• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.800-803
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• 2004

The refractive index of the laser interferometer is compensated using the simultaneously measured variations of room temperature and humidity in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.12$\mu$m to 0.17$\mu$m by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of anaerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.15$\mu$m. English here.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

• 한국정밀공학회지
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• 제25권6호
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• 한국산학기술학회논문지
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• 제12권12호
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• pp.5412-5419
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• 2011

산업의 발달에 따른 각종기기 장치들의 고속화, 소형화, 정밀화로 인해 고속 스핀들의 필요성은 점점 커지고 있다. 또한 공기동압베어링은 스테이지 모션에 대해서 무마찰 실현을 위해서 웨이퍼 생산용 광학 리소그래피 분야에도 적용된다. 공기동압베어링은 마찰에 의한 동력손실과 열 발생이 적어 고속회전에 유리하고 고정밀 회전이 가능하기 때문에 고속 고정밀 스핀들 시스템 및 하드 디스크 드라이브에 사용될 수 있다. 본 연구에서는 축 하중 지지를 위해 헤링본 홈 형상을 가지는 공기동압베어링의 성능에 대한 수치해석을 수행하였다. 또한 본 연구에서는 공기동압베어링을 제작하기 위해서 기존의 기계 가공방법과는 다른 비접촉식 초정밀 가공 방법인 마이크로 전기화학가공에 의한 방법으로 마이크로 그루브 가공을 수행하였고, 수치해석 프로그램을 이용하여 전극의 간극, 전해용액 농도, 가공시간 등 이론적인 수치를 시뮬레이션 하였다.

• 연구논문집
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• 통권34호
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• pp.101-112
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.263-268
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• 2001

The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.468-472
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• 2005

In this paper, the static and dynamic stiffness of the air bearing stage for micro-micro machine tool are examined experimentally. For stiffness and precision concerns, air bearing stages are adapted for 3-axis micro-milling machine which is size of $200x200\;mm^2$. The air bearings in the stage are preloaded by permanent magnets to achieve desired bearing clearance and stiffness for vertical direction. As the stiffness of the air bearing is primary interests, static stiffness test were performed on XY stage in Z direction and Z column in Y direction. Dynamic test were performed on XY stage and Z column, respectively. Both static and dynamic tests were performed in different air pressure conditions. The vertical stiffness of XY stage is about 9 N/ pm where Y stiffness of Z column is much smaller as $1\;N/{\mu}m$ because of the large moment generated by Y force on the column.

• 천문학회보
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• 제37권2호
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• pp.151.1-151.1
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• 2012

우주발사체와 발사지원설비를 연결하여 추진제 공급과 전기신호 송수신 등을 가능하게 하는 메커니즘을 엄브리칼 장치라고 한다. 국내 우주발사체의 경우 액체산소와 케로신을 추진제로 사용하며, 질소, 공기 및 헬륨 등의 가스를 밸브구동, 공간 퍼지, 추진제 가압에 이용한다. 본 논문에서는 우주센터의 발사대설비에 적용된 엄브리칼 장치 중 추진제 및 고압가스 공급을 위한 자동체결장치(auto coupling device)의 구성, 기능 및 발사 준비를 위한 프로세스에 대해 기술하고 있다. 자동체결장치는 발사체 하부 두 곳에 연결되며, 산화제 공급측의 체결장치(coupling device 1)와 연료 공급측의 체결장치(CD 2)로 구성된다. 이 장치는 발사체와의 접촉면에서 기밀을 확보한 상태에서 내부의 탱크, 밸브, 인터스테이지 등에 추진제 및 각종 가스를 공급하는 통로역할을 하며, 발사준비가 완료된 후에는 발사체 이륙 전 또는 이륙과 동시에 발사체로부터 자동으로 분리된다. 각각의 체결장치 구성품으로는 발사체 이륙시 발생하는 고온의 화염으로부터 장치를 보호하는 PD(protective device), 접촉면에 기밀을 제공하고 추진제 누출을 방지는 MCP(multi-channel plate), 접촉면을 보호하기 위한 덮게, 각종 연결 배관의 전진과 후진을 위한 캐리지, 발사체와의 체결을 지지하는 그립 등이 있다. 발사 준비를 위해서 사전에 장치의 독립운용시험을 통해 각 구성품의 상태와 기능을 점검하고 장치의 작동성을 검증한다. 이후 발사체를 모사하는 기체 및 관제설비와 종합적으로 연계 시험과 모사시험을 수행하여 최종적으로 발사준비상태를 확인하게 된다. 이러한 자동체결장치의 운용 경험은 한국형발사체의 지상지원설비 개발에 활용할 수 있을 것이다.

• 한국음향학회지
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• 제28권8호
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• pp.781-789
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• 2009

다목적홀의 음향을 1:50 축소모형으로 예측 및 평가하기 위해 필요한 모형재료의 구성과 흡음특성에 대해 연구하였다. 실제 홀에서의 반사면 및 가변음항요소, 객석의 설계요소별 흡음특성 (125Hz-lkHz 평균)을 기준으로 축소모형의 형상과 재질을 선정하였으며, 흡음율은 상사의 법칙과 ISO 354를 준용하여 측정하였다. 그 결과, 주벽체의 평균흡음율은 0.08로 래커 코팅된 MDF나 아크릴이 적합하며, 객석 의자, 관객 및 연주자 평균흡음율은 각각 0.64, 0.74와 0.45를 목표로 할때 목재, 흡음천과 폼보드를 조합하여 흡음률을 재현하였다. 흡음커튼과 배너는 적용부위 및 단면설계에 따라 흡음재의 마운팅 방법을 선택하였으며, 배면공기층이 없는 상태 (A형 마운팅)에서의 평균흡음율이 0.42, 0.9 m 배면공기층 조건에서 시료 양단이 고정된 상태 (E형 마운팅)에서는 0.47, 천장에 매단 상태 (G형 마운팅)에서는 0.45로 나타났다. 특히, 배면공기층의 증가에 의해 저주파 대역 흡음력이 증가하였다. 스테이지 하우스 내부는 평균흡음율 0.68의 Fiber glass board 시공을 예상하여 흡음재와 스피커망 원단을 조합하여 재현하였다. 본 연구에서 도출된 모형 재료의 형상과 흡음특성은 향후 1:50 축소모형으로 다목적홀의 형상에 의한 중주파 대역 이하의 음향예측에 유용하게 활용될 것으로 사료된다.