• Title/Summary/Keyword: 다이아몬드입자

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Crystalline Growth Properties of Diamond Thin Film Prepared by MPCVD

  • Park Soo-Gil;Kim Gyu-Sik;Einaga Yasuaki;Fujishima Akira
    • Journal of the Korean Electrochemical Society
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    • v.3 no.4
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    • pp.200-203
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    • 2000
  • Boron doped conducting diamond thin films were grown on Si substrate by microwave plasma chemical vapor deposition from a gaseous feed of hydrogen, acetone/methanol and solid boron. The doping level of boron was ca. $10^2ppm\;(B/C)$. The Si substrate was tilted ca. $10^{\circ}$ to make Si substrate, which have different height and temperature. Experimental results showed that different crystalline of diamond thin films were made by different temperature of Si substrate. There appeared $3\~4$ steps of different crystalline morphology of diamond. To characterize the boron-doped diamond thin film, Raman spectroscopy was used for identification of crystallinity. To survey surface morphology, microscope was used. Grain size was changed gradually by different temperature due to different height. The Raman spectrum of film exhibited a sharp peak at $1334cm^{-1}$, which is characteristic of crystalline diamond. The lower position of diamond film position, the more non-diamond component peak appeared near $1550 cm^{-1}$.

Synthesis of Crystalline film from ${CH_4}-{H_2}-{N_2}$ gases with MW-PACVD (${CH_4}-{H_2}-{N_2}$ 기체계에서 MW-PACVD를 이용한 결정상 합성)

  • Kim, Do-Geun;Baek, Young-Joon;Seong, Tae-Yeon
    • Korean Journal of Materials Research
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    • v.10 no.9
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    • pp.648-655
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    • 2000
  • Synthesis of the crystalline film was investigated under the diamond growth condition with altering the addition of the nitrogen from 0% to 95%. With increasing the nitrogen concentration, surface morphology of the film was changed from the diamond film with {100} growth plane to the non-faceted diamond film with nano-scale grains. It also showed that the deposition of the diamond film could be synthesized using only methane and nitrogen gases without hydrogen gas. Separated particles with diamond structure showed an octahedral shaped I the nitrogen ranges between 30% and 80%, and newly formed hexagonal crystals are observed when substrate temperature with diamond structure, however, also identify that the hexagonal crystal was SiCN composite composed of Si, C and N atoms.

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Bias effect for diamond films deposited by HFCVD method (HFCVD 방법을 이용한 다이아몬드 박막 증착에서의 Bias 효과)

  • 권민철;박홍준;최병구
    • Journal of the Korean Vacuum Society
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    • v.7 no.2
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    • pp.94-103
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    • 1998
  • We investigated a bias effect for diamond films deposited by a HFCVD(Hot Filament Chemical Vapor Deposition) method using a methane-hydrogen gas mixture. During deposition total chamber pressure, methane concentration, filament temperature and substrate temperature was 20 torr, 1.0%, $2100^{\circ}C$ and $980^{\circ}C$ respectively. Also DC bias was applied during both the nucleation stage and the growth stage systematically. We found that negative bias enhanced the nucleation density at the nucleation stage, but it made a bad influence on the morpholohy of films at the growth stage. Positive bias enhanced the growth rate and resulted in a good morpholohy of films. Therefore we concluded that it was effective to apply the negative bias during the nucleation stage and then to switch into the positive bias during the growth stage in the fabrication of diamond films.

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A study on the surface characteristics of diamond wire-sawn silicon wafer for photovoltaic application (다이아몬드 코팅 와이어로 가공된 태양전지용 실리콘 웨이퍼의 표면 특성에 관한 연구)

  • Lee, Kyoung-Hee
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.21 no.6
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    • pp.225-229
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    • 2011
  • Most of the silicon cutting methods using the multi-wire with the slurry injection have been used for wafers of the crystalline solar cell. But the productivity of slurry injection cutting type falls due to low cutting speeds. Also, the direct contact with the metal wire and silicon block increases the concentration of metallic impurities in the wafer's surface. In addition, the abrasive silicon carbide (SiC) generates pollutants. And production costs are rising because it does not re-use the worn wire. On the other hand, the productivity of the cutting method using the diamond coated wire is about 2 times faster than the slurry injection cutting type. Also, the continuous cutting using the used wire of low wear is possible. And this is a big advantage for reduced production costs. Therefore, the cutting method of the diamond coated wire is more efficient than the slurry injection cutting technique. In this study, each cutting type is analyzed using the surface characteristics of the solar wafer and will describe the effects of the manufacturing process of the solar cell. Finally, we will suggest improvement methods of the solar cell process for using the diamond cutting type wafer.

Effects of Phase Fraction and Metallic Glass-Diamond Size Ratio on the Densification of Metallic Glass/Diamond Composite (비정질/다이아몬드 복합재료에서 상분율과 비정질-다이아몬드 입자 크기 비가 성형특성에 미치는 영향)

  • Shin, Su-Min;Kim, Taek-Soo;Kang, Seung-Koo;Kim, Jeong-Gon
    • Journal of Powder Materials
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    • v.16 no.3
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    • pp.173-179
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    • 2009
  • In the present study, Zr-base metallic glass(MG)/diamond composites are fabricated using a combination of gas-atomization and spark plasma sintering (SPS). The densification behaviors of mixtures of soft MG and hard diamond powders during consolidation process are investigated. The influence of mixture characteristics on the densification is discussed and several mechanism explaining the influence of diamond particles on consolidation behaviour are proposed. The experimental results show that consolidation is enhanced with increasing diamond/Metallic Glass(MG) size ratio, while the diamond fraction is fixed.

Development of Multi-Porous Diamond Wheel for Smooth and Mirror Finishing of Die Materials (금형재료의 정밀연삭을 위한 다기공 다이아몬드 숫돌의 개발)

  • 허성중
    • Journal of the Korean Professional Engineers Association
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    • v.30 no.6
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    • pp.144-152
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    • 1997
  • Development of diamond wheel with fine grains and multi-pore structures were newely attempted to be studied in this paper. Wheels, that are employed for the smooth and mirrow finishing of die materials such as tungsten carbide alloy using tool and die materials, must have both performances to remove tool marks efficiently and to contact elastically with curved surfaces. Diamond abrasive grains were bonded firmly by a melamine to prevent the decrease of machining efficiency due to grain sinking within the bond materials. Also, highly foamed structures were developed to increase the flexibility of the wheel, and to induce active self-sharpening by increasing contact pressure between the wheel and work sufaces. In this paper, melamine-bonded diamond wheels are trial manufactured, then the forming method of wheels are explained.

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Stochastic Analysis of the Diamond Particle Distribution on the Surface of Circular Diamond Saw Blade (원형 다이아몬드 톱의 세그먼트 표면에서의 다이아몬드 입자 분포의 확률적인 해석)

  • 이현우;변서봉;정기정;김용석
    • Journal of Powder Materials
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    • v.10 no.3
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    • pp.201-208
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    • 2003
  • Distributions of diamond particles protruding on the surface of worn diamond segments in circular saw has been investigated. Scanning electron microscope was used to examine the worn ,surface and radial saw blade wear and grinding ratio was measured. The number of protruded diamond particle was approximately 50% of the total number of particles, and that was independent of diamond particle concentration and table speed. It was also noted that the inter-particle distance did not follow a symmetric function like Gaussian distribution function, instead it fitted well with a probability density function based on gamma function. The distribution of inter-particle spacing, therefore, was analyzed using a gamma function model.