• Journal of the Semiconductor & Display Technology
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• v.14 no.3
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• pp.1-5
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• 2015

In photolithography process, resolution enhancement techniques such as optical proximity correction (OPC) and phase shift mask (PSM) have been applied to improve resolution. Especially, sub-resolution assist feature (SRAF) is one of the most important OPC to enhance image quality including depth of focus (DOF). However, imaging performance of the mask could be varied with the diffraction order amplitude changed by inserting SRAF. Therefore, in this study, we investigated the imaging properties and process margin of attenuated PSM with SRAF. Reflectivities of attenuated PSMs at 13.5 nm were 3, 6, 9% and simulation was performed by $PROLITH^{TM}$. As a result, aerial image properties and DOF as well as diffraction efficiency were improved by increasing the reflectivity of attenuated PSM. Additionally, printed critical dimension variations depending on SRAF width and space error were also reduced for attenuated PSM with high reflectivity. However, SRAF could be printed when reflectivity of attenuated PSM is high enough. In conclusion, optimization of reflectivity of attenuated PSM and SRAF to prevent side-lobe from being printed is needed to be considered.

• Korean Journal of Optics and Photonics
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• v.3 no.2
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• pp.77-85
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• 1992

The design of a flat-field XUV spectrograph is optimized for a high throughput, aberration-corrected spectral image in the wavelength region of 50-300 $\AA$ The varied-line spacing (VLS) concave grating theory for an XUV spectrograph with a toroidal mirror in front of an entrance slit is derived. Since the derived theory includes the arbitrary shaped source, it is able to correct the limit of the simple optimization theory which considers only a point source at the center of the entrance slit. The reflection matrix at the toroidal mirror and the diffraction matrix at VLS grating are derived and compared with those of a holographic grating. The absolute energy efficiency of a flat-field spectrograph is calculated by considering the reflectivities of the toroidal mirror and the Au coated concave grating and the grating efficiency. The alignment sensitivity of the toroidal mirror and the concave grating is investigated, and the method to achieve the best imaging of XUV spectrum is discussed. The calculated resolving power of the flat-field XUV spectrograph is more than 4000 in the aberration-corrected wavelength range. The focused spot size at the dispersion plane is less than $20\mu \textrm m\times \mu \textrm m$at the wavelength 100$\AA$ It is shown that a high throughput characteristic can also be achieved through a careful adjustment of alignment parameters.

• Korean Chemical Engineering Research
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• v.46 no.6
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• pp.1063-1068
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• 2008

The photocatalytic degradation of methylene blue water solution was carried out by irradiating microwave and UV light simultaneously using $TiO_2$ photocatalyst balls prepared by Chemical Vapor Deposition method. A microwave-discharged electrodeless UV lamp was developed to use microwave and UV simultaneously for photocatalytic reactions. The results of photocatalytic degradation of methylene blue showed that the decomposition rate increased with the microwave intensity, the circulating fluid velocity and auxiliary oxidizing agents added. Especially, the rate constant of $H_2O_2$-added photocatalytic reaction increased about three times from $0.0061min^{-1}$ to $0.0197min^{-1}$ when microwave was additionally irradiated. This study demonstrates that the microwave irradiation can play a very important role in photocatalytic degradation using peroxides although it is not easy to quantitatively assess the effect of microwave on photocatalytic reactions from the experimental data of this study.

• Journal of Astronomy and Space Sciences
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• v.24 no.2
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• pp.125-134
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• 2007

In this paper, we analyze the orbital variation of the Korea Multi-Purpose SATellite-1(KOMPSAT-1) in a strong space environment due to satellite drag by solar and geomagnetic activities. The satellite drag usually occurs slowly, but becomes serious satellite drag when the space environment suddenly changes via strong solar activity like a big flare eruption or coronal mass ejections(CMEs). Especially, KOMPSAT-1 as a low earth orbit satellite has a distinct increase of the drag acceleration by the variations of atmospheric friction. We consider factors of solar activity to have serious effects on the satellite drag from two points of view. One is an effect of high energy radiation when the flare occurs in the Sun. This radiation heats and expands the upper atmosphere of the Earth as the number of neutral particles is suddenly increased. The other is an effect of Joule and precipitating particle heating caused by current of plasma and precipitation of particles during geomagnetic storms by CMEs. It also affects the density of neutral particles by heating the upper atmo-sphere. We investigate the satellite drag acceleration associated with the two factors for five events selected based on solar and geomagnetic data from 2001 to 2002. The major results can be summarized as follows. First, the drag acceleration started to increase with solar EUV radiation with the best cross-correlation (r = 0.92) for 1 day delayed F10.7. Second, the drag acceleration and Dst index have similar patterns when the geomagnetic storm is dominant and the drag acceleration abruptly increases during the strong geomagnetic storm. Third, the background variation of the drag accelerations is governed by the solar radiation, while their short term (less than a day) variations is governed by geomagnetic storms.

• Journal of Korean Society of Environmental Engineers
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• v.30 no.8
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• pp.817-822
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• 2008

In this study, the photocatalytic degradation of methylene blue in TiO$_2$ particles-dispersed water solution was carried out by irradiating microwave and UV light simultaneously. A microwave-discharged electrodeless UV lamp was developed to use microwave and UV simultaneously for photocatalytic reactions. The results of photocatalytic degradation of methylene blue showed that the decomposition rate increased with the microwave intensity, the circulating fluid velocity, and the amount of TiO$_2$ particles and auxiliary oxidizing agents added. Especially, the rate constant of H$_2$O$_2$-added photocatalytic reaction increased about three times from 0.0075 min$^{-1}$ to 0.0250 min$^{-1}$ when microwave was additionally irradiated. This study demonstrates that the microwave irradiation can play a very important role in photocatalytic degradation using peroxides although it is not easy to quantitatively assess the effect of microwave on photocatalytic reactions from the experimental data of this study.