• Title/Summary/Keyword: 나노 위치결정 시스템

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컴플라이언스 기구를 이용한 다축 나노 위치결정 시스템의 개발 : PART 1 설계 및 해석

  • 박성령;양승한
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.137-137
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    • 2004
  • 최근, 나노 위치결정 시스템이 우주항공, 광통신, 의학 등 많은 분야에서 사용되고 있다. 이러한 나노위치결정 시스템에 있어서 가장 중요한 것은 안정성이다 열팽창과 가공에 의한 오차를 줄이기 위해 단일재료를 사용하고 대칭구조로 구성해야만 한다. 또한 나노 스케일의 분해능을 가지기 위해서는 스틱 슬립(stick-slip) 마찰이나 백래쉬(backlash) 기구가 없어야만 가능하다. 이러한 조건들을 만족하기 위해서 선행 연구자들은 유연힌지(flexure hinge)를 사용한 컴플라이언스 기구(compliance mechanism)를 제안하였고 이미 마이크로/나노 위치결정 시스템에 대한 연구와 개발이 이루어졌다.(중략)

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A Study on Nano-Accelerometer based on Carbon Nanotube (탄소나노튜브 기반의 나노-가속도계에 관한 연구)

  • Song, Young-Jin;Lee, Jun-Ha
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.10 no.1
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    • pp.91-95
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    • 2009
  • We investigated the characteristics of a capacitive nano-accelerometer based on carbon nanotube by means of classical molecular dynamics simulations. The position of the telescoping nanotube was controlled by the externally applied force and the feedback sensing was achieved from the capacitance change. Considering energy dissipation, the oscillation features of the nano-accelerometers were similar, regardless of their initial displacements. The capacitance variations, which were almost linearly proportional to the applied acceleration, were monitored within an error tolerance.

AFM용 자기부상 스테이지를 위한 Halbach Magnet Array 특성해석

  • 최현승;염우섭;박기환
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.162-162
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    • 2004
  • 위치결정 기술은 초정밀 미세 기술의 발달과 제품의 소형화, 경량화에 대한 요구가 늘어나면서 고정밀화가 가속화되어 현재는 나노미터 수준의 위치정밀도를 요구하고 있다 현재 널리 사용되어지는 표면형상 측정기인 AFM은 분해능과 정밀도는 우수하지만, 이송 스테이지의 제한으로 측정영역이 좁은 단점이 있다. 이를 극복하기 위해서 이중서보를 사용한 방식들이 많이 제안되어 왔고 단일 서보를 사용하는 방식들도 연구되고 있다. 하지만 이중서보 방식은 여러 가지 액츄에이터와 컨트롤러를 사용해야하므로 제어알고리즘과 시스템이 복잡해지는 단점을 가지고 있다.(중략)

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On Nanometer Positioning Control of Ultra-precision Hydrostatic Bearing Guided Feeding Table (초정밀 유정압 베어링 이송 테이블의 나노미터 위치결정 제어에 관한 연구)

  • Shim, Jongyoup;Park, Chun-Hong;Song, Chang-Kyu
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.12
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    • pp.1313-1320
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    • 2013
  • An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.

Mechanical, Thermal and Electrical Properties of Polymer Nanocomposites Reinforced with Multiwalled Carbon Nanotubes (다중벽 카본나노튜브가 보강된 고분자 나노복합체의 기계적, 열적, 전기적 특성)

  • Kook, Jeong-Ho;Huh, Mong-Young;Yang, Hoon;Shin, Dong-Hoon;Park, Dae-Hee;Nah, Chang-Woon
    • Polymer(Korea)
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    • v.31 no.5
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    • pp.422-427
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    • 2007
  • Semiconducting layers are thin rubber film between electrical cable wire and insulating polymer layers having a volume resistivity of ${\sim}10^2{\Omega}cm$. Commercial semiconducting layers ire composed of polymer composites reinforced with more than 30 wt% of carbon blacks. A new semiconducting material was suggested in this study based on the carbon nanotube(CNT)-reinforced polymer nanocomposites. CNT-reinforced polymer nanocomposites were prepared by solution mixing and precipitation with various polymer type and dual filler system. The mechanical, thermal and electrical properties were investigated as a function of polymer type and dual filler system based on CNT and carbon black. The volume resistivity of composites was strongly related with the crystallinity of polymer matrix. With the decreased crystallinity, the volume resistivity decreased linearly until a critical point, and it remained constant with further decreasing the crystallinity. Dual filler system also affected the volume resistivity. The CNT-reinforced nanocomposite showed the lowest volume resistivity. When a small amount of carbon black(CB) was replaced the CNT, the crystallinity increased considerably leading to a higher volume resistivity.

Preisach 모델을 이용한 자기변형 구동기 제어

  • 박영우;이석호;임민철
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.151-151
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    • 2004
  • 현재 세계 기술은 고집적화, 소형화, 고속화, 정밀화 된 시스템을 추구하고 있으며 기계적인 요소와 전기적인 요소를 통합한 장비의 개발에 초점을 맞추고 있다. 그 예로 일렉트로닉스, 옵토일렉드로닉스, 옵틱스, MEMS 등을 들 수 있다. 이러한 장비들은 초정밀 위치 결정을 위해 미크론 단위 또는 나노 단위의 분해능을 가진 구동기가 필요하다. 이러한 구동기에 많이 사용되는 대표적인 재료에는 자기변형 재료와 압전 재료가 있다. 압전 재료는 현재 구동기에서 가장 많이 사용되는 재료이지만 피로현상, 드리프트 및 출력 힘이 작은 문제점을 가지고 있다.(중략)

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A Position Decision of Photo Sensor using a PZT Nano Positioning Stage (PZT 나노 스테이지를 이용한 광센서의 위치결정)

  • Cha, Young-Youp
    • Journal of Institute of Control, Robotics and Systems
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    • v.22 no.4
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    • pp.271-275
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    • 2016
  • For machining systems like the motor driven linear stage which have high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though piezo (PZT) actuator driven linear stages have high precision feed drivers and a short stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study was performed to examine the repeatability for home position decision of a EE-SX671 photo sensor as a home switch by using piezo actuator driven linear stages and capacitance probe.

Modified Sliding Mode Control for Ultra-precision Positioning System (나노급 초정밀 위치결정 시스템에 대한 슬라이딩 모드 제어기 설계)

  • Choi, In-Sung;Kim, Hyung-Suk;Lee, Woo-Ram;You, Kwan-Ho
    • Proceedings of the KIEE Conference
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    • 2006.10c
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    • pp.348-350
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    • 2006
  • In this paper, we design a new controller for an ultra-precision positioning system. In general, time optimal control enables to reach a target position faster than others. However it shows a weakness to chattering effect. In order to solve the problem, a new control algorithm based on sliding mode control is proposed. The suggested controller is composed of LQR control and sliding mode control. By performing some simulations, we prove that the proposed controller is more robust than time optimal control under the circumstance of parameter uncertainties and external disturbances.

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Design of an Inductive Coupler for Broadband Powerline Communication for Real-Time Monitoring of Distribution Automation System (배전자동화시스템의 실시간 감시를 위한 광대역 전력선통신용 유도성 커플러 설계)

  • Kang, Seog Geun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.23 no.12
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    • pp.1618-1623
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    • 2019
  • In this paper, inductive couplers realizing broadband powerline communication (PLC) are fabricated using Fe-based nanocrystalline alloy and their performance is analyzed. As a result of the field tests using the distribution automation system (DAS), the couplers achieve comparatively excellent data communication in the principal frequency band of broadband PLC although there is a difference in communication rate depending on the presence or absence of a branch. In addition, it has been confirmed that the communication speed is maintained for a real-time transmission even in a high current environment although there is a difference in the transmission rate depending on the distance. Hence, it is considered that the inductive couplers can be used as a core device to realize the intelligent power network by exploiting them for the monitoring and remote controlling of the power plant equipments for the DAS located in the inaccessible areas.

Study of Dual Servo System for Measurement System of Mechanical Property (재료의 기계적 물성측정 시험장치를 위한 이중서보 시스템에 관한 연구)

  • 최현석;송치우;한창수;이형욱;최태훈;이낙규;나경환
    • Journal of the Semiconductor & Display Technology
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    • v.2 no.2
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    • pp.31-37
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    • 2003
  • This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

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