• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.503-507
• /
• 2002

Mask manufacturing is a high COC and COO process in developing of semiconductor devices, because of the mass production tool with high resolution. Direct writing has been thought to be one of the patterning method to cope with development or small-lot production of the device. This study focused on the development of the direct, mastless patterning process using stereolithography tool for the easy and convenient application to micro and miso scale products. Experiments are utilized by three dimensional CAD/CAM as a mask and photo-curable resin as a photo-resist in a conventional stereo-lithography apparatus. Results show that the resolution of the pattern was achieved about 300 micron because of complexity of SLA apparatus settings, inspite of 100 micro of inherent resolution. This paper concludes that photo resist and laser spot diameter should be adjusted to get finer patterns and the proposed method is significantly feasible to mastless and low cost patterning with micro and miso scale.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.12 no.1
• /
• pp.16-23
• /
• 2003

Keeping the layer thickness constant is very essential for improving the shape accuracy in the stereolithography process. The layer thickness is created by recoating process, and also affected by recoating parameters such as blade speed and thickness. The created layer in this process can determine the whole accuracy of the entire parts. The aim of this paper is to improve the accuracy of the layer thickness by adjusting the recoating process parameters. Several experiments with different recoating conditions are Performed to find the optimal recoating parameters that produce the most accurate layer thickness. The effective recoating method is suggested by measuring and analyzing the cured layer thickness.

• Journal of the Korean Society for Precision Engineering
• /
• v.24 no.12
• /
• pp.128-135
• /
• 2007

Micro-channels for a wave micropump have been fabricated using the Stereolithography and UV Photolithography. The micro-channel with a channel height of $500\;{\mu}m$ was fabricated with stereolithography. UV photolithography was used for producing micro-channels with a channel length less than $100\;{\mu}m$. The fabrication process data including spinning rpm, pre-bake and post-bake time, and develop time for single layer and multiple layer 3D micro-structures using SU-8 photo resist are experimentally found. A film mask printed with a 40,000 dpi laser printer was used for UV lithography and micro-structures in the order of tens of micrometers in dimension were successfully fabricated.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.714-719
• /
• 2004

Controlling the cure depth of the Fa1260T photopolymer enhances the quality of a microstructure and minimizes its size in microstereolithography. In this work, variation of cure depth of the Fa1260T photopolymer is investigated while the concentration of a photopolymerization inhibitor as a radical quencher was varied. The energy source inducing photopolymerization was a He-Cd laser and a motorized stage controled the laser beam path accurately. The effects of process variables such as laser beam power and scan speed on the cure depth were examined. Optimum conditions for the minimum cure depth were determined as laser power of 230 W and scan speed of 40-50 m/s at the concentration of the radical quencher of 5％. The minimum cure depth at the optimal condition was 14 m. The feasibility of the fabrication of microstructures such as a microcup, microfunnel, and microgrid of 100 m size is demonstrated using Super IH process.

• Proceedings of the KSME Conference
• /
• 2007.05a
• /
• pp.1259-1264
• /
• 2007

Microstereolithography technology has potential capability for fabrication of 3D microstructures. It evolved from conventional SLA which is one of the RP processes. In a microstereolithography process, 3D microstructures can be easily fabricated by continuously stacking 2D layer which is photopolymerized using a liquid prepolymer. Combination between biocompatible/biodegradable photocurable prepolymer and 3D complex fabrication in microstereolithography makes broad application areas such as medical, pharmaceutic, and bio devices. In particular, a 3D microneedle for transdermal drug delivery and a scaffold for tissue engineering are fabricated using this technology. In this paper, the authors address development of microstereolithography system adapted to large surface and fabrication of various microstructures. In addition, to apply human body we suggest a biodegradable 3D microneedle and a scaffold using biodegradable photocurable prepolymer.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2001.04a
• /
• pp.45-48
• /
• 2001

SL(Stereolithogrphy) part is made by piling up thin layers which causes the stair stepping effect at the surface of SL parts. This effect causes excessive surface roughness and requires additional postprocess finishing such as abrasive basting which is detrimental to part geometry and time consuming. Hence paraffin coating and grinding postprocess is proposed to raise the surface quality of SL part. The paraffin which has suitable properties for the proposed postprocess is coated all over the part surface. By grinding the thin layer of coated on the SL part only, the surface roughness can be improved without any damage on the part. From the experimental result, It is verified as very practical for die casting with silicon rubber mold.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2000.11a
• /
• pp.910-913
• /
• 2000

In this research we investigate geometric issues involved while using a particular rapid prototyping system, called Stereolithography(SLA). SLA create prototypes layer by layer, each layer being formed by scanning a laser beam across the x, y surface of a vat of liquid monomer mix. The performance of SLA is influenced by orientation and layer thickness of designed fabrication. The number of layer and the area needed support is influenced by the orientation and layer thickness of designed fabrication. The step influence and volume error is influenced by slice thickness. We minimize the support are, the number of layer and cusp height. These variables of fabrication is minimized using genetic algorithm. The time for genetic algorithm is as little as we can accept. So we calculate support area and cusp height simply.

• Journal of the Korean Society for Precision Engineering
• /
• v.14 no.6
• /
• pp.99-105
• /
• 1997

Recently, with a great interest in micromachine, it is more and more important to promote the way of manufacturing micromachine. The silicon process or the LIGA process was the main method to manufacture micromachine in the past. But, these manufacturing method was 2.5-dimensinal, there was the limit in manufacturing perfect 3-dimensional structure micromachine. In this study, we developed the rapid prototyping system for micromachining and tested its property. We also realized .mu. m-order manu- facturing and 3-dimensional structure processing. The results showed the possibility of micromachining with the rapid prototyping system.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.13 no.2
• /
• pp.15-20
• /
• 2014

The stereolithography(SL) process is a type of fabrication technology which relies on photopolymerization. It has a relatively simple fabrication process and a resolution of several tens of ${\mu}m$. Recently, SL technology has been applied to various areas, such as bioengineering and MEMS devices, due to the development of advanced materials. This technologycan be divided intothe scanning(SSL) and projection (PSL) types. In this paper, in stereolithography, parts are fabricated by curing photopolymeric resins with light. The application of stereolithography can now include fabricated parts. This process, called stereolithography, can fabricate parts by taking into account theirdegrees of geometry complexity. In particular, UV-LED stereolithography can perform quite rapid fabrication in which specific cross-sections are cured upon exposure to light.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.11 s.176
• /
• pp.210-217
• /
• 2005

A curl distortion induced by shrinkage during stereolithography polymerization process is analyzed with the classical lamination theory. Test parts of different layer thickness and part thickness are manufactured and their deformations are measured with CMM. Curl distortion is generated by the differential shrinkage of the layers, where the total shrinkage includes the shrinkages due to solidification and the change of temperature. It is shown that the curl distortion increases exponentially with decreasing the total thickness of the part, whose smaller layer thickness induces larger curl distortion. It is verified that only a part of the total shrinkage plays a role in generating the curl distortion.