Characteristics of Quadrupole Mass Spectrometer for Partial Pressure Measurement in CO-$H_2$ Gas Mixture
(CO와 $H_2$ 혼합기체에 대한 Quadrupole Mass Spectrometer의 감도 특성)
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- Journal of the Korean Vacuum Society
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- v.2 no.3
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- pp.314-318
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- 1993