• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.311-314
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• 1997

According to the development of industrial equipment such as semiconductor manufacturing machines, optical device, and precision machine tool, a high-precision translation system with wide range has been required. This paper describes a high-precision 2-axis translation system, which consists of microstage and global stage. In order to achieve the highresolution in the long range, some engineering techniques are used. Three linear guides with flexible coupling are adopted to reduce the motor vibration in the global stage. A simple elastic hinge structure activated by five PZT is applied to reduce the angular dev~atlon. As the result of combination of microstage and global stage associated with some engineering techniques, the 2-axis translation system can measure the 200 X 200 mrn range with the nanometer accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.6
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• pp.982-988
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• 2013

With conventional positioning apparatus, it is very difficult to simultaneously achieve the desired driving range and precision at the sub-micrometer level. Generally, lead screw and friction drive, etc., have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• Archives of design research
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• v.13 no.4
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• pp.85-93
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• 2000

Design becomes a source of new competitive power in the boundless global market so-called globalization. The competitive power in business was lied in the technology in 70's and the design was understood as a styling or graphic means. However, the design has become more important means to get the competitive power in business since 1980. World businesses have found the fact that it has a super competitive power to make the product's performance as well as its dignity rather than it is to determine the product's external view or color. The change of design policy in Phillips, one of the world's leading producers of electronic products, is not much different. Design manager's power was limited until 70's. However, Phillips has focused its business strategy on the higher competitive power since 1980 and they welcomed Robert Blaich, vice president of design and development at Herman Miller Inc., to be a member of the company, expanding the importance of design along with restructure while working on the globalization. Meanwhile, Stefano Marzano, a Senior Director in 90's, established a high design concept, working on the strategic futures to get customer-oriented and for successful commercialization. The vision of the future developed over 3 years until 1996 was to forecast 10 years coming up and create a new value while achieving the business target through the design as an innovative design in bracing for the information network era.