• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.81-82
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• 2006

Conveyor-type transporters have been widely used as a typical delivery system of semi-conductor, FPD and other IT-related products. However, as the IT-product is getting larger in size and higher in resolution, several problems are caused by mechanical contacts between the transporter and target object. In this context, recently, lots of efforts are being devoted for development of various contact-free handling systems to get rid of deffets and oil contaminations. The objectives of this paper are to characterize suspension mechanisms and to investigate air flow effects on air levitation transport system. For this purpose, a series of CFD analyses were carried out and the simulation data showed a good agreement with the corresponding experimental ones. It is anticipated that the promising result can be used as a basis for concept design of the transport system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.269-270
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• 2010

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.4
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• pp.878-885
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• 2008

The FPDs(Flat Panel Displays) such as LCD(Liquid Crystal Display) and PDP(Plasma Display Panel) and OLED(Organic Light Emitting Diode), recently, have been substituted for CRT(Cathode Ray Tube) displays because they have a convex surface, small volume, light weight and lower electric power consumption. The productivity of FPDs is greatly dependent on the area of thin glass panel with 0.6 - 0.8mm thickness because FPDs are manufactured by cutting a large-scaled thin glass panel with patterns to the required product dimensions. So FPD's industries are trying to increase the area of thin glass panel. For example, the thin glass panel size of the 8th generation is 2,200mm in width, 2,600mm in length and 0.7mm in thickness. The air flows both in the thin glass panel and in the porous PE-plate surface were modeled and analyzed, from which a working condition was estimated. The thin glass panel on the porous PE-plate surface with self-lubricating characteristics was investigated and compared with that on the square duct floating bar surface with many holes of 1mm diameter when the thin glass panel contacts the floating bar surface due to malfunction of electric power supply.