• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1992년도 춘계학술대회 논문집
• /
• pp.335-340
• /
• 1992

유압 시스템(System)은 원동기의 기계적 에너지를 유압펌프가 작동유를 압력 에너지의 형태로변환 시켜 이것을 유합 실린더(Cylinder)등의 엑츄에이터(Actuator)가 다시 기계적 에너지로 변환시켜 부하 를 구동하게한다. 상용차(NT-1, KH 등)용 파워스티어링(Power Steering)에 장착되는 Vane Type Oil Pump (이하 VOP)가 바로 이와같은 역할을 담당하고 있다. 본 연구에서는 VOP의 성능과 관련되어지는 주요 제원(Parameter)인 미끄럼부에서의 틈새, 작동유점도, 압력변화, 회전수 등을 다양하게 변화시키는 모의실험(Simulation)을 통하여각각의 조건하에서얻어지는 누설 유량과 체적효율을 수치적 으로 예측하고 이것을 주요제원을 고려하여 해석해서 정량적인 값을 얻는 것을 목적으로한다.

• 센서학회지
• /
• 제6권1호
• /
• pp.72-80
• /
• 1997

실리콘 공정을 이용하여 마이크로 밸브(valve)를 제작할 때에 역방향 누설 유량은 중요한 문제중 하나이다. 본 논문에서는 플래퍼(flapper)와 노즐(nozzle)을 이용하여 누설 유량이 없는 마이크로 밸브를 설계하고, 실리콘 공정을 이용하여 제작하였다. 제작된 마이크로 밸브의 작동원리는 정방향 압력이 가해질 때에는 유체의 압력이 플래퍼를 위로 밀어서 유체를 흐르게 하고, 역방향 압력이 가해질 때에는 플래퍼를 밀지만 이때는 노즐의 입구에 의해 지지되므로 플래퍼나 노즐이 깨지지 않는 한 유체가 흐를 수 없게 된다. 노즐은 (100) 웨이퍼를 습식식각하여 제작하였고, 플래퍼는 역형상을 $20{\mu}m$만큼 플라즈마 식각장비(RIE)로 수직 식각한 뒤 뒷면에서부터 습식식각을 하여 제작하였다. 제작된 마이크로 플래퍼-노즐 밸브의 정적특성을 해석하였고, 순수를 사용한 실험결과와 비교하였다. 실험결과는 제작된 마이크로 플래퍼-노즐 밸브가 완전한 다이오드적인 특성을 가진다는 것을 보여 주었다.

• 유체기계공업학회:학술대회논문집
• /
• 유체기계공업학회 2003년도 유체기계 연구개발 발표회 논문집
• /
• pp.143-148
• /
• 2003

This study was experimentally performed in order to estimate the errors due to the leakage of transmitter gaugelines in the orifice flow meter for natural gas. It would be a serious problem in safety if a large quantity of leak was occurred at the tubes or fittings like valve. But in most cases the safety problems might be rarely happened because the gas leak detectors could be operated in advance and the various kinds of inspection would be also fulfilled periodically. If the leakage was occurred continuously with an undetectable amount at the gaugelines for measuring the pressure or the differential pressure(DP), the amount of leakage might be an error or an unaccounted flow(UAE). In addition if the measuring value of pressure or DP were affected by the leakage, it might also be a measurement error. The experiments were performed to estimate the amount of leakage and to check the DP changes if it exited. First, through the measurement of the air pressure changes in the airtight container connected to a transmitter with gaugelines as the time passed, the amount of leakage causing from the fittings of gaugelines was roughly estimated. As changing the leak position of the gaugeline, the leak was intentionally made to break out. The variance of DP was checked as controlling the extent of leakage and compared to no leak conditions. Consequently, under the normal maintenance conditions, the result represented that the amount of leakage causing from the gaugelines was insignificant and also the DP changes on leakage conditions were too small to cause the errors of measurements.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2004년도 추계학술대회
• /
• pp.1383-1388
• /
• 2004

The flow characteristics in the blade passage of a low speed axial flow fan have been investigated by experimental analysis using a rotating hot-wire sensor for design and off-design operating conditions. The results show that the tip leakage vortex is moved upstream when flow rate is decreased, thus disturbing the formation of wake flow near the rotor tip. The tip leakage vortex interfaces with blade pressure surface, and results in high velocity fluctuation near the pressure surface. From the relative velocity distributions near the rotor tip, large axial velocity decay is observed at near stall condition, which results in large blockage compared to that at the design condition. Througout the flow measurements using a quasi-orthogonal measuring points to the tip leakage vortex, it is noted that the radial position of the tip leakage vortex is distributed between 94 and 96 percent span for all flow conditions. High spectrum density due to the large fluctuation of the tip leakage vortex is observed near the blade suction surface below the frequency of 1000 Hz at near stall condition.

• 에너지공학
• /
• 제21권4호
• /
• pp.398-401
• /
• 2012

본 연구에서는 자동차용 엔진 폐열 회수 유기랭킨사이클에 적용하기 위해 개발 중인 스크롤 팽창기의 효율을 상용 스크롤 팽창기와 비교 분석을 수행하였다. 팽창기 효율 특성 시험을 위해 유기랭킨사이클을 운전하면서 팽창기 출력, 팽창기 입구 온도, 압력 및 작동유체(냉매 R134a)의 유량을 측정하였으며, 개발 중인 스크롤 팽창기의 전효율은 상용 스크롤 팽창기의 전효율에 비해 매우 낮은 수준을 나타내었다. 특히 팽창기 내부의 작동유체 누설에 의한 체적효율 저하가 전효율 저하에 큰 영향을 주는 것으로 파악되었기 때문에 향후 팽창기 효율 향상을 위해 팽창기 내부의 누설문제를 필히 해결해야할 것으로 분석되었다.

• 대한기계학회논문집B
• /
• 제28권2호
• /
• pp.181-188
• /
• 2004

The frequency characteristics in an axial flow fan operating at a design and three off-design operating conditions have been investigated by measuring the velocity fluctuation of a tip leakage vortex and a wake flow. Two hot-wire probe sensors rotating with the fan rotor. a fixed and a moving ones, were introduced to obtain a cross-correlation coefficient between two sensors as well as the fluctuating velocity. The results show that the spectral peaks due to the fluctuating velocity near the rotor tip are mainly observed in the reverse flow region of higher flow rates than those in the peak pressure operating condition. However, no peak frequency presents near the rotor tip for near stall condition. Detailed wake flow just downstream of the rotor blade was also measured by the rotating hot-wire sensor. The peak frequency of a high velocity fluctuation due to Karman vortex shedding in the wake region is mainly observed at the higher flow rate condition than that in the design point.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
• /
• pp.105-105
• /
• 1999

차세대 기억소자에서는 집접도의 증가, 고속화, 그리고 미세화에 따라 배선간으 최소선폭이 작아지고, 새로운 다층 배선기술이 요구되는 가운데 층간절연막의 재료와 형성기술은 소자의 특성을 향상시켜주는 중요한 요소로서 열적안정성, 저유전율, 평탄화특성 등에 핵심을 두고 연구되고 있다. 본 연구에서는 5인치 p-Si(100) 위에 FTES와 O2를 precursor로 하고 carrier gas를 Ar gas하여 ICP CVD 방법으로 저유전율의 Fluorocarbonated-SiO2 박막을 형성하였다. 0.1-1kW, 13.56MHz인 rf power를 사용하였으며, 증착은 RT에서 5~10분으로 하였다. 형성된 박막은 FTIR(fourier transform infrared), XPS(x-ray photoelectron spectroscopy), 그리고 ellipsopsometer 등을 이용하여 결합모드와 F농도, 균일도 등을 측정하고, I-V와 C-V 측정장치, 그리고 SERM(scanning electrion microscopy) 등을 이용하여 유전상수, 누설전류, dielectric breakdown voltage, 그리고 박막의 stepcoverage를 측정하였다. 제작된 박막의 신뢰성은 열처리에 따른 전기적 특성으로부터 조사하였다. 형성된 fluorocarbonated 박막 결합모드는 Si-F, Si-O, O-C, C-C와 C-F였고 O2:FTES:Ar 유량을 1sccm:10sccm:6sccm으로 하여 증착한 시료에서 유전율은 2.8이었으며, 누설전류밀도는 8$\times$10-9A/cm2, Breakdown voltage는 10MV/cm 이상, 그리고 stepcoverage는 91%로 측정되었다.

• 유공압시스템학회논문집
• /
• 제4권3호
• /
• pp.1-6
• /
• 2007

The leakage generated from the clearance between the cylinder bore and the piston is one of the most serious problems in the hydraulic piston pump, and it even results in terrible decrease of the volume efficiency at a great velocity and high pressure. In this paper, the lubrication characteristic of the hydrostatic slipper bearing equipped in the hydraulic piston pump has been worked out by experimentation with three model bearings of different shape. Preparatory to this, not only the three models of piston-slipper were designed, but the corresponding experimental apparatus were also manufactured. As a result, it was verified that, according to the supply pressure, the hydrostatic bearing part of the slipper is severely affected by the pocket pressure, land pressure, oil film thickness, and leakage flow.

• 대한기계학회논문집B
• /
• 제29권3호
• /
• pp.322-329
• /
• 2005

The flow characteristics in the blade passage and in the wake region of a low speed axial flow fan have been investigated by experimental analysis using a rotating hot-wire sensor for design and off-design operating conditions. The results show that the tip leakage vortex is moved upstream when flow rate is decreased, thus disturbing the formation of wake flow near the rotor tip. The tip leakage vortex interfaces with blade pressure surface, and results in high velocity fluctuation near the pressure surface. From axial velocity distributions downstream of the fan rotor, large axial velocity decay near the rotor tip is observed at near stall condition, which results in large blockage compared to that at the design condition. Although the wake flow downstream of the rotor blade is clearly measured at all operating conditions, the trough of the high velocity fluctuation due to Karmann vortex street in the wake flow is mainly observed at a higher flow condition than the design flow rate.

• 유공압시스템학회논문집
• /
• 제1권2호
• /
• pp.8-14
• /
• 2004

Abstract: In the oil hydraulic piston pumps the clearance between the valve plate and cylinder block plays an important role for volumetric and overall efficiency. Thus, adequate lubricational fluid film is needed for the interface. In this study, fluid film thickness is measured by a gap sensor and a slip ring under operational conditions to observe the behavior of the lubrication mechanism in detail. To investigate the effect according to the valve plate types in view of the fluid film, three different types were designed. Leakage flow rate and shaft torque were also measured to clarify the effect according to the valve plate types. A broad range of experiments were conducted to provide reasonable data on the effect of fluid film. In this experiments two main parameters were found, of which the one is the discharge pressure and the other is valve plate geometry. As a result, we found that the spherical valve plate could get more stable fluid film thickness, maintain good efficiency for high pressure range than the other types.