• Proceedings of the Korea Information Processing Society Conference
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• 2021.11a
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• pp.756-759
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• 2021

본 논문은 기존의 5축 치아가공기나 반도체장비등에 사용하고 있는 회전형 모터의 경우는 엔코더와 리졸버를 사용하고 있다. 엔코더와 레졸버는 고가이므로 실제 산업현장에서 전동기의 위치 센서로는 적용하기가 힘들다. 또한 엔코더와 레졸버와 같은 광학식 위치센서는 그 크기와 내구성에 있어 약점이 있기 때문에 취부 할 때에도 어려움이 있다. 따라서 본 연구에서는 5축치아가공기에 적용하기 위해서 자석가동자를 만들었으며, 이러한 문제점을 해결하는 방안으로 리니어모터를 고정자로 하고 자석플레이트를 이동자로 하는 시스템과 별도의 리니어 스케일을 배제하고 기존의 정현파를 발생하는 2개의 리니어홀센서 및 영구자석을 이용하여 가동자의 절대위치와 이동 위치를 검출할 수 있는 리니어 모터 및 그 제어방법, 안정성 및 신뢰성을 향상시킬 수 있는 자석가동자를 이용하여 구동시 실시간으로 데이터를 확인할 수 있고 제어할 수 있는 모니터링 시스템을 개발하는 연구이다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.4
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• pp.130-135
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• 1999

The main scale of linear encoder greatly effects on the precision of displacement measurement. Especially when needing the long range measurement the length of main scale should be increased accordingly. In this paper we propose a linear encoder that uses laser interference pattern as main scale for long range measurement. The linear encoder is similar to Michelson interferometer excepting that the reference mirror is tilted so as to obtain interference fringe pattern and a grating panel is attached on a quadratic photo diodes. Four kinds of grating having phase difference of 0. $\pi$/4, $\pi$/2, 3$\pi$/4 are arranged on the panel. The experimental results show that signals of quadratic photo diode A, B, {{{{ {-}atop {A } }}}} and {{{{ {- } atop {B } }}}} are cosine wavelike and successive signals have phase difference of $\pi$/4 each other. So the proposed method can achieve improved measurement resolution.

• Journal of the Institute of Convergence Signal Processing
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• v.2 no.3
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• pp.86-92
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• 2001

Position controls are very important in semiconductor manufacturing devices, machine tools, precision measuring instruments, etc. to measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. Thus an optical encoder that has such advantages as easy digital interface, economical price, and a resolution similar to that of laser interferometers can be used. In this paper, a interferometer-type linear scale with easy digital interface and high-resolution has been set up and measured the distance of movement based on the diffraction principle. Interference signals produced in this optical setup of the linear scale have beers digitalized through fabricated photodetectors and designed signal processing circuits. A resolution of 0.5${\mu}{\textrm}{m}$ is acquired from the experimental interferometer-type linear scale without for the movement of scales any additional dividing circuits. It is shown that from this experiment a high-resolution distance measurement device can be designed by a simple optical setup.