• Title/Summary/Keyword: 구면

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Five Mirror System Derived From the Numerical Solutions of all Zero 3rd Order Aberrations and Zero 5th Order Spherical Aberration for DUV Optical Lithography (모든 3차 수차와 5차 구면수차를 제거하여 얻은 극자외선 리소그라피용 5-반사광학계)

  • 이동희
    • Korean Journal of Optics and Photonics
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    • v.4 no.4
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    • pp.373-380
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    • 1993
  • A five mirror system with a reduction magnification(M=+1/5) is designed for DUV optical lithography. Initially, numerical solutions of all zero 3rd order aberrations and zero 5th order spherical aberration are obtained for the spherical mirror system. Next, by the optimization method, the aspherization is carried out to the two spherical mirrors to obtain a system that has as less residual aberrations, higher NA and improved MTF as possible. We have finally obtained the system of which NA is 0.45 and the resolution is about 500 cycles/mm at the 50% MTF value criterion and the depth of focus of $1.0{\mu}m$ for the nearly incoherent illumination$({\sigma}=1.0)$ and the wavelength of 0.248 m(KrF excimer laser line).

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Fizeau interferometry using angled end-face optical fiber source (경사 단면 광섬유 광원을 이용한 피조 간섭계)

  • 김학용;김병창;김승우
    • Korean Journal of Optics and Photonics
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    • v.12 no.4
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    • pp.334-338
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    • 2001
  • A Fizeau interferometer without beam splitter was constructed. Single-mode optical fiber was used as a spherical wave source and the face of fiber end was polished and coated to be a reflecting surface. The reflecting surface was angled so that interference fringe could be detected by CCD camera. Beam splitter in front of a spherical wave source could distort the wave front and that was one of the component error sources. With the proposed configuration there was no need to place beam splitter in the system. Improvement of phase measuring accuracy was evaluated quantitatively by comparing the result of this setup with that of a conventional Fizeau interferometer. Wave front of the angled end-face optical fiber source was also measured to verify its sphericity by PS/PDI (Phase Shifting/Point Diffraction Interferometer). The principle of this technique was presented and the experimental results and its applications were discussed. ussed.

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A Sequence of the Extreme Vertices ova Moving Regular Polyhedron Using Spherical Voronoi Diagrams (구면 보로노이 다이아그램을 이용한 움직이는 정규 다면체의 근점 알고리즘)

  • 김형석
    • Journal of Korea Multimedia Society
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    • v.3 no.3
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    • pp.298-308
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    • 2000
  • We present an efficient algorithm for finding the sequence of extreme vortices of a moving regular convex polyhedron of with respect to a fixed plane H.. The algorithm utilizes the spherical Voronoi diagram that results from the outward unit normal vectors nF$_{i}$ 's of faces of P. It is well-known that the Voronoi diagram of n sites in the plane can be computed in 0(nlogn) time, and this bound is optimal. However. exploiting the convexity of P, we are able to construct the spherical Voronoi diagram of nF$_{i}$ ,'s in O(n) time. Using the spherical Voronoi diagram, we show that an extreme vertex problem can be transformed to a spherical point location problem. The extreme vertex problem can be solved in O(logn) time after O(n) time and space preprocessing. Moreover, the sequence of extreme vertices of a moving regular convex polyhedron with respect to H can be found in (equation omitted) time, where m$^{j}$ $_{k}$ (1$\leq$j$\leq$s) is the number of edges of a spherical Voronoi region sreg(equation omitted) such that (equation omitted) gives one or more extreme vertices.

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Real-Time Motion Tracking Detection System for a Spherical Pendulum Using a USB Camera (USB 카메라를 이용한 실시간 구면진자 운동추적 감지시스템)

  • Moon, Byung-Yoon;Hong, Sung-Rak;Ha, Manh-Tuan;Kang, Chul-Goo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.40 no.9
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    • pp.807-813
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    • 2016
  • Recently, a spherical pendulum attached to an end-effector of a robot manipulator has been frequently used for a test bed of residual vibration suppression control in a multi-dimensional motion. However, there was no automatic tracking system to detect the current bob position on-line, and there was inconvenience to not be able to store the bob position in real time and plot the trajectory. In this study, we developed a two-dimensional, real-time bob-detecting system using a digital USB camera, of which the key is hardware component design and software C programming for fast image processing and interfacing. The developed system was applied to residual vibration suppression control of a two-dimensional spherical pendulum that is attached at the end-effector of a two degree-of-freedom SCARA robot, and the effectiveness of the developed system has been demonstrated.

The Evaluation of Reliability for the Combined Refractive Power of Overlapping Trial Lenses (중첩된 시험렌즈의 합성굴절력에 대한 신뢰도 평가)

  • Lee, Hyung Kyun;Kim, So Ra;Park, Mijung
    • Journal of Korean Ophthalmic Optics Society
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    • v.20 no.3
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    • pp.263-276
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    • 2015
  • Purpose: The current study aimed to evaluate the reliability for the combined refractive power when a spherical lens and a cylindrical lens were overlapped in a trial frame. Methods: The refractive powers, central thickness and peripheral thickness of spherical trial lenses and cylindrical lenses with negative power were measured. The combined refractive power of the spherical and cylindrical lenses was measured by auto lens meter. Measurement was repeated by changing the insertion order, and their results were further compared with the calculated combined refractive power. Results: There was no correlation between the variation of central and peripheral thickness in trial lenses and that of the lens power. Among 79 trial lenses, 3 trial lenses wasn't met the international standard. The refractive power calculated by Gullstrand's formula that could compensate vertex distance had smaller difference with the estimated power when compared with that calculated by thin lens formula however, it was significantly different from the estimated power. The refractive powers were generally apparent regardless of the insertion order of a spherical lens and a cylindrical lens: thin lens formula > actual measurements > Gullstrand's formula. The error was only found in cylindrical power calculated by Gullstrand's formula when inserted a spherical lens inside and a cylindrical lens outside however, the error was found in both of cylindrical and spherical powers calculated by Gullstrand's formula when inserted as a opposite order. By comparing actual measurements of equivalent spherical power, the accuracy was higher and the possibility of over-correction was lower when inserted a spherical lens inside and a cylindrical lens outside. Conclusions: From the results, those were revealed that the combined refractive power is influenced by the factors other than the vertex distance and the refractive power varies in accordance with the insertion order of a spherical lens and a cylindrical lens. Thus, it can be suggested that the establishment of standard for these is neccesaty.

Measurement of Spherical Aberration and Light Concentrating Efficiency of Lens by Using Thermocouple (열전대를 이용한 광학렌즈의 구면수차와 집광성능 측정)

  • Kim, Han-Seob;Park, Kyu-Yeol
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.5
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    • pp.172-177
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    • 2007
  • In this paper, spherical aberration and light concentrating efficiency of lens was measured. The measuring system is applying spherical aberration occurrence principal and could measure a temperature at focal plane by using the thermocouple. The sun which is located in infinite distance and could makes parallel ray is used as a illuminant or heat source in experiments. It is confirmed that light concentrating efficiency of optical lens is in inverse proportion to spherical aberration and.

Interferometric Testing of Fast CNC machined Aspheric Surface (CNC 가공된 급속한 비구면의 간섭계 검사)

  • 김광중;백성훈;김철중
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.02a
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    • pp.216-217
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    • 2000
  • 영상매체의 발달은 고성능의 정밀한 광학소자의 발전을 요구하게 된다. 이러한 광학소자는 제작의 용이함 때문에 주로 구면소자가 많이 사용되어 왔으나 구면소자만으로 해결하기 어려운 구면수차, 왜곡수차, 비점수차 등의 요인을 극소화하고 광학소자의 소형, 경량화를 위하여 비구면 광학소자의 사용이 필요하게 되었으며 비구면 가공기술의 발전과 더불어 그 사용이 증가하고 있다. 그러나 비구면광학소자는 제작과정의 어려움과 더불어 품질평가의 어려움이 있다. 특히 급속한 기울기를 가진 면의 측정은 3차원측정기에 의한 방법이나 간섭계를 사용한 단순한 null optics 검사로는 정확도와 실험의 한계가 있다. 비구면 광학소자의 평가방법으로는 간섭계를 사용하여 기준파면과 대상파면을 비교하는 일반적인 null testing과 최근에는 CGH(computer generated hologram)로 재생된 비구면파면과 대상파면을 비교하는 방법도 많이 연구되고 있다. 본 연구에서는 일반적인 검사방법으로는 검사가 어려운 급속한 기울기를 가진 포물면(parabolic surface)에 대한 하나의 검사방법을 제시하고자 한다. (중략)

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Measurement of Long Radius of Curvature by Using Bidirectional Shearing Interferometer (양방향 층밀리기 간섭계를 이용한 긴 곡률반경 측정)

  • 이윤우;조현무;이인원
    • Korean Journal of Optics and Photonics
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    • v.5 no.2
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    • pp.198-203
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    • 1994
  • An improved method for the measuement of very long radius of curvature by using a bidirectional shearing interferometer in a noncollimated light beam is given. This method can be used for both lenses and surfaces with positive or negative power. Detailed analyses for optical arrangements and achievable accuracy are presented.sented.

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Study on Numerical Model for Tsunami Propagation Using the Spherical Coordinate System (구면좌표계를 이용한 지진해일 전파모의를 위한 연구)

  • Ha, Tae-Min;Kim, Sung-Min;Lee, Seung-Oh;Cho, Yong-Sik
    • Proceedings of the Korea Water Resources Association Conference
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    • 2007.05a
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    • pp.2105-2108
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    • 2007
  • 지진해일이 발생하여 먼 거리를 전파할 때 코리올리스 힘이 지진해일의 거동에 매우 큰 영향을 준다. 또한 지진해일은 파장에 비해 파고가 작은 장파이기 때문에 먼 거리를 이동하는 지진해일의 해석에는 코리올리스 효과가 반영된 선형 천수방정식을 사용하는 것이 적절하다. 본 연구에서는 구면좌표계에서 유한차분기법을 사용하여 지진해일의 거동을 모의하였다. 대상 지진해일은 1983년 동해 중부 지진해일이다. 관측된 결과를 본 연구에서의 모의 결과와 비교하였다.

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Analysis of the Spherical-Rectangular Patch Microstrip Resonator (구면사각패치 마이크로스트립 공진기 해석)

  • Yang, Doo-Young;Lee, Sang-Seol
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.27 no.11
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    • pp.25-31
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    • 1990
  • We analyze the spherical-rectangular patch microstrip resonator with conformal surface by the cavity model and derive the formulas to calculate resonant frequency in the consideration of effective dielectric constant in order to minimize the errors of resonant frequency due to the fringing fields. A transmission type spherical-rectangular patch microstrip resonator operating at 3GHz, for example, is designed and fabricated on Epsilam-10 substate. Measuring data of resonant frequency and return loss are 2.985 GHz and -44.4dB respectively. Those well agreed with theoretical values.

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