• Proceedings of the Korean Society for Rock Mechanics Conference
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• 1994.03a
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• pp.38-51
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• 1994

지하원유비축 기지 저장공동의 원유 유출이나 기화누설을 방지하기 위하여 지하수압을 조절하는 수벽공의 운영이나 공동주위 암반의 그라우팅 공법 설계에 있어서는 공동의 굴착으로 인한 주위 암반의 변형에 따른 투수계수의 변화와 지하수위의 변화에 대한 해석이 대단히 중요하다. 본 연구에서는 순간증압법을 이용한 삼축압축하의 암석의 투수계수 측정을 통하여 변형율과 투수계수와의 관계함수식을 구하였다. (중략)

• Journal of the Korean Vacuum Society
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• v.4 no.3
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• pp.231-237
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• 1995

알루미늄 합금 진공챔버를 제작할 때 따르는 기밀 기술을 용접과 플랜지 이음 측면에서 해설하였다. 알루미늄 합금 재료 특성의 유리한 점 때문에 진공챔버로서의 그 사용이 증가하고 있으나, 챔버나 부품들을 제작할 때에 용접과 플랜지 이음에 상대적인 어려움이 있다. 진공 용접은 주로 TIG용접이며, 용접시에 가상누설을 최소화 하고 균열 방지를 위한 용접설계와 시공조건을 고려하는 것이 중요하다. 플랜지 이음에서는 알루미늄 콘플랫형과 금속오링을 사용하는 플랜지에 대하여 소개하였다. 이러한 기술은 앞으로 핵융합장치, 플라즈마 실험장치, 반도체 제조장비, 일반 초고진공장치에 응용될 것이다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.106-106
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• 2003

반도체 소자의 고집적화에 따라 채널길이와 배선선 폭은 점차 줄어들고, 이에 따라 단채널효과, 소스/드레인에서의 기생저항 증가 및 게이트에서의 RC 시간지연 증가 등의 문제가 야기되었다. 이를 해결하기 위하여 자기정렬 실리사이드화(SADS) 공정을 통해 TiSi2, CoSi2 같은 금속 실리사이드를 접촉 및 게이트 전극으로 사용하려는 노력이 진행되고 있다. 그런데 TiSi2는 면저항의 선폭의존성 때문에, 그리고 CoSi2는 실리사이드 형성시 과도한 Si소모로 인해 차세대 MOSFET소자에 적용하기에는 한계가 있다. 반면, NiSi는 이러한 문제점을 나타내지 않고 저온 공정이 가능한 재료이다. 그러나, NiSi는 실리사이드 형성시 NiSi/Si 계면의 산화와 거침성(roughness) 때문에 높은 누설 전류와 면저항값, 그리고 열적 불안정성을 나타낸다. 한편, 초고집적 소자의 배선재료로는 비저항이 낮고 electro- 및 stress-migration에 대한 저항성이 높은 Cu가 사용될 전망이다. 그러나, Cu는 Si, SiO2, 실리사이드로 확산·반응하여 소자의 열적, 전기적, 기계적 특성을 저하시킨다. 따라서 Cu를 배선재료로 사용하기 위해서는 확산방지막이 필요하며, 확산방지재료로는 Ti, TiN, Ta, TaN 등이 많이 연구되고 있다.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.2188-2189
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• 2011

최근 직류철도에서는 누설전류로 인한 철도 자체 시설물 및 인근 지하매설물의 전식 피해 문제가 대두되고 있다. 본 논문에서는 전식에 대한 이론과 기존의 전식방지 대책인 선택배류법에 대해 제시하고, 배류기가 적용된 직류철도시스템을 모델링하였다. 시뮬레이션을 통해 배류법적용에 대한 유용성에 대해 연구하였다.

• Tribology and Lubricants
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• v.26 no.6
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• pp.322-328
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• 2010

An inter-propellant seal (IPS) for 75 ton class thrust turbopump was tested. Leakage characteristics were presented with a given range of pressure difference under cryogenic as well as room temperature conditions. For cryogenic tests, liquid nitrogen was used as analogic fluid of liquid oxygen (LOX) while water was used instead of kerosene for room temperature condition. Test results showed that IPS had satisfactory leakage performance. Additionally endurance test was conducted to prove the life time of manufactured IPS and the tested IPS had successfully survived during required life time, 2100 seconds.

• Journal of the Korean Vacuum Society
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• v.10 no.2
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• pp.189-193
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• 2001

We have characterized physical and electrical properties of W-TiN stacked gate electrode structure with TiN as a diffusion barrier of fluorine. As the $N_2/Ar$ gas ratio increased during sputter deposition, TiN thin films became N-rich, and the resistivity of the films increased. However, the resistivity of W-TiN stacked gate reduced as a result of the crystallization of tungsten with the increase of $N_2/Ar$ gas ratio. On the other hand, tungsten in W-TiN stacked gate structure have the (100)-oriented crystalline structure although TiN films were subjected to annealing at high temperature (600~$800^{\circ}C$). Leakage currents of W-TiN gate MOS capacitors were less than $10^{-7}\textrm{/Acm}^2$ and also were lowered by the order of 2 compared with those of pure W gate electrode.

• Fire Science and Engineering
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• v.27 no.1
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• pp.26-30
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• 2013

It is necessary to use pressure reducing valves to provide required water pressure in water-based fire suppression systems of the tall buildings. In many cases, however, pressure reducing valves lose their function due to the phenomenon of pressure equalization caused by valve leak. This study carried out performance evaluation of the recently developed pressure reducing valve to prevent pressure equalization and found it can maintain designed pressure reducing ratio within 11% variation and prevent pressure equalization by automatic self-lock function of the piston.

• Journal of the Microelectronics and Packaging Society
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• v.7 no.3
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• pp.27-29
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• 2000

For the DLC-coaled Si-tip FEA, the modified lift off-process, by which DLC coated on both gate electrode surface and gate insulator in the gate aperture could be removed, was proposed. In the process, the Al sacrificial layer was deposited on a tilted and rotated substrate by an e-beam evaporation, and DLC film was coated on the substrate by PA-CVD method. Afterward the DLC was perfectly removed except the DLC films coated on emitter tips by etch-out of Al sacrificial layer. Current-voltage curves and current fluctuation of the DLC-coated Si-tip FEA showed that the proposed lift-off process played an important role in decreasing gate leakage current and stabilizing omission current.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.15 no.2
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• pp.419-424
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• 2011

The system-on-board detectable and controllable the electrical fires due to ground fault(GF), arc fault and overload is implemented. The system IC for controlling and preventing the electrical fires is available to this system. The GF detection circuit for detecting the electrical leakage current, the arc fault detection circuit and the overload detection circuit controllable the input voltage for flowing the overload current are designed. The GF detection circuit and the arc fault detection circuit are good operated to the electrical leakage current and the arc signal, respectively. It is confirmed that the overload detection circuit has shown no erratic operation with the noise or the load variation and is only operated at the overload condition.

• The Journal of the Acoustical Society of Korea
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• v.43 no.4
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• pp.414-421
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• 2024

In this paper, we design and verify a system that can detect piping leakage noise in an environment with significant reverberation and reflection using a multi-channel acoustic sensor module as a technology to prevent major plant accidents caused by leakage. Four-channel microphones arranged in a tetrahedron are designed as a single sensor module to measure three-dimensional sound intensity vectors. In an environment with large effects of reverberation and reflection, the measurement error of each sensor module increases on average, so after placing multiple sensor modules in the field, measurement results showing locations with large errors due to effects such as reflection are excluded. Using the intersection between three-dimensional vectors obtained from several pairs of sensor modules, the coordinates where the sound source is located are estimated, and outliers (e.g., positions estimated to be outside the site, positions estimated to be far from the average position) are detected and excluded among the points. For achieving aforementioned goal, an excluding algorithm by deciding the outliers among the estimated positions was proposed. By visualizing the estimated location coordinates of the leakage sound on the site drawing within 1 second, we construct and verify a system that can detect the location of the leakage sound in real time and enable immediate response. This study is expected to contribute to improving accident response capabilities and ensuring safety in large plants.