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Nam, Gi-Yong;Kim, Gyeong-U;Kim, Gyu-Gyeom;Gwon, Yeong-Man;Yun, Gwon-Ha;Cheon, Gwon-Su;Na, Seung-Yu
- Proceedings of the Optical Society of Korea Conference
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- 2004.02a
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- pp.70-71
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- 2004
40nm의 해상도를 갖는 연 X-선 결상현미경 시스템의 광학계를 결정하였다. 연 X-선 장치에서의 대물렌즈로써 대상시료내에 빔 초점(focusing)를 위한 광학계로 두개의 Ellipsoid형 광하계로 설계하였다. 또한 접안렌즈로는 Fresnel zone plate로 하여 설계 및 제작하였다. 또한 연 X-선이 지나가는 빔 경로 상에 놓여진 다양한 물질들에 대한 각각의 X-선 광자의 조사선량을 계산하였다. 살아있는 세포를 관찰하고자하는 본 장치의 목적에 부합되기 위한 세포가 피폭되는 임계 방사선 조사선량의 관점에서 연 X-선의 선원의 세기와 검출기의 증폭효율을 고찰하였다.
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Park, Hyun-Goo;Park, Min-Cheol;Kim, Seung-Woo
- Journal of the Korean Society for Precision Engineering
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- v.14 no.11
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- pp.118-125
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- 1997
Non-contacting optical microscopes are increasingly used in recent industrial applications of probes for coordinate measuring machines. They have been found more efficient than conventional touch trigger porbes with ball tips especially in inspecting small-sized objects. There are two major factors affecting measuring accuracy: (1) geometric relations between coordinate systems, (2) magnification ratios of a microscope. In order to determine the magnification ratios exactly, optical imaging of edge was theroretically analyzed and practically adopted to image processing for edge detection. In addition, this paper proposes a geometric calibration method to obtain exact coordinates of measured points from the relations between the machine coordinate system and the image. In the method, the error according to the squareness between the machine axises was also removed. The method was practically adopted to a real coordinate measuring machine. An ultraprecision measurement of 0.2 um uncertainty can be practically achieved.
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