• Title/Summary/Keyword: 광흡수분광법

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광방사 세기비를 이용한 공정 플라즈마의 변수 진단

  • Lee, Yeong-Gwang;O, Se-Jin;Lee, Jae-Won;Hwang, Hye-Ju;Lee, Hui-Jin;Kim, Yu-Sin;Jeong, Jin-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.149-149
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    • 2011
  • 아르곤 기체의 방사세기 또는 그 세기 비는 플라즈마 공정 진단에서 일반적으로 사용된다. 본 실험에서는 100 mTorr 압력 조건하의 유도결합 플라즈마(13.56 MHz)에서 E-H 모드 전이 영역, rf 바이어스(12.5 MHz) 전력 인가 및 N2 혼합 시 단순화한 충돌-방사 모델에 기초한 광방사 세기비 방법을 적용하여 플라즈마 변수를 진단하였다. 개발 프로그램 기반의 분광기를 사용하여 아르곤 기체의 특정 파장(750.4, 751.5 그리고 811.5 nm)들을 관측하였고, 동일한 조건하에서 정전 탐침법으을 이용하여 전자 에너지 분포함수의 변화도 측정 하였다. 맥스웰 전자 에너지 분포를 가정하는 일반적인 경우와 비교하여 볼 때 실제적인 전자 에너지 분포함수의 측정은 전자의 가열 메커니즘에 대한 상세한 정보를 제공함과 동시에 플라즈마 재흡수에 대한 보정을 가능하게 해준다. 광방사 세기비법에 의해 측정된 결과에 의하면, 750.4 nm/751.5 nm는 높은 에너지(>13.08 eV)의 전자들의 유효 전자온도에 대한 정보를 나타내는 반면 811.5 nm/750.4 nm는 아르곤 준안정 준위 밀도(1s5)에 대한 정보를 제공하게 된다. 수행된 실험 조건하에서, 측정된 준안정 준위 밀도는 E-H 모드 전이 영역에서 최대값을 나타내었고 바이어스 전압 및 N2 기체 혼합 비율이 증가함에 따라 감소하는 결과를 얻었다. 유효 전자온도의 경우 광방사 세기비법과 정전 탐침법 모두 같은 결과를 보여 주었는데, E-H 모드 전이 영역에서는 전자온도는 거의 일정하였고 바이어스 전압 및 N2 기체 혼합 비율이 증가함에 따라 전자온도는 증가하였다. 이러한 실험 결과는 방전 모드 전이, 바이어스 인가 그리고 혼합 기체 사용하는 공정 플라즈마를 이해하는데 있어 이들 변수의 진단이 중요한 요소임을 보여준다.

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Differences in the Electronic Structures of Bulk and Powder FeV2O4 Spinel Oxide Investigated by Using Synchrotron Radiation (방사광을 이용한 FeV2O4 스피넬 산화물의 덩치상태와 분말상태의 전자구조 차이 연구)

  • Hwang, Ji-Hoon;Kim, D.H.;Lee, Eun-Sook;Kang, J.S.;Kim, W.C.;Kim, C.S.;Han, S.W.;Hong, S.C.;Park, B.G.;Kim, J.Y.
    • Journal of the Korean Magnetics Society
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    • v.21 no.6
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    • pp.198-203
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    • 2011
  • The electronic structure of ferrimagnetic spinel oxide of $FeV_2O_4$ has been investigated by employing soft x-ray absorption spectroscopy (XAS) and soft x-ray magnetic circular dichroism (XMCD). The Fe 2p and V 2p XAS spectra show that the valence states of Fe and V ions are ${\sim}Fe^{2.3+}$ mixed-valent states and ${\sim}V^{3+}$ states, respectively. In Fe 2p XMCD spectra, finite XMCD signals are observed for divalent $Fe^{2+}$ states only, but not for $Fe^{3+}$ states. This finding indicates that the magnetic moments of $Fe^{2+}$ ions are ordered ferromagnetically but that those of $Fe^{3+}$ ions are cancelled, implying that $Fe^{2+}$ ions play an important role in determining magnetic properties of $FeV_2O_4$.

Flow Injection Spectrophotometric Determination of Cobalt with 2-(5-Bromo-2-pyridylazo)-5-(N-propyl-N-sulfopropylamino)aniline (2-(5-브로모-2-피리딜아조)-5-(N-프로필-N-슬포프로필아미노)아닐린을 사용하여 흐름주입법에 의한 코발트의 분광광도법적 정량)

  • Kang, Sam Woo;Kim, In Yong;Han, Hong Seok;Lee, Seung Seok
    • Analytical Science and Technology
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    • v.6 no.1
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    • pp.57-63
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    • 1993
  • Spectrophotometric determination of cobalt by flow injection method is described. 2-(5-Bromo-2-pyridylazo)-5-(N-propyl-N-sulfopropylamino) aniline rapidly forms a water-soluble complex with cobalt in $NH_3-NH_4Cl$ buffer solution at pH 10.5. The absorption maxima of this complex is at 545 nm with molar absorptivity of $58000L\;mol^{-1}\;cm^{-1}$. The calibration curve of cobalt is linear over the range of 0.1 to 0.6ppm and the detection limit is 25ppb. The relative standard deviation is ${\pm}0.72%$ for 0.5ppm and the sampling rate is $60samples\;hr^{-1}$. The interfering effect of some cations and anions was investigated. Ni(II), Cu(II), Fe(III) and $CN^-$ interfered severely. The interfering effect of these matallic ions could be decreased by adding $1.0{\times}10^{-3}M$ EDTA solution to the carrier stream.

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Studies of Liquid Crystal Alignment on the Photosensitive Polyvinylfluorocinnamate (광감성 폴리비닐플루오로신나메이트의 액정 배향에 관한 연구)

  • Kim, Dong-Soo;Ahn, Won-Sool;Ha, Ki-Ryong;Buluy, O.;Reznikov, Yu.
    • Polymer(Korea)
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    • v.31 no.5
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    • pp.393-398
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    • 2007
  • We studied the mechanism of liquid crystal alignment on polyvinylfluorocinnamate (PVCN-F) films which were irradiated by UV using polarized fourier transform infrared (FT-IR) spectroscopy and ultraviolet/visible (UV/Vis) spectroscopy. UV irradiation of PVCN-F films caused decrease of vinylene -C=C- stretching peak area at $1638cm^{-1}$ and shift of conjugated C:0 stretching vibration at $1712cm^{-1}\;to\;1734cm^{-1}$ which is caused by nonconjugated C=O stretching nitration. To study the orientation direction of 5CB liquid crystal (LC) molecules in the liquid crystal cell with PUV irradiation, rubbing treatment or without any treatment on the PVCN-F alignment layer, we used polarized FT-IR dichroism technique. We successfully measured 5CB LC alignment directions, which are perpendicular to the irradiated PUV polarization direction and parallel to the rubbing direction in the liquid crystal cell without using dichroic dyes.

Soft X-ray Synchrotron-Radiation Spectroscopy Study of [Co/Pd] Multilayers as a Function of the Pd Sublayer Thickness (Pd층의 두께 변화에 따른 [Co/Pd] 다층박막의 연엑스선 방사광 분광 연구)

  • Kim, D.H.;Lee, Eunsook;Kim, Hyun Woo;Seong, Seungho;Kang, J.-S.;Yang, Seung-Mo;Park, Hae-Soo;Hong, JinPyo
    • Journal of the Korean Magnetics Society
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    • v.26 no.4
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    • pp.124-128
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    • 2016
  • We have investigated the electronic structures of intermetallic multilayer (ML) films of [$Co(2{\AA})/Pd(x{\AA})$] (x: the thickness of the Pd sublayer; x = $1{\AA}$, $3{\AA}$, $5{\AA}$, $7{\AA}$, $9{\AA}$) by employing soft X-ray absorption spectroscopy (XAS) and soft X-ray magnetic circular dichroism (XMCD). Both Co 2p XAS and XMCD spectra are found to be similar to one another, as well as to those of Co metal, providing evidence for the metallic bonding of Co ions in [Co/Pd] ML films. By analyzing the measured Co 2p XMCD spectra, we have determined the orbital magnetic moments and the spin magnetic moments of Co ions in [$Co(2{\AA})/Pd(x{\AA})$] ML films. Based on this analysis, we have found that the orbital magnetic moments are enhanced greatly when x increases from $1{\AA}$ to $3{\AA}$, and then do not change much for $x{\geq}3{\AA}$. This finding suggests that the interface spin-orbit coupling plays an important role in determining the perpendicular magnetic anisotropy in [Co/Pd] ML films.

Basic Study on the Development of Analytical Instrument for Liquid Pig Manure Component Using Near Infra-Red Spectroscopy (근적외선 분광법을 이용한 돈분뇨 액비 성분분석기 개발을 위한 기초 연구)

  • Choi, D.Y.;Kwag, J.H.;Park, C.H.;Jeong, K.H.;Kim, J.H.;Song, J.I.;Yoo, Y.H.;Chung, M.S.;Yang, C.B.
    • Journal of Animal Environmental Science
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    • v.13 no.2
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    • pp.113-120
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    • 2007
  • This study was conducted to measure Nitrogen(N), Phosphate($P_2O_5$), Potassium ($K_2O$), Organic matter(OM) and Moisture content of liquid pig manure by Near Infrared Spectroscopy(NIRS) and to develop an alternative and analytical instrument which are used for measurement of N, $P_2O_5$, $K_2O$, OM, and Moisture contents for liquid pig manure. The liquid pig manure sample's transmittance spectra were measured with a NIRS in the wavelength range of 400 to 2,500 nm. Multiple linear regression and partial least square regression were used for calibrations. The correlation coefficient(RSQ) and standard error of calibration(SEC) obtained for nitrogen were 0.9190 and 2.1649, respectively. The RSQ for phosphate, potassium, organic matter and moisture contents were 0.9749, 0.5046, 0.9883 and 0.9777, and the SEC were 0.5019, 1.9252, 0.1180 and 0.0789, respectively. These results are indications of the rapid determination of components of liquid pig manure through the NIR analysis. The simple analytical instrument for liquid pig manure consisted of a tungsten halogen lamp for light source, a sample holder, a quartz cell, a SM 301 spectrometer for spectrum analyzer, a power supply, an electronics, a computer and a software. Results showed that the simple analytical instrument that was developed can approximately predict the phosphate, organic matter and moisture content of the liquid pig manure when compared to the analysis taken by NIRS. The low predictability value of potassium however, needs further investigation. Generally, the experiment proved that the simple analytical instrument was reliable, feasible and practical for analyzing liquid pig manure.

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Growth Properties of Sputtered ZnO Thin Films Affected by Oxygen Partial Pressure Ratio (산소분압비에 따른 ZnO 박막의 성장특성)

  • Kang, Man-Il;Kim, Moon-Won;Kim, Yong-Gi;Ryu, Ji-Wook;Jang, Han-O
    • Journal of the Korean Vacuum Society
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    • v.17 no.3
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    • pp.204-210
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    • 2008
  • ZnO thin films were grown on a glass by RF sputtering system with RF power 100W and oxygen partial pressure of $0%{/sim}30%$. Elliptic constants were measured by using a phase modulated spectroscopic ellipsometer and analyzed with the Tauc-Lorentz dispersion formula and best fit method in the range of 1.5 to 3.8eV. Also, scanning electron microscope(SEM) was used for the analysis of surface crystallization condition. From elliptic constants spectra, optical constants, thickness and roughness of ZnO films were evaluated. Total thickness of ZnO films obtained by ellipsometry showed good agreement with SEM data. It was found that the grain size of the films were getting smaller with increasing oxygen partial pressure. Band-gap of ZnO films increase with the oxygen partial pressure. These findings clearly indicate that optical properties of ZnO films are strongly dependent on the oxygen partial pressure. It could be explained that increasing the oxygen partial pressure induced high crystalline imperfection in the ZnO films.

Synthesis of Cerium Doped Yttrium Aluminum Garnet Hollow Phosphor Based on Kirkendall Effect

  • Kim, Min-Jeong;Suphasis, Roy;Gong, Dal-Seong;Jeong, Hyeon-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.185-185
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    • 2012
  • 중공 발광 나노 물질은 특유의 구조적 특성(낮은 밀도, 높은 비표면적, 다공성 물질, 낮은 열팽창계수 등)과 광학적 성질을 이용하여 디스플레이 패널, 광결정, 약물전달체, 바이오 이미징 라벨 등의 다양한 적용이 가능하다. 이러한 적용에 있어 균일한 크기와 형태의 중공 입자는 필수 조건으로 여겨진다. 지금까지 합성된 중공 발광 입자에는 BaMgAl10O17 : Eu2+-Nd3+, Gd2O3 : Eu3+, $EuPO_4{\cdot}H_2O$과 같은 것들이 있으나 크기 조절이 어렵고, 그 균일성이 확보되지 못하였다. 균일한 크기의 중공 발광 입자를 만들기 위해 SiO2나 emulsion을 템플릿으로 이용하여 황화카드뮴, 카드뮴 셀레나이드 중공 입자를 합성한 예가 있으나, 양자점의 독성으로 인하여 바이오분야 응용에는 적합하지 않다. YAG는 모체로써 형광체에서 가장 많이 이용되는 물질로, 화학적 안정성과 낮은 독성, 높은 양자 효율 등 많은 장점을 갖고 있다. 특히 세륨이 도핑된 YAG형광체의 경우 WLED, 신틸레이터, 바이오산업에 적용이 가능하다. 그러나 지금까지 중공 YAG:Ce3+형광체를 합성한 예가 없었다. 본 연구에서는 단분산 수화 알루미늄 (Al(OH)3) 입자 위에 세륨이 도핑 된 이트륨 베이직 카보네이트 ($Y(OH)CO_3$)를 균일하게 코팅한 후 열처리를 하여 균일한 크기의 Y3Al5O12:Ce3+(YAG) 중공 입자를 합성하였다. 열처리 온도에 따른 고분해능 투과 전자 현미경(HRTEM), X-선 회절(XRD), 고분해능 에너지 분광법(HREDX) 분석결과, 중공 YAG: Ce3+입자는 Kirkendall 효과에 의해 형성됨을 확인하였다. 전계방사형 주사 전자 현미경(FE-SEM) 측정을 통해, 열처리 후에도 입자의 크기와 형태가 균일함을 확인하였으며, 공초점 현미경 관찰을 통해 중공 형태를 명확히 확인 할 수 있었다. Photoluminescence (PL) 분광법과 형광 수명 이미징 현미경(FLIM)을 이용한 광 특성 분석결과, 합성된 입자는 400-500 nm에서 흡수 파장 (456 nm에서 최대 강도)과 500-700 nm 범위의 발광 파장(544 nm에서 최대 강도)을 나타냈고, 상용 YAG: Ce3+(70 ns)에 준하는 74 ns의 잔광 시간(decay time)이 측정되었다. 단분산 수화 알루미늄 입자의 크기를 조절하여 최종 합성된 YAG: Ce3+의 크기를 조절할 수 있었다. 지름 약 600 nm의 Al(OH)3를 사용한 경우, $1,300^{\circ}C$에서 열처리를 한 후 평균 지름 590 nm의 중공입자를 합성하였고, 약 170 nm의 Al(OH)3를 이용하여, 더 낮은 온도인 $1,100^{\circ}C$에서의 열처리를 통해 평균지름 140 nm의 중공 YAG: Ce3+입자를 합성하였다. 본 연구를 통하여 합성된 균일한 크기의 YAG 중공입자는 LED와 같은 광전변환 소자 및 다기능성 바이오 이미징 등의 나노바이오 소자 분야에 활용될 수 있음이 기대된다.

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Studies on Electrochemical Behavior of Some Light Lanthanide Ions in Nonaqueous Solution, Flow Injection Determination and Photochemical Characterization of Heavy Metal Ion Chelate Eight Coordinated Complexes. (Part 2) (비수용액에서 가벼운 란탄족 이온의 전기화학적 거동, 흐름 주입법에 의한 정량 및 중금속 이온의 킬레이트형 8-배위 착물의 광화학적 특성 연구 (제 2 보) : 계면활성제 존재하에서 Chromeazurol S를 사용하여 몇 가지 란탄이온의 흐름주입법에 의한 정량)

  • Gang, Sam U;Jang, Ju Hwan;Kim, Il Gwang;Han, Hong Seok;Jo, Gwang Hui
    • Journal of the Korean Chemical Society
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    • v.38 no.1
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    • pp.50-54
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    • 1994
  • Spectrophotometric determination of some light lanthanide ions by flow injection method is described. Chromeazurol S forms water soluble complex with lanthanide ions in the presence of DTAB. The absorption maximum of the complexes are from 650 nm to 655 nm and the molar absorptivities were ca. $1.8{\times}10^5\;L mol^{-1}cm^{-1}$ on Tris buffer (pH 10.5). The calibration curves for Nd(III), Eu(III) and Sm(III) obtained by FIA are over the range of 0.1 to 0.6 ppm and the correlation coefficient were ca. 0.9993. The detection limits (S/N) were from 10 ppb for Nd(III) and Eu(III) to 20 ppb for Sm(III). The relative standard deviations was ${\pm}$.2% for 0.4 ppm sample. The samples throughput was ca. $50\;cm^{-1}$.

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Thin-film optical waveguide $K^{+}$-ion sensor using the evanescent field absorption (소산장 흡수를 이용한 박막 광도파로형 칼륨이온센서)

  • Lee, Su-Mi;Koh, Kwang-Nak;Kang, Shin-Won
    • Journal of Sensor Science and Technology
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    • v.6 no.3
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    • pp.214-220
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    • 1997
  • A thin film optical waveguide sensor has been developed to measure and analyze quantitatively some inherent optical properties of biochemical substances. In this paper, two different kinds of thickness of thin film waveguide were prepared by RF sputtering of Corning-7059 glass(n = 1.588 at ${\lambda}=\;514nm$, Ar laser) on Pyrex glass substrates. We made a sensing membrane coated on the thin film waveguide with the poly(vinyl chloride-co-vinyl acetate-co-vinyl alcohol) (91 : 3 : 6) copolymer membrane based on $H^{+}$-selective chromoionophore and $K^{+}$-selective neutral ionophore and then proposed the thin film opptical waveguide ion sensor which can select a potassium ion. This sensor based ell the absorbance change by utilizing chromoionophore and neutral ionophore, which changes their absorption spectrum in the UV-vis region upon complexation of the corresponding ionic species, have been reported. The sensitivity dependence of the proposed sensor on interaction length, waveguide thickness, and content of a chromoionophore was investigated. This sensor has the measurement range of $10^{-6}M{\sim}1M$ for $K^{+}$ concentration and 90% response time of duration within 1 min. Also, our thin film optical waveguide sensor using the evanescent field was investigated as compared with conventional transmission sensor or optode sensor by the optical fiber. The sensitivity of thin-film waveguide $K^{+}$ sensor is higher than that of the conventional transmission sensor. The proposed sensor is expected to be useful to biochemical, medical, environmental inspection and so on.

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