical magnetoresistance behavior of the discontinuous NiFe/Ag multilayers appeared when the uniform multilayer was formed and annealed. Substrate temperature did not improve the uniformity of the multilayers. Above 20$0^{\circ}C$ of the substrate temperature, the films were almost formed into granular alloys rather than multilayers.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.300-300
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• 2012

프로그래머블 스위치는 프로그래머블 로직 디바이스 내에서 사용자의 프로그래밍에 따라 로직 블록과 배선을 연결하거나 차단하는 기능을 수행하는 전자소자이다. 기존의 프로그래머블 스위치는 상변화 특성을 보이는 칼코겐화물을 이용하는데, 상변화 재료만을 이용하는 스위치는 전기신호 누설의 문제점을 가지고 있다. 이러한 문제점을 해결하기 위하여 본 연구에서는 프로그래머블 스위치의 활성물질로서 상변화 재료 및 문턱(threshold) 스위칭 특성을 보이는 칼코겐화물을 포함하는 다층구조를 제안하고, 다층구조에 적용 가능한 칼코겐화물 합금 특성을 보고한다. RF magnetron sputtering 방식을 이용하여 doped GeSbTe 박막을 증착하고 온도에 따른 면저항 및 표면 형상 변화를 관찰하였다. Doped GeSbTe는 기존의 GeSbTe 상변화 재료와는 뚜렷하게 구분되는 면 저항 및 표면 형상 변화를 나타내었다. 이러한 결과로부터 doped GeSbTe 합금 박막은 다층구조 프로그래머블 스위치의 활성물질로 사용이 가능하다는 사실을 확인할 수 있었다.

• Proceedings of the KAIS Fall Conference
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• 2007.05a
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• pp.123-125
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• 2007

본 논문에서는 유한한 유전체 격자구조에 수직으로 입사되는 전자기파가 갖는 유효 굴절율을 구하고자 한다. 유전체 격자구조를 다층구조로 모델링하여 모드에 따른 전파상수를 계산하면 주어진 주파수에 따른 유효 굴절율을 계산할 수 있다. 다층구조에서 유효 굴절율을 계산을 응용하면 유전체 모양이나 구조에 따른 유효굴절율을 계산할 수 있으며 주파수 선택특성이나 도파관등에 진행모드 계산에 도움이 될 것으로 사료된다.

• Applied Microscopy
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• v.29 no.2
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• pp.255-263
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• 1999

We have investigated the interfacial reactions in Co/Ti multilayer thin films prepared by DC Magnetron sputtering system. We observed that the amorphous Co-Ti phase formed by SSAR (Solid State Amorphization Reaction) upon annealing at $200^{\circ}C$. Upon annealing treatments at $300^{\circ}C\;and\;400^{\circ}C$, a crystalline phase of CoTi formed at the Co/Ti interface. The sheet resistance of Co/Ti multilayer thin film increased by the formation of the amorphous phase at the Co/Ti interface, which decreased by the formation of new crystalline compound CoTi.

• Computational Structural Engineering
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• v.7 no.4
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• pp.57-67
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• 1994

It is usual that underground structures are constructed within a multi-layered medium. In this paper, an efficient numerical modelling of multi-layered structural systems is studied using coupled analysis of finite elements and boundary elements. The finite elements are applied to the area in which the material nonlinearity dominates, and the boundary elements are applied to the far field where the nonlinearity is relatively weak. In the boundary element modelling of the multi-layered medium, fundamental solutions are not readily available. Thus, methods which can utilize existing Kelvin solutions are sought for the interior multi-layered domain problem. The interior domain problem which has piecewise homogeneous layers is analyzed using boundary elements with Kelvin solution, by discretizing each homogeneous subdomain and enforcing compatibility and equilibrium conditions between interfaces. Developed methodology is verified by comparing its results with those from the finite element analysis and it is concluded that coupled analysis using boundary elements and finite elements can be reasonable and efficient.