Modification of GaN surface into hydrophilic property for nano-sphere lithography (나노-스피어 리소그라피를 위한 질화갈륨 표면 친수성 개질)
-
- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
- /
- 2009.06a
- /
- pp.334-334
- /
- 2009