• Title/Summary/Keyword: 금속 치환물

Search Result 80, Processing Time 0.031 seconds

Cu(dmamb)2 전구체를 이용한 구리박막제조 시 캐리어가스가 박막성장에 미치는 영향

  • Choe, Jong-Mun;Lee, Do-Han;Jin, Seong-Eon;Lee, Seung-Mu;Byeon, Dong-Jin;Jeong, Taek-Mo;Kim, Chang-Gyun
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2009.11a
    • /
    • pp.29.2-29.2
    • /
    • 2009
  • 구리는 낮은 비저항, 높은 열전도도, 우수한 electromigration(EM)저항특성 등을 바탕으로 차세대 nano-scale집적회로의 interconnect application에 적합한 금속재료로서 각광받고 있다. copper interconnect는 damascene process 를주로 이용하는데 CVD를 이용하면 step coverage가우수한 seed layer얻을 수 있어 고집적 소자의 구현이 가능하다. 최근에 비 균등화 반응(disproportionationreaction)을 이용하여 고 순도 구리박막을 제조하기위해 $\beta$-diketonate Cu(I) Lewis-base의 전구체를 많이 이용하는데 그중에서 hexafluoroacetylacetonate(hfac)Cu(I)vinyltrimethylsilane (VTMS)가 널리 이용되고 있다. 그러나 (hfac)Cu(I)(VTMS) 또는 유사계열의 전구체들은 열적안정성및 보관안정성이 부족하여 실제 양산공정에 적합하지 못한 단점이 있었다. 본 연구에 이용된 2가 전구체Cu(dmamb)2는 높은 증기압($70^{\circ}C$, 0.9torr)을 가지며 종래에 주로 이용하던 1가 전구체 (hfac)Cu(VTMS)에 비해 높은 활성화 에너지(~113 kJ/mol)를가짐으로서 열적안정성 및 보관안정성이 우수하다. 다른 한편으로 2가전구체는 안정성이 우수한 만큼 낮은 증기압을 극복하기 위해 리간드에 플루오르를 주로 치환하여 증기압을 높이는데 플루오르는 성장하는 박막의 접착력을약하게 하는 단점을 가진다. 하지만 본 연구에 사용된 Cu(dmamb)2는 리간드에 플루오르를 포함하지 않으며, 따라서 고품질의 박막을 용이한성장환경에서 제조할 수 있는 장점들을 제공한다. 비활성가스 분위기에서 2가전구체는 열에너지에 의해 리간드의 자가환원에따라 금속-리간드 분해가 발생한다. 하지만 수소분위기에서는수소가 환원제로 작용하여 리간드의 분해를 용이하게 하는 특징을 가지며 따라서 비활성분위기일 때 비해 낮은 성장온도를 가진다. 또한 수소는 잔류하는 리간드 및 불순물과 결합하여 휘발성화학종들을 생성하여 고순도의 구리박막제조를 가능하게한다.

  • PDF

The Skeletal Isomerization of 1-Pentene over Solid Acid Catalysts (고체산 촉매에서의 1-펜텐의 골격이성화반응)

  • Hong, Seong-Soo;Woo, Hee-Chul;Lee, Gun-Dae
    • Applied Chemistry for Engineering
    • /
    • v.7 no.5
    • /
    • pp.902-912
    • /
    • 1996
  • In the skeletal isomerization of 1-pentene over various solid acid catalysts, we have studied catalytic reactivity, selectivity, reaction mechanism and the relation between acid strength of catalysts and catalytic activity. Natural zeolite shows highest activity among the all catalysts and the modified ${\eta}$-alumina with fluorine and sulfuric acid shows higher activity than unmodified ${\eta}$-alumina. The yield of isopentene increases with increasing temperature and increasing contact time. However the cracking products increase at the high temperature and very high contact time. In addition, the activity of natural zeolite exchanged with metal cation decreases and shows good relation with the polarizing power of metal cation. According to the result of ammonia TPD, the acid strength of catalysts has an effect on catalytic activity.

  • PDF

Formation and Role of Acid Sites of Heteropoly Acid Catalysts (헤테로폴리산 촉매의 산점 형성과 역할)

  • Song, In Kyu;Lee, Jong Koog;Song, Jae Cheon;Lee, Wha Young
    • Applied Chemistry for Engineering
    • /
    • v.5 no.3
    • /
    • pp.431-437
    • /
    • 1994
  • The role and the formation of surface and bulk acid sites of heteropoly acids were studied by examining ethanol conversion and MTBE (methyl t-butyl ether) decomposition reaction. In ethanol dehydration diethylether was formed on the surface acid site of 12-tungstophosphoric acid, whereas ethylene was formed in the bulk acid site of the catalyst. It was revealed that water reinforced the bulk acid site of the catalyst, while organic base decreased the bulk acid function of the catalyst. The formation of acid sites of metal salts was due to hydrolysis of crystalline water and/or partial substitution of metal, and with hydrogen treatment, the acid site was reappeared. Also catalyst design as a selective oxidation catalyst was possible by controlling acid function of heteropoly acid catalyst.

  • PDF

Recovery of Cu and Sn from the Bioleaching Solution of Electronic Scrap (전자(電子)스크랩의 미생물(微生物) 침출액(浸出液)으로부터 구리 및 주석의 회수(回收)에 관한 연구(硏究))

  • Ahn, Jae-Woo;Kim, Meong-Woon;Jeong, Jin-Ki;Lee, Jae-Chun
    • Resources Recycling
    • /
    • v.15 no.6 s.74
    • /
    • pp.41-47
    • /
    • 2006
  • A study for recovering of copper and lead from electronic scraps has been carried out using a combination of bioleaching and solvent extraction. It was found that the citric acid generated by Aspergillus niger could be an imporant leaching agent acting in the solubilization of copper, iron, lead and tin from the electronic scrap. Copper could be selectively extracted by 10% LIX84 from the leaching solution and it recoved 99.9% of metallic copper by electrowinning process. Tin and iron were extracted from the remaining solution by 10% Alamine336 and stripped by NaCl solution. Finally, tin could be recovered as a metallic precipitates from the mixed solution of tin and iron by cementation with iron powder.

A Study on the Cementation of Cu, Ni and Co Ions with Mn Powders in Chloride Solution (염산용액중에서 망간분말에 의한 구리, 니켈 및 코발트 이온의 세멘테이션에 관한 연구)

  • 안재우;안종관;박경호
    • Resources Recycling
    • /
    • v.9 no.3
    • /
    • pp.3-12
    • /
    • 2000
  • A Study on the cementation for the recovery of Cu, Ni and Co with Mn metallic powders in leaching solution from the manganese nodule that have removed Fe ions was studied. The results showed that the recovery efficiencies of metal ions with Mn powders increased when the temperature, pH and the concentration of chloride ions were increased in mixed solution. And the recovery efficiencies of Cu was 98% and not changed with the addition amounts of Mn powders but, in case of Co and Ni, the recovery efficiencies were increased with the addition amounts. The particle size of precipitate was about $5\mu\textrm{m}$. From the results of experiment we proposed the two-step cementation process for the recovery of Cu, Ni and Co with Mn powders.

  • PDF

Improving the Electrochemical Properties of Lithium Terephthalate-based Lithium-Organic Battery with A Graphite Coated Current Collector (흑연 코팅 집전체를 이용한 Lithium Terephthalate 기반 리튬-유기 이차전지의 전기화학적 특성 개선)

  • Kwon, O Hyeon;Kim, Jong Bin;Kim, Jae-Kwang
    • Journal of the Korean Electrochemical Society
    • /
    • v.22 no.3
    • /
    • pp.122-127
    • /
    • 2019
  • In this study, we investigate the electrochemical performance of lithium terephthalate (LTA) battery using graphite coated metal current collector to overcome the disadvantages of organic batteries which is high interfacial resistance between current collector and electrode. The LTA anode material is synthesized by acid-based ion exchange reaction without impurities. The contact properties between stick-type LTA-based electrode and graphite coated current collector are estimated by the cross-section SEM and EIS. The graphite coated current collector significantly reduced the interfacial resistance of the LTA battery. The second discharge capacities of bare current collector LTA and graphite coated current collector LTA batteries are 107.6 mAh/g and 148.8 mAh/g at 0.1C, respectively. The graphite coated current collector LTA batteries show higher cycle life, higher discharge capacity, and higher rate-capability than bare LTA batteries.

Synthesis of Organic Silicon Compounds from Siliceous Mudstone (규질이암으로부터 실리콘 유기화합물 합성)

  • Kim, Byoung-Gyu;Jang, Hee-Dong;Kim, Jong-Seok
    • Journal of the Mineralogical Society of Korea
    • /
    • v.20 no.3
    • /
    • pp.155-163
    • /
    • 2007
  • A novel route to the synthesis of tetramethoxysilane and other silicon alkoxides is described using siliceous mudstone as the raw material. The reaction of amorphous silica with triethanol-amine is enhanced by using an alkali metal hydroxide catalyst to form a range of triethanol-amnine-substituted silatrane species. These can undergo alkoxide exchange in acidic alcohols to form alkoxysilatranes, tetraalkoxysilanes, hexaalkoxydisiloxanes and higher siloxanes. Products were identified by FT-IR spectroscopy, XRD, SEM, 1H and 13C NMR spectroscopy, or gas chromatography.

Efficiency Improvement of Metal-Mesh Electrode Type Photoelectrochemical Cells by Oxides Layer Coatings (산화물박막 증착에 의한 금속 메쉬전극 구조 광전기화학셀의 효율 개선에 관한 연구)

  • Han, Chi-Hwan;Park, Seon-Hee;Sung, Youl-Moon
    • The Transactions of The Korean Institute of Electrical Engineers
    • /
    • v.60 no.3
    • /
    • pp.584-587
    • /
    • 2011
  • In this work, the $TiO_2$ and $SnO_2$ thin films as blocking layers were coated directly onto the metal-mesh electrode surface to prevent unnecessary inflow of back-transfer electrons from the electrolyte ($I^-/I_3^-$) to the metal-mesh electrode. The DSCs were fabricated with working electrode of SUS mesh coated with blocking $TiO_2$ and $SnO_2$ layers, dye-attached mesoporous $TiO_2$ film, gel electrolyte and counter electrode of Pt-deposited F:$SnO_2$. From the experimental result, it was ascertained that the efficiency of metal electrode coated with $TiO_2$ by Dip-coating was superior to that of metal electrode coated with $SnO_2$ by Dip-coating and screen printing with the results of experiments. The photo-current conversion efficiency of the cell obtained from optimum fabrication condition was 3% ($V_{oc}$=0.61V, $J_{sc}$=11.64 mA/$cm^2$, ff=0.64) under AM1.5, 100 mW/$cm^2$ illumination.

Properties of charge/discharge in synthesis method or substituting transition element for Li-Mn Oxide (전이금속 치환 및 합성방법에 따른 Li-Mn 산화물의 충방전 특성)

  • Jee, Mi-Jung;Choi, Byung-Hyun;Lee, Dae-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2007.06a
    • /
    • pp.46-46
    • /
    • 2007
  • There has been rapid progress in the portable electronics industry. which has led to a great increase for a demand of portable, lightweight power sources. Lithium 2'nd batteries have met these demand. and many studies on the cahtod materials for the lithium 2,nd batteries have been reported during the last decade. Possible candidates for the cathode materials for lithium 2,nd batteries are $LiCoO_2$, $LiNiO_2$, and $LiMn_2O_4$. Currently $LiCoO_2$ is widely used. but $LiMn_2O_4$ is an excellent alternative material in view of its several advantages such a low cost as well as the wasy availability of raw materials and environmental benignity. In this study, find the most suitable synthesis method that satisfied high capacitor and stability cycle character, etc in Li-Mn oxide for 2'nd batteries. And also made an experiment on doping the $LiMn_2O_4$ spinel with a small amount of metal ions has a remarkable effect on the electrochemical properties and characterics of powder, BET, PSA, Porosity, etc.

  • PDF

Evaluation of the Effect of Metal Artifacts Varying the Parameters of the Attenuation Map for the artificial Hip Joint in SPECT/CT (SPECT/CT에서 인공고관절에 대한 감쇠보정지도(Attenuation Map)의 매개변수 변화에 따른 금속 인공물(Metal Artifact)의 영향 평가)

  • Kim, Sang Gyu;Kim, Jung Yul;Park, Min Soo;Jo, Seung Hyun;Lim, Han Sang;Kim, Jae Sam
    • The Korean Journal of Nuclear Medicine Technology
    • /
    • v.18 no.2
    • /
    • pp.3-7
    • /
    • 2014
  • Purpose SPECT/CT scan to be performed attenuation correction on the basis of CT induce an overestimation of the site due to the beam hardening artifact by metal cover and reduce the images quality. Therefore, this study using a phantom that has been inserted artificial hip joint investigated that effect on the SPECT/CT image causing by metal artifact for varying the parameters of the Attenuation Map. Materials and Methods Siemens Symbia T16 SPECT/CT equipment was used. Artificial hip joint was inserted to SPECT/PET phantom, 17 mm sphere of Bright Streak area in CT image was filled with Tc-99m so that the radiation activity was 8 times compared to background. And then Hot and Background was measured in varying Wide Beam Coefficient on Attenuation Map and RBR (Region to Background Ratio) of Metal and Non-Metal was calculated and analyzed depending on the presence or absence of the hip joint. Results It tended to hot count of Non-Metal and Metal to increase as the value of the manual mode is increased, hot count ratio with the group of both manual mode 0.5 and 0.4 is the best match. Also, in automatic mode, the ratio of RBRNon-Metal and RBRMetal was 1.135, statistically significant difference was not observed in the manual mode 0.5 and 0.4. Conclusion In the automatic mode of Wide Beam Coefficient in attenuation correction map, it was found that it is over-correction by 13.52%, it was possible to minimize the over-correction by the artifact in 0.5 and 0.4 of manual mode. Further studies should be performed in order to apply to a patient with the help of this and it is considered possible to reduce the over-correction by the metal artifact of an artificial hip joint for Hip-Resurfacing Arthroplasty patients, and to improve the diagnostic performance.

  • PDF