• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.1
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• pp.107-114
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• 2011

In this study, a correlation between the roughness of nanoscale lapping surface and its laser scattering pattern has been identified experimentally. The characteristics of laser scattering on a reflected surface are investigated, and a laser scattering mechanism is newly designed by adopting the dark-field method. Laser scattering patterns resulting from nanoscale lapping shape are in the shape of crossed irregular lattice. In addition, optimum laser scattering images are obtained by the design of experiment, and the roughness of nanoscale lapping surface is estimated using regression analysis certain useful features of the laser scattering patterns. The results of fifty experiments on three types of nanoscale lapping surfaces show that the roughness of nanoscale lapping surfaces can be accurately estimated by the proposed mathematical modeling method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.737-738
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• 2010