• Title/Summary/Keyword: 공기 동압베어링

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Evaluation of Machining Characteristics and Performance Analysis of Air-Lubricated Dynamic Bearing (공기동압베어링의 성능 해석 및 가공특성 평가)

  • Baek, Seung-Yub;Kim, Kwang-Lae
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.12
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    • pp.5412-5419
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    • 2011
  • The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.

Analysis of Dynamic Behavior of Spiral Grooved Air-Dynamic Bearings (나선홈을 가진 공기 동압베어링의 동역학적 거동 해석)

  • 신용호;최우천
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.11a
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    • pp.498-501
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    • 2000
  • Air dynamic bearings are inherently unstable in dynamic behavior due to the varying angle of a force produced and the nonlinear characteristics of stiffness. In this study, such dynamic behavior is obtained and compared with experimental results. A body axis coordinate system is employed to avoid the change of a moment of inertia. FDM is used to calculate the pressure distribution on the bearing surface and then the force acting on the rotor was calculated by integrating the pressure distribution. By integrating accelerations which are calculated from the equations of motion using the 4th order Runge-Kutta method, the pose of the bearing at each time step is obtained.

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Analysis of the Effects of Out-of-Sphericity in Spiral Grooved Hemispherical Air dynamic Bearings (나선 홈을 가진 반구형 공기 동압베어링에서 진구도 오차의 영향 해석)

  • Choe, U-Cheon;Sin, Yong-Ho;Choe, Jeong-Hwan
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.9
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    • pp.145-150
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    • 2000
  • Out-of-sphericity is degree of deformation of an air bearing sphere deviated from a perfect sphere. This paper investigates numerically the effect of out-of-sphericity error on the radial stiffness of an air bearing Three types of out-of-sphericity modes are considered. in this study the stiffness is calculated from pressure distribution at the bearing surface which is obtained by solving th Reynolds equation. in some cases large out-of-sphericity errors are found to improve the stiffnesses of air bearings. This implies that an air bearing of perfect hemispheres is not necessarily of the best performance. Thus much labor and cost in manufacturing air bearings can be saved, In addition the radial stiffness of an air bearing depends greatly on the application direction.

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Static Characteristics and Design of Hemispherical Aerodynamic Bearing (반구형 공기동압베어링의 정적 특성 및 설계)

  • 김승곤;김준영;최환영
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1997.10a
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    • pp.217-224
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    • 1997
  • Static characteristics of hemispherical aerodynamic bearing is studied theoretically. In this paper nonlinear equation of second order considering compressibility and slip effect of air is calculated by Newton-Raphson method. Results indicate that axial load capacity has maximum value when the inclination angle of groove is about 30$\circ$, the ratio of groove clearance to ridge clearance is two. We also present the design method of hemispherical Aerodynamic bearing based on it's load capacity taking into account manufacturing and assembling viewpoint.

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Development of Self Acting Air-Lubricated Ceramic Bearing for 1" HDD (1" HDD용 세라믹 공기 동압 베어링 개발)

  • 유진규;황태연
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2003.05a
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    • pp.567-570
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    • 2003
  • In recent years, the demand of mobile device, such as digital camera, camcorder and PDA, increases remarkably. So, requirements of the mobile information data storage used in the mobile devices increase noticeably also. 1" micro data storage is a kind of mobile storage. which has a CF type II form factor, and the similar structure of the general 3.5" HDD. In this paper, we developed the self acting air-lubricated ceramic bearing for the 1" micro data storage. The self acting air-lubricated ceramic bearing Is superior to the fluid bearing and the ball bearing on power consumption.

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