• Proceedings of the Korean Society Of Semiconductor Equipment Technology
• /
• 2007.09a
• /
• pp.42-54
• /
• 2007

${\blacksquare}$ 매엽실 세정장비의 양산적용 확대 ${\centerdot}$ 역오염 감소로 수율개선, 짧은 TAT ${\centerdot}$ Throughput 개선필요 : Process Module + Wafer Transfer ${\blacksquare}$ 향후 $2{\sim}3$년 동안 세정기술의 패러다임 변화 예상 ${\centerdot}$ 초미세 패턴에서의 입자 제거 대책 (${\sim}22.5nm$), 신재료에 따른 케미컬 대응 (에칭, 부식, 물성변화). ${\blacksquare}$ 세정기술의 통합 솔루션 필요 ${\centerdot}$ 초임계 유체세정 : 극미세 패턴까지도 대응 가능 ${\centerdot}$ 장비와 공정 측면에서 많은 연구 필요

• Journal of the Mineralogical Society of Korea
• /
• v.31 no.4
• /
• pp.287-293
• /
• 2018

Amorphous silica ($SiO_2$) silt grains were found in some soils of Korean Peninsula. Scanning electron microscopy of polished section of soils revealed ellipsoidal amorphous $SiO_2$ grains with numerous submicron pores concentrated in the interior. Their amorphous structure was confirmed by lattice imaging and electron diffraction under transmission electron microscope. Amorphous $SiO_2$ grains were not found in the eolian sediment of the Chinese loess plateau. Although the origin of the amorphous $SiO_2$ grain is uncertain, they are likely either phytolith or weathering product of volcanic ash. The amorphous $SiO_2$ silt grains are not useful as a tracer of long-range transport mineral dust in soils.

• Journal of ILASS-Korea
• /
• v.14 no.4
• /
• pp.184-189
• /
• 2009

Recently, ultrafine particles emitted from internal combustion engine is main concern because of its well known adverse health effects. So Europe decided to start the regulation about diesel engine particle number emissions. The nanoparticles smaller than 50nm in diameter have the ability to penetrate deep into interstitial tissue of luge, where they may cause severe respiratory inflammation and acute pulmonary toxicity. Recent studies have showed that spark ignition engines emit particles number concentration comparable to those from diesel engines with DPF under high load and rich mixture conditions, including cold starts and acceleration. So this study investigated emission characteristics of ultrafine particles according to fuel injection type in gasoline vehicles and LPG vehicles. The test vehicles were tested on CVS-75 and NEDC vehicle test mode using the chassis dynamometer, CPC system applied as a particle measuring instrument at the end of dilution tunnel. As a result, the correlation between fuel injection type and particulate emission was determined. GDI vehicle emitted 10 times higher particles than PFI vehicles, and compared to Mixer and LPGI type LPG vehicle, LPLI vehicle emitted particles high.

• Proceedings of the Korea Association of Crystal Growth Conference
• /
• 1996.06b
• /
• pp.3-27
• /
• 1996

분체의 입자 배열이 불규칙한 경우뿐만 아니라 입자 크기가 극미세하여 X선회절분석이 불가능한 경우에도 비정질물질이라 한다. 수용액 속에서 이런 비정질 물질을 합성하기 위해서는 합성용액의 과포화도를 높여 계속 유지시킴에 따라 극미세 1차핵 생성의 지속적인 유도에 따른 입자 성장을 최대한 억제시켜야만 한다. 본 연구에서는 흡습제, 칼슘제 및 식품 첨가제 등으로 이용되는 비정질 탄산칼슘을 계에서 합성하고, 이때 생성된 비정질 상태의 겔을 수용액 환경을 변화시켜가면서 따라 결정화를 유도하고 탄산칼슘의 동질이상을 관찰하였다. CO2의 유속을 11/min, 교반속도를 600rpm으로 고정시키고, Ca(OH)2의 양을 10g에서 50g까지 변화시켜가면서 겔 상태의 비정질 탄산칼슘을 합성하였다. 이때 전기전도도는 CO2의 용해와 더불어 Ca(OH)2의 용해도가 증가함에 따라 변화하였으며, 반응종반부에는 겔화가 시작될 때까지 거의 일정하였다. 따라서, 이러한 사실들로부터 현탁액 내에서의 전기전도도의 변화는 Ca이온의 영향을 받는 것으로 사료된다. 비정질 탄산칼슘은 수용액에서 불안정하여 CO2 가스를 방출하면서 급격히 결정화되는데, 본 연구에서는 Ca(OH)2의 양을 20g으로 하여 위의 방법에 의해 얻어진 겔을 수용액의 종류와 농도 및 결정화 온도, 교반속도를 달리하면서 결정화시켰다. 교반속도를 100rpm으로 하여 물의 온도변화에 다라 결정화시킨 경우 전 온도범위에서 칼사이트상이었으며, 물의 온도가 5$^{\circ}C$일 경우에는 미세한 입자들이 응집된 형태였으나, 그 외의 온도변화조건에서는 모두 평균입경 0.4$\mu\textrm{m}$정도의 비교적 균일하 능면체 형태였다. 또한 교반속도를 500rpm으로 증가시켰을 경우에는 8$0^{\circ}C$에서 침상의 아라코나이트가 소량생성되었음을 SEM사진으로 관찰할 수 있었으며, 소량의 바테라이트도 혼재되어 결정화되었음을 XRD결과로 알 수 있었다. 교반속도를 100rpm으로 한 NH4Cl 0.5mol/l 수용액에서는 입자의 형태와 크기가 불규칙한 칼사이트로 결정화되었으며, MgCl2 0.05mol/l 수용액의 경우에는 순수한 H2O의 경우에서와는 달리 2$0^{\circ}C$에서는 모서리가 무딘 매우 균일한 크기의 칼사이트 입자가 관찰되었으며, 6$0^{\circ}C$부터는 아라고나이트가 생성됨을 관찰할 수 있었다. 따라서, 고온(8$0^{\circ}C$)의 농도 MgCl2 수용액(0.1, 0.2 mol/l)에서 교반속도를 높여(800rpm) 겔을 결정화시킨 결과 아라고나이트의 생성수율이 증가되는 것을 확인할 수 있었다.

• Proceedings of the Korean Society of Marine Engineers Conference
• /
• 2000.11a
• /
• pp.61-67
• /
• 2000

Many research works for improving a boundary lubrication performance have been executed by using solid lubricants, and been tried to apply an engine lubrication. However those general lubricants like MoS$_2$ or PTFE have not been applied on engines due to the extreme conditions such as very high temperature and pressure by combustion process in a cylinder. A copper nickel alloy fine particle has been introduced and studied. In this Paper the lubricant using the alloy Particles is applied on a marine diesel engine and assessed by the engine performance test The results showed the increase of cylinder pressure related strongly to the engine efficiency as well as the improving the engine lubrication performance.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.16 no.1
• /
• pp.114-120
• /
• 2008

Recently, the nano-PM's number concentration emitted by diesel internal combustion engine has focused on attention because this particulate matters are suspected being hazardous of human health. In this study, The nano-PM mass and size of diesel passenger vehicles were measured on chassis dynamometer test bench. The particulate matters(PM) emissions of these vehicles were investigated by number concentration too. A condensation particle counter(CPC) system was applied to measure the particle number and size concentration of diesel exhaust particles at the end of dilution tunnel along the NEDC(ECE15+EUDC) and CVS-75 vehicle test mode. As the research result, the characteristic of vehicle test mode on the diesel nano-particle number and size distribution was investigated in this study.

• Journal of the Korean Magnetics Society
• /
• v.18 no.4
• /
• pp.154-158
• /
• 2008

Magnetite($Fe_3O_4$) is currently one of key materials for applications in magnetic storage and many bioinspired applications because bulk $Fe_3O_4$ has a high Curie temperature($Tc={\sim}850K$) and nearly full spin polarization at room temperature(RT). In this work, $Fe_3O_4$ nanoparticles with different sizes of 12 to 15 nm were prepared in a well-controlled manner by a nonhydrolytic synthetic method. Here, we report the significant intergrain magneto-resistance(MR) of ${\sim}2%$ at RT in $Fe_3O_4$ nanoparticle pellets. The tunneling conductance was also investigated based on the Brinkman model, as well. Our results show clearly that the surface or interfacial property of the particles plays a crucial role in the MR effect.

• Journal of the Korean Ceramic Society
• /
• v.29 no.9
• /
• pp.739-749
• /
• 1992

The sols prepared by dialyzing solutions, in which the hydrolyzed precipitates of TEOT or directly Ti(OC3H7)4 were resolved, were the nanoparticulate sol with the average particle size less than 7 nm and the anatase crystal phase. In the pH range of 1.5 to 2.9, the particle size of the nanoparticulate TiO2 sols (0.09 mol/ι) increased gradually upto 15 nm~26nm with the increase of pH in the initial aging state but the sols were transparent all the time, and stable without growin any more after 30 days. When the slipcasted porous alumina tubes were coated by the sol-gel dipping method, the minimum particle size and the aging time for forming the coated gel layer at the given pH were optimized. For obtaining the very thin crack-free and reproducible membrane coating, the use of a nanoparticulate TiO2 sol (0.09 mol/ι) aged for about 30 dyas at pH=2.0 was found to be the best.

• Journal of the Korean Ceramic Society
• /
• v.29 no.6
• /
• pp.496-504
• /
• 1992

Alumina tubes suitable for the support of gas separation membranes have been prepared by the slipcasting technique. These supports have the average pore size of 0.1 ${\mu}{\textrm}{m}$ within the narrow distribution. The sol-gel dipcoating process of nanoparticulate sols is very sensitive to microstructure of the support, and the coating on the inside surface of the tube is found to be more successful than on the outside surface. Nanoparticulate silica sols (0.82 mol/ι) have been synthesized by an interfacial hydrolysis reaction between TEOS and high alkaline water. When coating an alumina tube with these sols, the minimum limits of the particle size and the aging time required for forming the coated gel layer at the given pH are provided. It is optimum to coat the support with less concentrated sols stabilized through aging for the appropriate time (more than 22 days) at the lower pH (pH 2.0) for producing a reproducible crack free thin film coating in composite membranes.

• Journal of the Korean institute of surface engineering
• /
• v.52 no.6
• /
• pp.321-325
• /
• 2019

Triso-type coating layers of silicon carbide and graphite on UO₂ paticulate nuclear fuel were prepared by using fluidized bed type chemical vapor deposition and self-propagating high temperature synthesis methods to make a coated nuclear fuel of a power plant for hydrogen mass-production. The source and carrier gases were the mixture of methyltrichlorosilane and propane, and inert argon. Chemical analysis and microstructure observation showed that the coated layers were inner graphite, middle silicon carbide and outer graphite. The elastic modulus and nano-hardness of the silicon carbide layer were 503 [GPa] and 36 [GPa], respectively.