• Journal of the Korean Vacuum Society
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• v.3 no.1
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• pp.59-64
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• 1994

극소전자 디바이스의 고집적화와 더불어 박막배선의 선폭은 0.5$\mu$m이하까지 축소되며 초고집적 submicron 박막금속화가 진행되고 있다. 미세회로에 적용되어지는 배선재료는 인가되는 고전류밀도로 인하여 electromigration 에 의한 결함이 쉽게 발생한다는 단점이있다. 금속박막 전도체위의 dielectric overlayer는 electromigration 에 대한 passivation 효과를 보여 극소전자 디바이스의 평균수명을 향상시 킨다.본 연구에서는 박막금속화에서 dielectric overlayer의 passivation 효과를 알아보기 위하여 약 3000 $\AA$ 두께의 Al,Al-1%Si, Ag 그리고 Cu 박막배선위에 증착하여 SiO2절연보호막의 유무에 따른 박막배선 의 수명변화 및 신뢰도를 측정하였다. 박막배선에 인가된 전류밀도는 1x106 A/cm2와 1x107 A/cm2 이었다. SiO2 dielectric overlayer는 Al,Al-1%Si Ag. Cu 박막배선에서는 electromigration에 대한 보호막 혀과를 보이며 평균수명을 모두 향상시킨다. SiO2 passivation 효과는 Al, Ag, Cu 박막중 Cu 박막배선에서 가 장 크게 나타났다. SiO2 dielectric overlayer가 형성되지 않은 경우 Al 박막배선의 수명이 가장 긴 것으 로 나타났으나 SiO2 가 형성된 경우는 Cu 박막배선의 수명이 가장 길게 나타났다.

• Applied Chemistry for Engineering
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• v.23 no.6
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• pp.572-576
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• 2012

This study presents the $CO_2$ methanation reaction on Pt catalysts for reducing the amount of $CO_2$, one of greenhouse gases. The AlO(OH) of $Al_2O_3$precusor was used as a support via a thermal treatment and the Pt was used as an active metal. In XRD results, it was confirmed that the Pt was well dispersed and the support existed as the gamma $Al_2O_3$phase. The $Pt/Al_2O_3$ catalyst calcined at $600^{\circ}C$ showed the highest conversion efficiency and selectivity.

• Resources Recycling
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• v.20 no.4
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• pp.58-64
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• 2011

Recovery of novel metals such as Au, Ag and Ni from wastes PCB was investigated by slag treatments. The CaO-$Al_2O_3$(-$SiO_2$) and CaO-$SiO_2$-$CaF_2$ slags were employed in the present study. The PCB/Cu ratio is recommended to be lower than unity. The use of CaO-$SiO_2$-$CaF_2$ slag provided the more higher yield of Au, Ag and Ni than the CaO-$Al_2O_3$(-$SiO_2$) slag did, which was mainly due to the lower melting point and the viscosity of $CaF_2$-containing slag. The terminal descending velocity of metal droplets in the slag phase increased with decreasing slag viscosity.

• Korean Journal of Crystallography
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• v.11 no.2
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• pp.102-107
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• 2000

20vol% Al2O3-dispersed 2Y-TZP ceramics was prepared by mixing of 2Y-TZP and Al2O3 powder with different particle sizes, and investigated the influence of Al2O3 particle size and sintering condition on the microstructure and fracture toughness. Sintering conditions of the Al2O3-dispersed 2Y-TZP specimens showed high density at sintering condition of 1350℃ and 1500℃ for 1∼5h, and homogeneous microstructure. The grain size of tetragonal zirconia and the fracture toughness increased with the size of dispersed Al2O3 particle. The highest fracture toughness (∼17.2MPa·m1/2) of all specimens was obtained in the specimens with dispersed Al2O3 particle size of 1.0㎛ and sintered at 1500℃ for 2h.

• Korean Journal of Materials Research
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• v.3 no.1
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• pp.33-42
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• 1993

Abstract The increasing application of $Al_2$,$O_3$ and related ceramics as engineering materials is because of their attractive properties of fine ceramics. One solution to the wide variety of ceramic to metal combination lies in the effective joining. Active metal brazing of $Al_2$,$O_3$, to STS304 was investigated using Cu -Ti alloys. Titanium additive is chosen since it is good oxide former~. Brazing is performed under vacuum($10^{-3}$-$10^{-4}$ torr), a temperature between 1100 and 120$0^{\circ}C$ and time of 0.5-1.5hr. The microstructure of the brazed joints of $Al_2$,$O_3$ to STS304 with Cu-Ti insert metals were examined by using optical microscope and SEM and reaction products were analyzed by using EDX, WDX and XRD. Also interfacial reactions occuring during the brazing of $Al_2$,$O_3$/Cu-Ti/STS304 system are discussed. Experimental results showed formation of Titanium oxide T$i_2$$O_3$ which is attributable to the joining $Al_2$,$O_3$ to STS304 with Cu-Ti insert metal.

• Korean Journal of Metals and Materials
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• v.49 no.12
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• pp.1001-1004
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• 2011

The formation of TiC and $Al_2O_3$ particles based on the self-combustion reaction of the $Al-TiO_2-C-CuO$ system in an Al alloy melt was investigated. With an adequate amount of CuO in the system, a spontaneous reaction occurred within the Al alloy melt at $850^{\circ}C$ and thereafter was self-maintained, producing an Al matrix composite reinforced with thermodynamically stable TiC and $Al_2O_3$ particles. TiC and $Al_2O_3$ particles contributed to a considerable increase in the strength and stiffness, demonstrating the feasibility of this method as a practical application for structural parts.

• Korean Journal of Metals and Materials
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• v.50 no.9
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• pp.677-684
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• 2012

A feasible way to fabricate in-situ Al/TiC composites was investigated. An elemental mixture of $Al-TiO_2-C$ pellet was directly added into an Al melt at $800-920^{\circ}C$ to form TiC by self-combustion reaction. The addition of CuO initiates the self-combustion reaction to form TiC in $1-2{\mu}m$ at the melt temperature above $850^{\circ}C$. Besides the CuO addition, a diluent element of excess Al plays a significant role in the TiC formation by forming a precursor phase, $Al_3Ti$. Processing parameters such as CuO content, the amount of excess Al and the melt temperature, have affected the combustion reaction and formation of TiC, and their influences on the microstructures of in-situ Al/TiC composites are examined.

• Journal of Welding and Joining
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• v.11 no.1
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• pp.62-72
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• 1993

Recently there is an increased interest in joining of ceramics to metals and brazing now an accepted method of joining for a wide variety of ceramic to metal combination. The present research work is aimed at establishing the basis of the metal-ceramic joining of $Al_{2}$O$_{3}$ to STS 304 with using Cu-7.5wt% Zr insert metals. Also the microstructures of the brazed joints were observed by using optical microscope and SEM and the reaction products were analyzed by using EDX, WDX and XRD. As a result, the following findings were obtained. The reaction layers of the brazed joints of $Al_{2}$O$_{3}$ to STS 304 are composed of four layers at the bonded interlayer. Double reaction layers are formed at the interface of $Al_{2}$O$_{3}$ insert metal. Layer I was composed of ZrO$_{2}$ particles, Fe-Cr-Ni compounds in Cu matrix, while layer II ZrO$_{2}$ band phase containing Fe-Cr-Ni compounds.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.4
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• pp.444-451
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• 2007

Catalytic oxidation characteristics of benzene as a VOC was investigated using a fixed bed reactor system over transition $metals/\gamma-Al_2O_3$ catalysts. As transition metals, eight metals including copper, nickel, manganese, iron etc. were adopted. The parametric tests were conducted at the reaction temperature range of $200\sim500^{\circ}C$, benzene concentration of $1,000\sim3,000$ ppm, and space velocity range of $5,000\sim60,000\;hr^{-l}$. The property analyses such as BET, SEM, XRD and the conversions of catalytic oxidation of VOC were examined. The experimental results showed that the conversion was increased with decreasing VOC concentration and space velocity. It was also found that $Cu/\gamma-Al_2O_3$ catalyst calcinated at $500^{\circ}C$ showed the highest activity for the oxidation of benzene and 15% metal loading was the optimum impregnation level.

• Clean Technology
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• v.20 no.4
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• pp.375-382
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• 2014

This work investigated the plasma-catalytic decomposition of isopropyl alcohol (IPA) and the behavior of the byproduct compounds over monolith-supported metal oxide catalysts. Iron oxide ($Fe_2O_3$) or copper oxide (CuO) was loaded on a monolithic porous ${\alpha}-Al_2O_3$ support, which was placed inside the coaxial electrodes of plasma reactor. The IPA decomposition efficiency itself hardly depended on the presence and type of metal oxides because the rate of plasma-induced decomposition was so fast, but the behavior of byproduct formation was largely affected by them. The concentrations of the unwanted byproducts, including acetone, formaldehyde, acetaldehyde, methane, carbon monoxide, etc., were in order of $Fe_2O_3/{\alpha}-Al_2O_3$ < $CuO/{\alpha}-Al_2O_3$ < ${\alpha}-Al_2O_3$ from low to high. Under the condition (flow rate: $1L\;min^{-1}$; IPA concentration: 5,000 ppm; $O_2$ content: 10%; discharge power: 47 W), the selectivity towards $CO_2$ was about 40, 80 and 95% for ${\alpha}-Al_2O_3$, $CuO/{\alpha}-Al_2O_3$ and $Fe_2O_3/{\alpha}-Al_2O_3$, respectively, indicating that $Fe_2O_3/{\alpha}-Al_2O_3$ is the most effective for plasma-catalytic oxidation of IPA. Unlike plasma-alone processes in which tar-like products formed from volatile organic compounds are deposited, the present plasma-catalyst hybrid system did not exhibit such a phenomenon, thus retaining the original catalytic activity.