• Journal of the Korean Vacuum Society
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• v.2 no.3
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• pp.346-354
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• 1993

The diamond particles and films were deposited on Si and qurtz substrate for $CH_4-H_2$ mixed gas by using RF plasma CVD. The temperature of substrate and the thinkness of films deposited on Si substrate were uniformly kept up by inserting metal plate between substrate and substrate holder. On increasing the reaction pressure in the same discharge power, the morphologies of films were changed from well-defind films to micro-crystal or ball-like. When diamond films were deposited on Si substrate from $CH_4-H_2$ mixed gas, we obtained well-defined diamond films at lower concentration than 0.5 vol% of $CH_4/H_2$. The deposited diamond films were indentified by SEM, XRD and Raman spectroscopy.

• Journal of the Korean Ceramic Society
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• v.41 no.10 s.269
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• pp.728-734
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• 2004

The effect of microstructure of WC-Co substrates which have different WC grain sizes from submicron to 5 $\mu$m on the diamond-substrate adhesion strength was investigated. The substrates were pre-treated by two methods : chemical etching with Murakami's solution and subsequently with $H_2SO_4$, and thermal heat-treatment. The adhesion strength was estimated by degree of peeling after Rockwell indentation. Diamond films of 20 $\mu$m thickness deposited on the heat-treated substrates showed an excellent adhesion strength at the load of 100 kg, which ascribed to the large and elongated WC grains. However, the cutting edge of insert was deformed after heat treatment and the surface morphology of heat treated substrate strongly affected on the surface roughness of the deposited diamond films. On the contrary, the diamond film of 10 $\mu$m in thickness on the chemically etched substrates of average WC grain size over 2 $\mu$m showed good adhesion strength enough not to peel-off under a load of 60 kg. Especially, the substrate of average WC grain size over 5 $\mu$m exhibited much improved reliability of adhesion comparing with the substrate of average grain size under 2 $\mu$m. No substrate deformation was observed in this case after the chemical etching, which is more advantageous and more practical in terms of precious machining than the heat treatment case.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.23 no.6
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• pp.291-295
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• 2013

Surface chemical modification via air and hydrogen heat treatment was found to relieve the aggregation of nanodiamond (ND) seed particles and lead to a significantly enhanced nucleation density for ultrananocrystalline diamond (UNCD) film growth. After heat treatment in air and hydrogen, modification of surface functionalities and increase in the zeta potential were observed. Mean size of the ND aggregates was also dramatically reduced from ${\sim}2{\mu}m$ to ~55 nm. Si surface seeded with ND particles heat-treated at $600^{\circ}C$ in hydrogen produced a much higher nucleation density of ${\sim}2.7{\times}10^{11}cm^{-2}$ compared to untreated ND seeds.

• Korean Journal of Crystallography
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• v.5 no.1
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• pp.39-50
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• 1994

Diamond thin films were deposited on silicon, molybdebum, titanum and tugsten substrates, and were chlwntnizen using scanning electron microscopy, X-ray diffraction analysis and Raman spectroscopy. From the result of experiment in various deposition periods, it was found that found that were nucleated and grown on interlayed carbide layers, which were formed on refractory metal substrates at the initial stage of.

• Analytical Science and Technology
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• v.6 no.2
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• pp.149-156
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• 1993

The formation of the graphite spherulites has been studied experimentally in the Ni-C liquid under high pressure and temperature. In the diamond-stable region the graphite spherulites were formed and grew stably. They were not the polycrystalline particles but the single crystals of the fullerene-type, respectively, grown spirally with much imperfection. And they were proved to be in a mixture state of carbon atoms with $sp^2$- and $sp^3$-bonding by an Auger electron spectroscope and a high resolution transmission electron microscope. As the pressure decreased from the diamond-stable region to the graphite-stable region, the shape of the graphite particles changed gradually from the sphere to the flaky shape. The formation of the graphite spherulites was attributed to the stable existence of the carbon atoms with $sp^3$ bonding in the diamond-stable region. The formation of the large fullerene-type graphite spherulites with much imperfection is well agreed with Kroto's prediction for growth of the giant fullerene.

• Journal of the Korean Vacuum Society
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• v.3 no.1
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• pp.122-129
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• 1994

MWPECVD법으로 CH3CHO-H2 계와 CH4-H2-O2 계로부터 Si 기판 위에 다이아몬드박막을 성장 시키고 성장된 박막을 SEM XRD 및 Raman 분광기로 평가하고 박막과 입자의 성장률을 조사하였다. 마이크로 판전력 950W 반응관압력 80torr 수소유량 200sccm 기판온도 95$0^{\circ}C$ 및 CH3CHO농도 3.5%로 5시간 성장시킨 다이아몬드의 박막성장율은 $4mu$m/hr가 되어고 12%$960^{\circ}C$로 Si기판 위에 5시간 성장시킨 다이아몬드의 박막성장율은 3.2$\mu$m/hr가 되었다.

• Korean Journal of Materials Research
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• v.4 no.5
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• pp.566-573
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• 1994

The diamond synthesis by combustion flame method is considerably affected by the substrate surface temperature and its distribution which are mainly controlled by the ratio of mixed gas, $O_2/C_2H_2$. In order to elucidate the role of gas ratio in the diamond synthetic process by combustion flame, under various gas ratios (R=0.87~0.98; R=ratio of flow-rate of $O_2/C_2H_2$ gas) the substrate temperature was measured by using thermal video system and the morphological change of diamond crystals was analysed by using SEM, Raman spectroscope, and X-ray diffraction method. With increasing the gas ratio, i.e., decreasing the hydrocarbon content, the nucleation rate of diamond crystal was lowerd. It was also found that the morphology of diamond crystals changed from the cubo-octahedron type consisting of (100), (111) plane to the octahedron type of (111) plane. The increase of the substrate temperature consistently resulted in the increase of the nucleation rate as well as the growth rate of diamond crystals in which the surface of diamond crystal dominantly consisting of (100) plane.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2002.11a
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• pp.341-342
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• 2002

미세탄소입자는 원소탄소(elemental carbon)와 유기탄소(organic carbon)로 분류할 수 있다. 원소탄소는 불완전연소 과정에 발생하는 검댕(black soot), 원유의 정제과정에 발생하는 흑연(graphite), 자연상태에서 만들어진 다이아몬드의 3가지 형태로 존재한다. 이들 중 대기환경에 영향을 미치는 요소는 검댕입자로서 입경은 l$\mu\textrm{m}$이하이며, 일정한 형태를 지니고 있지 않다. (중략)

• The Journal of Korean Academy of Prosthodontics
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• v.49 no.1
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• pp.1-7
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• 2011

Purpose: The purpose of this study was to investigate the cutting efficiency of coarse grit diamond burs with air-turbine handpiece on natural tooth. Materials and methods: Four groups of coarse grit diamond bur were selected: Komet (A), Shofu (B), Premier (C), and Mani (D). The extracted maxillary central incisors were used, and ten cuts were made on each specimen, using the rotary diamond burs. The surface of each bur was measured at the upper, middle, and bottom of the bur with confocal laser scanning microscope and imaged with SEM. The data were analyzed with one-way ANOVA and t-test at the significance level of 0.05. Results: The surface roughness was measured. At the A diamond bur, the Sa values were $52.93\;{\mu}m$, $48.32\;{\mu}m$, $46.79\;{\mu}m$, $45.06\;{\mu}m$, and $43.43\;{\mu}m$ for control, test 1, 2, 3, and 4 respectively. The Sa values were $50.68\;{\mu}m$, $45.62\;{\mu}m$, $44.41\;{\mu}m$, $44.10\;{\mu}m$, and $42.46\;{\mu}m$ for B diamond bur, $58.02\;{\mu}m$, $55.53\;{\mu}m$, $52.22\;{\mu}m$, $48.26\;{\mu}m$, and $45.36\;{\mu}m$ for C diamond bur, and $50.11\;{\mu}m$, $46.73\;{\mu}m$, $45.46\;{\mu}m$, $42.58\;{\mu}m$, and $41.80\;{\mu}m$ for D diamond bur. Surface roughness after each bur use showed significant changes, but no significant difference was found in surface roughness change between bur systems. Conclusions: Surface roughness in the same bur system showed significant differences after each tooth preparation. However no statistically significant differences were found in surface roughness between bur systems. The SEM images between control and test 4 showed the abraded particles.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.214-214
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• 1999

다이아몬드를 반도체용 열방산용기판 등으로 사용하기 위해서는 수백 $\mu\textrm{m}$ 두께의 대면적 웨이퍼가 요구된다. 이를 위해서 DC are jet CVD, MW PACVD, DC PACVD 등이 개발되어, 현재 4"에서 8"까지의 많은 문제를 일으키고 있다. 본 연구에서는 multi-cathode DC PACVD법에 의한 4" 다이아몬드 웨이퍼의 합성과 합성된 막의 특성변화에 대한 연구를 수행하였다. 또한, 웨이퍼의 휨과 crack 발생거동과 대한 고찰을 통래 휨과 crack이 없는 웨이퍼의 제작방법을 고안하였다. 사용된 음극의 수는 일곱 개이며, 투입된 power는 각 음극 당 약 2.5kW(4.1 A-600V)이었다. 사용된 기판의 크기는 직경 4"이었다. 합성압력은 100Torr, 가스유량은 150sccm, 증착온도는 125$0^{\circ}C$~131$0^{\circ}C$, 수소가스네 메탄조성은 5%~8%이었다. 합성 중 막에 인가되는 응력은 합성 중 증착온도의 변화에 의해 제어하였다. 막의 결정도는 Raman spectroscopy 및 열전도도를 측정을 통해 분석하였다. 성장속도 및 다이아몬드 peak의 반가폭은 메탄조성 증가(5%~8%)에 따라 증가하여 각각 6.6~10.5$\mu\textrm{m}$/h 및 3.8~5.2 cm-1의 분포를 보였다. 6%CH4 및 7%CH4에서 합성된 웨이퍼에서 측정된 막의 열전도도는 11W/cmK~13W/cmK 정도로 높게 나타났다. 막두께의 uniformity는 최대 3.5%로 매우 균일하였다. 막에 인가되는 응력의 제어로 직경 4"k 합성면적에서 두께 1mm 이상의 균열 및 휨이 없는 다이아몬드 자유막 웨이퍼를 합성할 수 있었다.다이아몬드 자유막 웨이퍼를 합성할 수 있었다.active ion에 의해 sputtering 이 된다. 이때 plasma 처리기의 polymer 기판 후면에 magnet를 설치하여 높은 ionization을 발생시켜 처리 효과를 한층 높여 주었다. 이 plasma 처리는 표면 청정화, 표면 etching 이 동시에 행하는 것과 함께 장시간 처리에 의해 표면에서는 미세한 과, C=C기, -C-O-의 극성기의 도입에 의한 표면 개량이 된다는 것을 관찰할 수 있다. OPP polymer 표면을 Ar 100%로 plasma 처리한 경우 C-O, C=O 등의 carbonyl가 발생됨을 알 수 있었다. C-O, C=O 등의 carbynyl polor group이 도입됨에 따라 sputter된 Al의 접착력이 향상됨을 알 수 있으며, TEM 관찰 결과 grain size도 상당히 작아짐을 알 수 있었다.onte-Carlo 방법으로 처리하였다. 정지기장해석의 경우 상용 S/W인 Vector Fields를 사용하였다. 이를 통해 sputter 내 플라즈마 특성, target으로 입사하는 이온에너지 및 각 분포, 이들이 target erosion 형상에 미치는 영향을 살펴보았다. 또한 이들 결과로부터 간단한 sputtering 모델을 사용하여 target으로부터 sputter된 입자들이 substrate에 부착되는 현상을 Monte-Carlo 방법으로 추적하여 성막특성도 살펴보았다.다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(nano)화하여 나노 입자를 제조, 기존의 기능성 안료에 대한 비용 절감 효과등을 유도 할 수 있다. 역시 기술적인 측면에서도 특수소재 개발에 있어 최적의 나노 입자 제어기술 개발 및 나노입자를 기능성 소재로 사용하여 새로운 제품의 제조와 고압 기상