• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.100.2-100.2
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• 2015

반도체 산업이 성장하고 기술이 향상됨에 따라 소자의 소형화가 이루어지고 있다. 공정법으로는 atomic layer deposition (ALD), chemical vapor deposition (CVD) 등이 있다. 이러한 공정을 이용하여 수십 nm까지 미세화가 진행되고 있으며, 복잡한 구조의 박막을 실현하기 위해 전구체의 개발이 활발히 진행되고 있다. 전구체의 특성을 비실시간으로 분석하는 방법으로는 질량 분석법, 가스크로마토그래피, 적외선 분광법 등이 있다. 전구체의 특성을 실시간으로 분석하기 위해 Fourier transform infrared spectroscopy (FTIR)내에 attenuated total reflectance (ATR)를 거치시켰다. 본 연구는 구조를 개선한 ATR-FTIR을 이용하여 Tris-(dimethylamino) Zirconium (CpZr) 전구체의 흡착 거동을 분석하였다. ATR용 crystal은 Ge crystal을 사용했으며, 온도를 각각 30, 40, $50^{\circ}C$에서 CpZr 전구체의 흡착특성을 연구했다. 흡착성을 증가시키기 위해 Ge crystal 표면에 $ZrO_2$나노입자를 분포시켜 흡착특성을 비교 분석하였다. 또한 CpZr 전구체가 흡착된 Ge crystal 표면에 오존가스를 주입시킨 후 변화를 관찰하였다. Ge crystal표면에 나노입자를 분포시켜 CpZr 전구체를 흡착한 결과 나노입자를 분포시키지 않았을 때 보다 흡착강도가 높게 나타났다. 또한 CpZr 전구체가 흡착된 Ge crystal 표면에 오존가스를 주입한 결과 C-H 결합이 분해됨을 확인했다.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.10
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• pp.936-941
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• 2010

This study was conducted to investigate formaldehyde removals by silver nano-particles attached on the surface of granular activated carbon (Ag-AC) and to compare the results to those obtained with ordinary activated carbon (AC). The BET analysis showed that the overall surface area and the fraction of micropores (less than $20{\AA}$ diameter) of the Ag-AC were significantly decreased because the silver particles blocked the small pores on the surface of the Ag-AC. The formaldehyde removal capacity of the Ag-AC determined using the Freundlich isotherm was higher than that of AC. Despite the decreased BET surface area and micropore volume, the Ag-AC had the increased removal capacity for formaldehyde, presumably due to catalytic oxidation by silver nano-particles. In contrast, the adsorption intensity of the Ag-AC, estimated by 1/n in the Freundlich isotherm equation, was similar to that of the ordinary AC, indicating that the surface modification using silver nano-particles did not affect the adsorption characteristics of AC. In a column experiment, the Ag-AC also showed a longer breakthrough time than that of the AC. Simulation results using the homogeneous surface diffusion model (HSDM) were well fitted to the breakthrough curve of formaldehyde for the ordinary AC, but the predictions showed substantial deviations from the experimental data for the Ag-AC. The discrepancy was due to the catalytic oxidation of silver nano-particles that was not incorporated in the HSDM. Consequently, a new numerical model that takes the catalytic oxidation into accounts needs to be developed to predict the combined oxidation and adsorption process more accurately.

• Composites Research
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• v.27 no.3
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• pp.109-114
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• 2014

Manufacture of nancomposites has simple process for developing nanocomposites due to the increasing applications using nanofillers. This work studied nanofiller coated glass fiber for reinforcing material with good wetting and conductivity and the morphology of nanofiller coated glass fiber was analyzed by FE-SEM. The durability of reinforced glass fiber was investigated with different shapes of nanofillers using sonication rinsing method. Fatigue test was performed to evaluate the adhesion of reinforcing interface and stability of nanofiller coating layer for single fiber reinforced composites. Apparent modulus and conductivity of nanofiller coating layer were evaluated to realize multifunctional of nanocomposites. Fiber type of nanofiller was better than plate type due to better cohesion between fiber and nanofillers. At last, the stability of fiber type nanofiller of coating layer has better durability and conductivity than plate type case.

• Korean Chemical Engineering Research
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• v.46 no.6
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• pp.1069-1074
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• 2008

In this work, we made a study for the 3D SAM formation of octanethiol, decanethiol, and dodecanethiol on copper nanoparticles and we verified stability of the copper particle depending on the ratio of dodecanethiol to copper. The reaction was performed in a one-phase system under nitrogen atmosphere and the thiolated copper particles could be obtained by centrifugation. We could confirm that the nanoparticles consisted of a spherical shape of 3~6 nm from TEM images. FT-IR, XPS and TGA results showed that alkanethiols were chemisorbed via thiol group and the packing density of the alkanethiols on copper surface increased with the alkyl chain lengths. XRD patterns gave us useful information about superlattice formations. Finally, $Cu_2O$ was formed when the molar ratio of dodecanethiol to copper is less than unity and copper nanoparticles formed more compact 3D SAMs when the molar ratio of dodecanethiol to copper was 1.25.

• Applied Chemistry for Engineering
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• v.18 no.5
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• pp.467-474
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• 2007

The palladium and gold nanoparticles containing PAN-based active carbon fiber (ACF) with a high specific surface area were prepared. Using the BET, TEM, FE-SEM, and XPS, their specific surface area and pore volume, pore structure, and the change in surface oxygen groups with time were analyzed and $SO_2$ adsorption performances were investigated. Because of the impregnating process, the micropore volume was mostly decreased from 95.5% to 30.5~43.7% compared with the total pore volume. And the change in surface oxygen groups with time was higher for the metal salt than the nanoparticles. Also, $SO_2$ breakthrough time of PAN-ACFs impregnated with Au nanoparticles and metal salts did not change compared with that of the non-impregnated PAN-ACF. But the PAN-ACF impregnated with Pd nanoparticles (100 ppm) showed good $SO_2$ adsorption performance as the breakthrough time of 880 sec. These results indicated that the $SO_2$ adsorption performance depended on the change in surface oxygen groups with time and the moderate impregnation of Pd nanoparticles on the PAN-ACF caused the increase in the $SO_2$ adsorption performance by a catalytic action.

• Applied Chemistry for Engineering
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• v.17 no.5
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• pp.532-538
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• 2006

The carbonization and activation conditions for the PAN-based ACF of various grade were investigated to obtain the optimun activation condition with high surface area. And the surface properties and the absorption performance of toxic gas for terror were examined toward the PAN-ACF with the highest surface area. In the test results the surface area increased with increase of the activation temperature, but decreased with increase of the carbonization temperature. After carbonization condition ($900^{\circ}C$-15min) and activation condition ($900^{\circ}C$-30 min), we got the ACF with the highest surface area of $1204m^2/g$. In the absorption test of iodine and toxic gas for terror, this ACF showed more excellent absorption performance than the existing carbon-based adsorbent. Also, in order to give the function characteristic for a selective absorption, the stable nanoparticles of the Ag, Pt, Cu, Pd were prepared and impregnated on the PAN-based ACF in replacement of the existing method supporting metal catalysis. And were analyzed the surface characteristics and the $SO_{2}$ adsorption characteristics. In the $SO_{2}$ absorption performance test of the PAN-ACF with the impregnated nanoparticles, it wasn't change breakthrough time of Ag, Pt, Cu nanoparticle supported the PAN-ACF comparing with breakthrough time (326 sec) of the non supported PAN-ACF but Pd nanoparticle supported the PAN-ACF achieved excellent $SO_{2}$ absorption performance which has break-through time 925 sec.

• Polymer Science and Technology
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• v.15 no.2
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• pp.228-233
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• 2004

본 기고부분에서는 레이저 라만 분광법을 이용하여 나노입자에 흡착된 자기조립박막의 구조를 밝히고 응용성을 모색하는 일을 소개하고자 한다 Au 나노입자는 최근 재료과학과 의학 및 생물학에서 그 쓰임의 폭이 넓어지고 있다. 나노입자가 처음 사용된 예들 중에 가장 잘 알려진 것은 고대 로마 시대의 Lycurgus 컵에 기인한다고 한다. 컵 안에 함유된 미량의 은이나 금 나노입자에 의해서 반사했을 때와 투과할 때의 빛깔이 다르게 보이며 이러한 성질은 중세건축물의 스탠드 글라스에 이용되어 왔다. 근대적인 의미에서 Au 콜로이드의 수용액이 작은 미세입자가 분산되어 있다고 생각한 사람은 전기화학의 창시자라 할 수 있는 영국의 Faraday라 할 수 있다.(중략)

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1048-1051
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• 2003

주사탐침현미경 (Scanning Probe Microsope, SPM)을 이용하여 직접 패터닝을 함으로써 hexanedithiol 분자의 임의 패턴을 금 표면에 형성하였다. 또한, hexanedithiol 분자는 양단에 thiol 그룹이 존재하여 금과 안정화 화학결합을 이룰 수 있으므로, 금 표면과결합을 이루고 있지 않는 상단의 thiol 그룹에 금 나노 입자를 고정함으로써 나노입자의 패턴을 제작하였다. SPM을 이용한 직접 패터닝 방법은 분자활성을 유지한 채로 임의 패턴을 수십 nm의 선폭으로 구현하는 것이 가능하므로, 나노입자 배열뿐만 아니라, 생화학물질의 패터닝을 통한 바이오 기술연구, 레지스트용 분자 패터닝과 시각 및 흡착 등의 계속적인 공정을 통한 다양한 나노구조 제작 등에 폭넓게 활용될 수 있다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.439-439
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• 2011

기존의 고온에서 제작되는 TiO2 나노 입자를 이용한 염료감응형 태양전지를 저온에서 제작하기 위해 전자 이동층으로 ZnO 나노 입자를 사용하여, 저온($200^{\circ}C$)에서 염료감응태양전지(DSSC)를 제작하였다[1,2]. 상대전극(counter electrode)으로는 RF magnetron sputtering을 사용하여 ITO/glass위에 Pt를 증착하여 태양전지의 특성을 측정하였다. $180^{\circ}C$ 이상에서 hydropolymer가 증발되는 것을 이용하여, ZnO 나노입자와 hydropolymer 혼합한 paste 제작하여 소결 후 ZnO 나노입자 사이에 다공성을 생성시켜 Dye가 잘 침투하여 ZnO 나노입자 표면에 잘 흡착 되도록 하였다[3]. 20 nm 및 60 nm 크기의 ZnO 나노 입자를 사용하여 실험 해본 결과, 20 nm에 비하여 60 nm ZnO 나노입자의 경우 IPCE 값이 약 7% 정도로 높은 전환효율 값을 보였다. 60 nm ZnO 나노입자를 전자 수송층으로 사용한 DSSC 소자에서 단위면적당 흐르는 전류(Jsc), 전압 (Voc), fill factor (ff), 그리고 효율(${\eta}$)의 최대값은 4.93 mA/$cm^2$, 0.56V, 0.40, and 1.12%, 로 보였다.

• Journal of Korean Society of Environmental Engineers
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• v.39 no.7
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• pp.418-425
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• 2017

ZnO nanoparticles (ZnO NPs) are mainly used in semiconductors, solar cells, biosensors, and cosmetics (sunscreen). In this study, we investigated the behavior of ZnO NPs in aquatic and soil environments and their effects on plants (Artemisia annua L.) in hydroponic cultivation. It was confirmed that the ZnO NPs size increased and their dissolution decreased with increasing in pH. Leaching distance of ZnO NPs was less than 2.5 cm, indicating that ZnO NPs had a little potential to leach into deeper soil layers. When ZnO NPs were exposed to plant, the total weights of plants decreased. The effects on the length of root and shoot were not observed. In addition large amount of ZnO NPs were adsorbed on the surface of plant root and didn't translocate into shoot. These results suggest that ZnO NPs block the pores of the root cell wall and decrease the bioavailability of plant nutrients. Therefore it can be speculated that the particles increase in size and settle down in the water environment and may adversely affect the plant growth by firmly adhering to the root surface when the ZnO NPs are exposed to the environment.