• 한국정밀공학회지
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• 제25권6호
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• Tribology and Lubricants
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• 제39권1호
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• pp.28-34
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• 2023

Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

• 연구논문집
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• 통권23호
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• pp.5-13
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• 1993

The present work deals with the theoretical prediction of static & dynamic characteristic of annular type externally pressurized thrust air bearings with metal-sintered porous media. For the evaluation of surface loading effect by machining, it is assumed that the flow at the porous surface is dominant and which is equivalent to the flow through orifice. Finite different method with over-relaxation method is used to solve the numerical problems. The influences of radius ratio, supply pressure and squeeze number on performances are investigated, as the results. The results of this study can be used to predict the optimal running condition and stable realm of porous bearings.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.201-202
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• 2007

• Tribology and Lubricants
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• 제22권2호
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• pp.93-98
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• 2006

The numerical analysis of the negative pressure porous gas bearings is presented. The pressure distribution is calculated using the finite difference method. The Reynolds equation and Darcy's equation are solved simultaneously. The air bearing stiffness and damping are evaluated using the perturbation method. Rectangular uniform grid is employed to model the bearing. The vacuum preloading is considered. The pressure in the vacuum pocket is assumed to be a constant negative pressure. The total load, stiffness, damping and flow rate are calculated fur several geometrical configurations and several values of negative pressure. It is found that too large vacuum pocket can result in negative total force.

• 대한기계학회논문집
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• 제12권4호
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• pp.721-729
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• 1988

본 연구에서는 직진테이블 시작품을 통해 주위환경에 의한 영향 중 주위온도 에 따른 움직임 정밀 정확도의 변화 및 지지조건이 움직임 정밀.정확도에 미치는 영향 에 대해 실험 연구하였다.