• Title/Summary/Keyword: 내부반경

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A Study on Characterization of Surface and Pore for Ag-impregnated Activated Carbon (은이 침착된 활성탄의 표면과 세공특성에 관한 연구)

  • Kim, Jong-Gyu;Oh, Won-Chun;Kim, Myoung-Kun
    • Applied Chemistry for Engineering
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    • v.9 no.5
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    • pp.729-733
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    • 1998
  • The surface structure and the pore size distribution of the activated carbon impregnated with silver have been investigated. It has been confirmed that the impregnants had an effect only on the external surface, not on the internal surface and that adsorption isotherms of both impregnated and non-impregnated activated carbons were classified as a typical BET type-I. As the amount of the impregnants increased, the amounts of adsorption, the specific surface area, and the micropore volume decreased and the window blocking was observed. The average pore diameter of the activated carbon impregnated with silver was observed to show the constant values regardless of the amount of the impregnants.

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Internal Flow Analysis of Urea-SCR System for Passenger Cars Considering Actual Driving Conditions (운전 조건을 고려한 승용차용 요소첨가 선택적 촉매환원장치의 내부 유동 해석에 관한 연구)

  • Moon, Seong Joon;Jo, Nak Won;Oh, Se Doo;Lee, Ho Kil;Park, Kyoung Woo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.3
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    • pp.127-138
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    • 2016
  • Diesel vehicles should be equipped with urea-selective catalytic reduction(SCR) system as a high-performance catalyst, in order to reduce harmful nitrogen oxide emissions. In this study, a three-dimensional Eulerian-Lagrangian CFD analysis was used to numerically predict the multiphase flow characteristics of the urea-SCR system, coupled with the chemical reactions of the system's transport phenomena. Then, the numerical spray structure was modified by comparing the results with the measured values from spray visualization, such as the injection velocity, penentration length, spray radius, and sauter mean diameter. In addition, the analysis results were verified by comparison with the removal efficiency of the nitrogen oxide emissions during engine and chassis tests, resulting in accuracy of the relative error of less than 5%. Finally, a verified CFD analysis was used to calculate the interanl flow of the urea-SCR system, thereby analyzing the characteristics of pressure drop and velocity increase, and predicting the uniformity index and overdistribution positions of ammonia.

The effects of solenoid magnet on plasma extraction in Filtered Vacuum Arc Source (FVAS) (자장여과 아크 소스에서 각 전자석이 플라즈마 인출에 미치는 영향)

  • 김종국;변응선;이구현;조영상
    • Journal of the Korean Vacuum Society
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    • v.10 no.4
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    • pp.431-439
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    • 2001
  • In this paper, the a-Diamond films were synthesized using filtered vacuum arc source (FVAS), FVAS was composed of a torus structure with bending angle of 60 degree. The radius of torus was 266 mm, the radius of plasma duct was 80 mm and the total length was 600 mm. The magnet parts were composed of one permanent magnet and five solenoid magnets. The plasma duct was electrically isolated from the ground so that a bias voltage could be applied. The baffles inside plasma duct were installed in order to prevent the recoil effect of macro-particles. Cathode was made of graphite with 80 mm in diameter. The effects of solenoid magnet on plasma extraction were investigated by computer simulation and experiment using Taguchi's methode. The source and extraction magnet affected the arc stabilization. The extraction beam current was maximized with low value of the source magnet current and high value of the filtering magnet current. The beam current density was 3.2 mA/$\textrm{cm}^2$ and average deposition rate was 5 $\AA$/sec when the currents of arc discharge, source, extraction, bending, deflection and outlet magnet were 30 A, 1 A, 3 A, 5 A, 5 A, and 5 A, respectively. The beam current density and the efficiency of beam transportation were increased with the positive bias voltage of the plasma duct.

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Effect of buoyancy and thermocapillarity on the melt motion and mass transfer for different aspect ratio of flow field in magnetic Czochralski crystal growth of silicon (Cusp 자장이 걸려있는 초크랄스키 실리콘 단결정성장에서 유동장의 종횡비에 따라 부력과 열모세관 현상이 용융물질의 유동과 물질전달에 미치는 영향)

  • 김창녕
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.10 no.3
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    • pp.177-184
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    • 2000
  • The effect of the buyancy and thermocapillarity for differnent aspect ratio of flow field on melt motion and mass transfer has been numerically investigated in magnetic Czochralski crystal growth of silicon. During the process of crystal growth, the melt depth of crucible reduces so the aspect ratio of flow field also reduces. Therefore the shape of magnetic field of the flow field changes and the flow pattern also changes significantly. Together with the melt flow which forms the Marangoni convection (or thermocapillary flow) that comes from the inside the flow field, a flow circulation is observed near the corner close both to the crucible wall and the free surface. Due to this circulation, buoyancy effect has been turned out to be local rather than global. As the aspect ratio decreases, the radial component of the magnetic field prevails compared with the axial component in the flow field. Under the influence of this magnetic field, the melt flow and the temperature distribution in a meridional plane tend to depend on the radial position. As the aspect ratio decreases, the temperature gradient near the edge of the crystal decreases yielding smaller thermocapillarity, and the oxygen concentration near the crystal and the oxygen incorporation rate also decrease.

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Self-forming Barrier Process Using Cu Alloy for Cu Interconnect

  • Mun, Dae-Yong;Han, Dong-Seok;Park, Jong-Wan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.189-190
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    • 2011
  • Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance (RC) delay나 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 SiO2와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 SiO2 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200 도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 SiO2와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장 했다. 이는 V의 oxide formation nergyrk Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, V+5 이온 반경이 Mn+2 이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

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Self-formation of Diffusion Barrier at the Interface between Cu-V Alloy and $SiO_2$

  • Mun, Dae-Yong;Park, Jae-Hyeong;Han, Dong-Seok;Gang, Yu-Jin;Seo, Jin-Gyo;Yun, Don-Gyu;Sin, So-Ra;Park, Jong-Wan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.256-256
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    • 2012
  • Cu가 기존 배선물질인 Al을 대체함에 따라 resistance-capacitance delay와 electromigration (EM) 등의 문제들이 어느 정도 해결되었다. 그러나 지속적인 배선 폭의 감소로 배선의 저항 증가, EM 현상 강화 그리고 stability 악화 등의 문제가 지속적으로 야기되고 있다. 이를 해결하기 위한 방법으로 Cu alloy seed layer를 이용한 barrier 자가형성 공정에 대한 연구를 진행하였다. 이 공정은 Cu 합금을 seed layer로 사용하여 도금을 한 후 열처리를 통해 $SiO_2$와의 계면에서 barrier를 자가 형성시키는 공정이다. 이 공정은 매우 균일하고 얇은 barrier를 형성할 수 있고 별도의 barrier와 glue layer를 형성하지 않아 seed layer를 위한 공간을 추가로 확보할 수 있는 장점을 가지고 있다. 또한, via bottom에 barrier가 형성되지 않아 배선 전체 저항을 급격히 낮출 수 있다. 합금 물질로는 초기 Al이나 Mg에 대한 연구가 진행되었으나, 낮은 oxide formation energy로 인해 SiO2에 과도한 손상을 주는 문제점이 제기되었다. 최근 Mn을 합금 물질로 사용한 안정적인 barrier 형성 공정이 보고 되고 있다. 하지만, barrier 형성을 하기 위해 300도 이상의 열처리 온도가 필요하고 열처리 시간 또한 긴 단점이 있다. 본 실험에서는 co-sputtering system을 사용하여 Cu-V 합금을 형성하였고, barrier를 자가 형성을 위해 300도에서 500도까지 열처리 온도를 변화시키며 1시간 동안 열처리를 실시하였다. Cu-V 공정 조건 확립을 위해 AFM, XRD, 4-point probe system을 이용하여 표면 거칠기, 결정성과 비저항을 평가하였다. Cu-V 박막 내 V의 함량은 V target의 plasma power density를 변화시켜 조절 하였으며 XPS를 통해 분석하였다. 열처리 후 시편의 단면을 TEM으로 분석하여 Cu-V 박막과 $SiO_2$ 사이에 interlayer가 형성된 것을 확인 하였으며 EDS를 이용한 element mapping을 통해 Cu-V 내 V의 거동과 interlayer의 성분을 확인하였다. PVD Cu-V 박막은 기판 온도에 큰 영향을 받았고, 200도 이상에서는 Cu의 높은 표면에너지에 의한 agglomeration 현상으로 거친 표면을 가지는 박막이 형성되었다. 7.61 at.%의 V함량을 가지는 Cu-V 박막을 300도에서 1시간 열처리 한 결과 4.5 nm의 V based oxide interlayer가 형성된 것을 확인하였다. 열처리에 의해 Cu-V 박막 내 V은 $SiO_2$와의 계면과 박막 표면으로 확산하며 oxide를 형성했으며 Cu-V 박막 내 V 함량은 줄어들었다. 300, 400, 500도에서 열처리 한 결과 동일 조성과 열처리 온도에서 Cu-Mn에 의해 형성된 interlayer의 두께 보다 두껍게 성장했다. 이는 V의 oxide formation energy가 Mn 보다 작으므로 SiO2와의 계면에서 산화막 형성이 쉽기 때문으로 판단된다. 또한, $V^{+5}$이온 반경이 $Mn^{+2}$이온 반경보다 작아 oxide 내부에서 확산이 용이하며 oxide 박막 내에 여기되는 전기장이 더 큰 산화수를 가지는 V의 경우 더 크기 때문으로 판단된다.

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Numerical Investigation of Flow Structures near Various Nozzle Exit Geometries of the Air Bearing (공기베어링의 노즐 형상 변화에 따른 출구면 근방의 유동구조에 대한 수치해석)

  • Park, Byung Ho;Han, Yong Oun;Park, Sang-Shin
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.38 no.3
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    • pp.235-242
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    • 2014
  • To investigate pressure distributions on the shaft surface of the air bearing, the commercial CFD software was employed to study three different nozzle geometries to improve the nozzle performance: general drill-shaped, matched cube-shaped and trimmed exit nozzles. Under the influence of stagnation point, the maximum pressure was observed at the center of shaft surface for all cases. Owing to the blocking effect of a fine gap between the shaft surface and the nozzle exit, the drill-shaped nozzle has the rapid local pressure increase near the nozzle exit corner, generating the ring vortex in the radial direction within pressure ratio of 6.92, and its pressure becomes negative in a certain range of downstream. In comparison, the contoured nozzle showed a local pressure increase in the measured range of pressure ratios, but a negative pressure appeared within the pressure ratio of about 10. The trimmed nozzle was seemed to extend the high pressure zone near the stagnation point in the radial direction substantially, and no negative pressure was appeared in the whole range. Based on these observations, it is found that trimming nozzle exit becomes more effective for improving the performance than modifying the nozzle inside contour.

Chemical Effects of Nuclear Transformations in Metal Salts (金屬鹽의 原子核變換의 化學的 效果)

  • Byung Hun Lee;Jong Du Lee
    • Journal of the Korean Chemical Society
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    • v.19 no.5
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    • pp.331-338
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    • 1975
  • The distribution of $^{51}Cr\;and\;^{128}I$ recoil species following radiative-neutron capture in chromates, dichromates, iodates and periodates has been investigated by using paper-electrophoresis. In view of the effective recoil energy and the effect of the internal conversion, it is unlikely that an atom which has captured a neutron can remain bound in its original molecule. It is also unlikely that the energy of the recoil atom is dissipated in heating a small region of the crystal. However, the results of paper-electrophoresis separation of recoil $^{51}Cr\;and\;^{128}I$ indicated that many more of the recoil atoms were bound in the parent molecule. The disorder model for the reaction was proposed from observations of retention. In considering cations, the greater their radii, the higher is the probability of the recoil atom breaking through the secondary cage. In ammonium salt, the ammonium ion behaved as a reducing agent in the disorder zone and resulted in low retention. Crystal structures with their greater free space have shown low retention.

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Mechanism of Omni-directional Personal Mobility Vehicle with Diagonal Driving (대각선 주행이 가능한 전방향 개인용 이동수단용 메커니즘)

  • Park, Su-san;Im, Dea-Yeong;Cha, Hyun-Rok;Ryoo, Young-Jae
    • Journal of the Korean Institute of Intelligent Systems
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    • v.26 no.2
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    • pp.153-159
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    • 2016
  • In this paper, a mechanism of an omni-directional personal mobility which can drive diagonally is proposed. Mobility is a prerequisite involved in basic human life and activities. Personal mobility vehicle is a new mobility method which overcome the limits of automobiles. However, personal mobilities with four wheeled structure still have limitations. The proposed personal mobility vehicle can overcome the limitations of mobility because its rear wheels can be steered omni-directionally. In addition, the handicapped can drive it through a narrow road such as an alleyway or corridor and avoid obstacles on the traveling route. The proposed mechanism of personal mobility and the steering performance are tested by experiments, and the feasibility of diagonal driving is verified.

Behavior of Polymerization Shrinkage Stress of Methacrylate-based Composite and Silorane-based Composite during Dental Restoration (Methacrylate 기질 복합레진과 Silorane 기질 복합레진의 치아 수복 시 중합수축응력거동)

  • Park, Jung-Hoon;Choi, Nak-Sam
    • Composites Research
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    • v.28 no.1
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    • pp.6-14
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    • 2015
  • Polymerization shrinkage stress analysis of dimethacrylate-based composite (Clearfil AP-X, Kuraray) and silorane-based composite (Filtek P90, 3M ESPE) used for dental composite restorations was performed using strain-gage measurement and FEM analysis. A theoretical equation based on Young's modulus and polymerization shrinkage of the composite resin was proposed to predict the polymerization shrinkage stress. Experimental results showed that the maximum shrinkage stress of Clearfil AP-X was about 2.8 times higher than Filtek P90. FEM analysis agreed with such experimental stress behaviours and showed that the maximum Von-Mises stress appeared near the margin of the filled resin adhered with PMMA ring. The stress concentration at the interface on the specimen surface was higher than that in the interior. The maximum error of shrinkage stress by the theoretical equation was reasonable within 5% in comparison to FEM results under plane stress.