• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.185-190
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• 2007

In recent days, vibration isolation system is mostly required in precise measurement and manufacturing system to reduce vibration due to external disturbances and internal actuators. Among all the vibration isolation systems, air spring is widely used because of its low resonant frequency and high damping ratio. In this study, we first analyze the passive air-spring system using leveling valve, and then design the active vibration isolation system. Because the non-linearity of pneumatic characteristics, we try to design the fuzzy controller which is better than PID controller at complex and non-linear system, and then compare them both in experiment and simulation.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.731-736
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• 2007

Vibration isolation equipments are mostly required in precise measurement and manufacturing system. Among all the vibration isolation system, air-spring is the most widely used equipment because of low resonant frequency and high damping ratio. In this study, Takagi-Sugeno fuzzy method is used to design an active vibration isolation system using air-spring, and compared the fuzzy method with passive control method and PID control method. Due to the non-linearity characteristics of air-spring, fuzzy controller was verified to be the most effective both in simulation and experiment.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.132-138
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• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공, 측정 등이 필요함에 따라, 외란과 내부 진동을 차단하는 방진 시스템에 대한 연구가 활성화 되고 있다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 기존의 레벨링밸브를 이용한 수동 방진 시스템을 분석하여 이를 개선하고 디스플레이장비용 능동 방진 시스템을 설계하였다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.29-33
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• 2007

최근의 반도체/display 관련 생산장비 및 검사장비들이 대형화/고속화 되어감에 따라 과거 stepping 방식에서 scanning 방식으로 전환된 장비들이 공정 상에 발생하는 과도응답 형태의 진동으로 인하여 제품 수율의 저하와 생산 효율의 감소를 가져오고 있다. 이러한 과도응답의 진동은 장비 자체의 가진력으로부터 발생하므로 건물 구조의 동강성 증대 방안이나 고효율의 방진 시스템 적용으로는 한계를 가지고 있다. 본 논문에서는 smart 재료인 MR유체를 이용한 MR damper를 이용하여 방진효율을 유지하면서 과도응답의 진동을 제어하기 위한 반 능동제어 방식의 방진/제진 시스템을 구성하였으며, 시스템 해석과 제어 시스템의 구성을 위하여 6자유도 강체 진동에 대한 운동방정식을 고려하였다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.11
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• pp.1347-1352
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• 2009

Magnetic force driven six degree-of-freedom active vibration isolation system is developed. The velocity sensor using an electromagnetic principle that is commonly used in the vibration control is investigated since its phase lead characteristic causes an instability problem for a low frequency vibration. A lag-type compensator is adopted to reduce the phase lead and the stability test is performed by using a Bode analysis. The performance of the AVIS is validated by comparing with the passive isolation system by using the frequency responses.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.12
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• pp.1128-1138
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• 2010

One of the typical problems in the precise vibration is resonance characteristics at low frequency disturbance due to a heavy mass. An electro-magnetic(EM) air spring is a kind of vibration control unit and active isolator. The EM air spring in this study aims at removing the low frequency resonance for semiconductor manufacturing. The mechanical and electronic parts in the active isolator are designed to operate under a weight of 2.5 tons. The EM spring is floated using air pressure in a pneumatic elastic chamber and actuated by EM levitation force. The actuator consists of a EM coil and a permanent magnetic plate which are installed inside of the chamber. An air mount was constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, and a multi-channel power amp. A PD control method and operating logic was applied to the DSP. Simulation using 1/4 model was carried out and compared with the experiments. The time duration and maximum peak at resonance frequency can be reduced sharply by the proposed system. The results show that the active system can avoid the resonance caused by the natural frequency of the passive system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.309-310
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• 2008

• Journal of the Korean Institute of Intelligent Systems
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• v.17 no.5
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• pp.701-706
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• 2007

Recently, a number of researches about linear magnetorheological(MR) damper using valve-mode characteristics of MR fluid have sufficiently undertaken, but researches about rotary MR damper using shear-mode characteristics of MR fluid are not enough. In this paper, we performed vibration control of shear-mode MR damper for unlimited rotating actuator of mobile robot. Also fuzzy logic based vibration control for shear-mode MR damper is suggested. The parameters, like scaling factor of input/output and center of the triangular membership functions associated with the different linguistic variables, are tuned by genetic algorithm. Simulation results demonstrate the effectiveness of the fuzzy-skyhook controller for vibration control of shear-mode MR damper under impact force.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.1
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• pp.25-31
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• 2009

The anti-vibration tables that use air suspensions as dampers have been widely used due to their high anti-vibration performance in wide frequency band. However, they face a problem of easily accelerating the vibration when triggered by external force because their air suspensions have low rigidity and dampness. In response, there has been a study on active/semi-active dampers that use only the passive components like air suspensions to complement the passive-control format. Thus, we have dynamically analyzed the active/semi-active control of such passive anti-vibration tables. To demonstrate the anti-vibration table's control system, we have also constructed a kinetic model based on the physical characteristics of an anti-vibration table with 6 degrees of freedom and verified its applicability through analysis and experiments.