• 한국산학기술학회논문지
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• 제12권12호
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• pp.5412-5419
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• 2011

산업의 발달에 따른 각종기기 장치들의 고속화, 소형화, 정밀화로 인해 고속 스핀들의 필요성은 점점 커지고 있다. 또한 공기동압베어링은 스테이지 모션에 대해서 무마찰 실현을 위해서 웨이퍼 생산용 광학 리소그래피 분야에도 적용된다. 공기동압베어링은 마찰에 의한 동력손실과 열 발생이 적어 고속회전에 유리하고 고정밀 회전이 가능하기 때문에 고속 고정밀 스핀들 시스템 및 하드 디스크 드라이브에 사용될 수 있다. 본 연구에서는 축 하중 지지를 위해 헤링본 홈 형상을 가지는 공기동압베어링의 성능에 대한 수치해석을 수행하였다. 또한 본 연구에서는 공기동압베어링을 제작하기 위해서 기존의 기계 가공방법과는 다른 비접촉식 초정밀 가공 방법인 마이크로 전기화학가공에 의한 방법으로 마이크로 그루브 가공을 수행하였고, 수치해석 프로그램을 이용하여 전극의 간극, 전해용액 농도, 가공시간 등 이론적인 수치를 시뮬레이션 하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.498-501
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• 2000

Air dynamic bearings are inherently unstable in dynamic behavior due to the varying angle of a force produced and the nonlinear characteristics of stiffness. In this study, such dynamic behavior is obtained and compared with experimental results. A body axis coordinate system is employed to avoid the change of a moment of inertia. FDM is used to calculate the pressure distribution on the bearing surface and then the force acting on the rotor was calculated by integrating the pressure distribution. By integrating accelerations which are calculated from the equations of motion using the 4th order Runge-Kutta method, the pose of the bearing at each time step is obtained.

• 한국정밀공학회지
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• 제17권9호
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• pp.145-150
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• 2000

Out-of-sphericity is degree of deformation of an air bearing sphere deviated from a perfect sphere. This paper investigates numerically the effect of out-of-sphericity error on the radial stiffness of an air bearing Three types of out-of-sphericity modes are considered. in this study the stiffness is calculated from pressure distribution at the bearing surface which is obtained by solving th Reynolds equation. in some cases large out-of-sphericity errors are found to improve the stiffnesses of air bearings. This implies that an air bearing of perfect hemispheres is not necessarily of the best performance. Thus much labor and cost in manufacturing air bearings can be saved, In addition the radial stiffness of an air bearing depends greatly on the application direction.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1997년도 제26회 추계학술대회
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• pp.217-224
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• 1997

Static characteristics of hemispherical aerodynamic bearing is studied theoretically. In this paper nonlinear equation of second order considering compressibility and slip effect of air is calculated by Newton-Raphson method. Results indicate that axial load capacity has maximum value when the inclination angle of groove is about 30$\circ$, the ratio of groove clearance to ridge clearance is two. We also present the design method of hemispherical Aerodynamic bearing based on it's load capacity taking into account manufacturing and assembling viewpoint.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.567-570
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• 2003

In recent years, the demand of mobile device, such as digital camera, camcorder and PDA, increases remarkably. So, requirements of the mobile information data storage used in the mobile devices increase noticeably also. 1" micro data storage is a kind of mobile storage. which has a CF type II form factor, and the similar structure of the general 3.5" HDD. In this paper, we developed the self acting air-lubricated ceramic bearing for the 1" micro data storage. The self acting air-lubricated ceramic bearing Is superior to the fluid bearing and the ball bearing on power consumption.