• Clean Technology
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• v.16 no.3
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• pp.191-197
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• 2010

Repair reaction of plasma damaged porous methyl doped SiOCH films was carried out with silylation agents dissolved in supercritical carbon dioxide ($scCO_2$) at various reaction time, pressure, and temperature. While a decrease in the characteristic bands at $3150{\sim}3560cm^{-1}$ was detectable, the difference of methyl peaks was not identified apparently in the FT-IR spectra. The surface hydrophobicity was rapidly recovered by the silylation. In order to induce effective repair in bulk phase, the wafer was heat treated before reaction under vacuum or ambient condition. The contact angle was slightly increased after the treatment and completely recovered after the subsequent silylation. Methyl groups were decreased after the plasma damage, but their recovery was not identified apparently from the FT-IR, spectroscopic ellipsometry, and secondary ion mass spectroscopy analyses. Furthermore, Ti evaporator was performed in a vacuum chamber to evaluate the pore sealing effect. The GDS analysis revealed that the open pores in the plasma damaged films were efficiently sealed with the silylation in $scCO_2$.

• Resources Recycling
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• v.15 no.3 s.71
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• pp.38-45
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• 2006

The thermal filter press dewatering(TFPD) technology to improve the dewaterability through increasing the inner vapor pressure, lowering the filtration viscosity and forming the porosity easily within cake as applying the heat at the sludge layer was developed in this study. The hot water with temperature of $95^{\circ}C$ and pressure of $1.2kg_f/cm^2$ was supplied to the heating plate equipped between filter plates with plate size of $470{\times}470mm$ and material of polypropylene. Sludge was dewaterd by supplying pressure of $5kg_f/cm^2$ and then by squeezing pressure of $15kg_f/cm^2$. As a results of estimating the characteristics of thermal dewatering to consider the initial water content and organic content to be influenced by a period of water shortage and rainwater, the dewatered cake water content was about 35 wt% and dewatering velocity was $4DSkg/m^2{\cdot}hr$ under the rainwater period, and the dewatered cake water content was about 50 wt% and dewatering velocity was $1.5DSkg/m^2{\cdot}hr$ in the case of sludge of water shortage season. These results was superior to the mechanical dewatering performance with water content of 70wt% and dewatering velocity of $0.9DSkg/m^2{\cdot}hr$. On the base of the results of TFPD, energy consumpted to deal with DS(Dry Solid) of 1kg was estimated by 300 kJ. It was analyzed that the energy consumption of TFPD was decreased about one third with comparison to the dryer system. Dewatering velocity of this technology was faster than the one of mechanical dewatering equipment and it was easier to product low water content cake. Therefore, this technology was recognized that dewaterability was predominant because of the fast of dewatering velocity and production of low water content cake, and also this known as economical efficiency was excellent because of low energy consumption in comparison with dryer.